ダイヤモンドマイクロアレイ工具の創成と極微細加工に関する研究

在本研究中，我们开发了一种用于微纳尺度加工的金刚石微细铣刀。该刀具是在旋转轴的刀尖上加装一颗金刚石刃口制成的。利用化学气相沉积技术在单晶硅各向异性湿法刻蚀或反应离子刻蚀的硅模上沉积多晶金刚石，形成各种形状的金刚石刃口，称为金刚石阵列刀具。刀具刃口形状多样，前者为金字塔形，后者为正方形、半圆形、三角形、梯形等。利用该刀具对单晶硅、金属玻璃和丙烯酸树脂等材料进行了加工，并用扫描电子显微镜观察了这些材料的切屑情况。结果表明，该微细铣刀可以实现高效率、高精度的加工。

In this study, we developed a diamond micro milling tool for micro-to-nano scale machining. This tool is manufactured by attaching a diamond cutting edge to tip of rotational axis. The diamond cutting edge with various shapes named "diamond array tool" are fabricated by depositing polycrystalline diamond using CVD on silicon molds which are made by anisotropic wet etching of the single crystal silicon or by reactive ion etching. The cutting edge has various shapes, the former is pyramidal, the latter are square, semicircle, triangle and trapezoid etc. By using this micro milling tool to machining for single crystal silicon, metallic glass and acrylic resin, the chip of these materials was observed largely by SEM image. It was found that the micro milling tool was possible to machining with high efficiency and accuracy.