Study on SPM Aided V-shaped Micro-grooving on Curved Surface by Cantilever for processing

SPM辅助悬臂式曲面V型微槽加工研究

• 批准号: 21560113
• 负责人: TAKANO Noboru
• 金额: $ 3万
• 依托单位: University of Toyama
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21560113/
• 关键词: 極微細加工; マイクロダイヤモンド工具; 高精度化; 微細溝加工; 加工用カンチレバー; 高アスペクト比; SPM

The aim of this study is a development of diamond tool for V-shaped micro-grooving and its applications. The V-shaped micro-grooving was processed by cantilever with sharpened cutting edge. A multi-cantilever with three different flexural rigidity levers was fabricated for processing with high efficiency. The characteristic of individual lever of multi-cantilever was estimated by line and concave processing.

这项研究的目的是开发用于V形微型沟通及其应用的钻石工具。 V形微型沟渠是由悬臂处理的，并具有锐化的切割边缘。制造了具有三种不同弯曲刚度杆的多局限器，以高效率处理。通过线和凹处理估算了多局体的单个杠杆的特征。