ダイヤモンドマイクロアレイ工具の創成と極微細加工に関する研究

在这项研究中，我们开发了一种金刚石微铣削工具的微纳米尺度加工。这种刀具是通过将金刚石切削刃连接到旋转轴的尖端来制造的。采用化学气相沉积（CVD）技术，在单晶硅各向异性湿法腐蚀或反应离子刻蚀的硅模具上沉积多晶金刚石，制成各种形状的金刚石阵列刀具。切削刃的形状有棱锥形、正方形、圆弧形、三角形、梯形等多种。利用该微铣刀对单晶硅、金属玻璃、丙烯酸树脂等材料进行了切削加工，通过扫描电镜观察到了大量的切屑。结果表明，该微铣削刀具可以实现高效率、高精度的加工。

In this study, we developed a diamond micro milling tool for micro-to-nano scale machining. This tool is manufactured by attaching a diamond cutting edge to tip of rotational axis. The diamond cutting edge with various shapes named "diamond array tool" are fabricated by depositing polycrystalline diamond using CVD on silicon molds which are made by anisotropic wet etching of the single crystal silicon or by reactive ion etching. The cutting edge has various shapes, the former is pyramidal, the latter are square, semicircle, triangle and trapezoid etc. By using this micro milling tool to machining for single crystal silicon, metallic glass and acrylic resin, the chip of these materials was observed largely by SEM image. It was found that the micro milling tool was possible to machining with high efficiency and accuracy.