Recycle of Silica Glass from Waste Silicate Glass/Hydrofluoric Acid, and Mechanism of Removing Metallic Icons from Silicate Glasses

本研究利用液相沉积(LPD)技术，从各种硅酸盐玻璃材料中回收二氧化硅玻璃。金属和金属氧化物的回收利用也是本研究的目标。作为回收二氧化硅玻璃的应用，对薄膜光波导和功能器件进行了研究。回收的LPD-SiOF薄膜中的残留金属元素浓度比玻璃瓶形成的H_2SiF_6水溶液中的浓度低三到五个数量级。这种回收技术也应用于阴极射线管(CRT)玻璃。虽然CRT玻璃对铅有较高的脱除能力，但对Sb的脱除较为困难。在测量频率为1 MHz时，再生LPD-SiOF薄膜的相对介电常数为3.78，略高于高质量LPD-SiOF薄膜的相对介电常数3.74。在632.8 nm波长下，使用回收的LPd-SiOF薄膜芯制作的薄膜光波导的传输损耗为0.8~2dB/cm。用该波导制作的热光器件的消光比为8.9dB，半波功率为5.89W，与使用优质LPD-SiOF薄膜的结果基本相同。

This research focuses on recycling silica glass from various silicate glass materials, using liquid-phase deposition (LPD) technique. Recycle of metals and metal oxides is also the target of this research. As an application of recycled silica glasses, thin-film optical waveguides and functional devices were examined. The concentration of residual metal elements in the recycled LPD-SiOF films was three or five orders of magnitude lower than that in the H_2SiF_6 aqueous solution formed from glass bottles. This recycling technique was also applied to cathode lay tube (CRT) glasses. High removal ability for Pb was obtained, however, it was difficult to remove Sb from CRT glasses. The relative dielectric constant for the recycled LPD-SiOF was 3.78 at the measurement frequency 1MHz, and was slightly higher than that for the high quality LPD-SiOF, films (3.74). The transmission loss of thin-film optical waveguides using recycled LPD-SiOF film core was 0.8〜2 dB/cm at the wavelength 632.8 nm. The thermo-optical devices with this waveguide show extinction ratio 8.9 dB and half-wave power 5.89 W. These results are almost the same as those using high quality LPD-SiOF film.