Low side-effect fine adjustment systems for ultra-precision instruments in hermetically sealed rooms

纳米技术和计量学等关键技术的进一步发展，对器件、设备和机器的精度提出了不断提高的要求。这就越来越要求对功能相关的量有最大的灵敏度，对干扰也有最大的不敏感度。为了减少外部干扰的影响并实现性能的进一步提高，超精密设备通常位于高度可控的密封室中，直至真空。例如纳米定位和纳米测量机器，以及精密天平和质量比较器。位于密闭腔内的精密装置各子系统之间相互干扰，需要对几何量进行修正。为此，使用了微调系统。在特别敏感的点或单位进行现场微调，以便在用尽所有其他可能性后进一步提高可实现的精度。微调系统的现有副作用限制或阻碍了微调的质量，从而影响了仪器的可实现精度。这些不能再被视为可以忽略不计的副作用，而必须被视为直接影响功能的寄生效应。尚未对微调系统及其预期和意外影响进行充分、科学、全面的审议。根据现有技术的微调系统主要是以特定应用和自下而上的方式开发的。重点主要放在确保动作的精确度上。因此，该项目的主要目标是调查微调系统之间的复杂相互作用，并在开发过程的早期阶段具体避免或至少大大减少副作用。这将为开发新的多学科综合方法创造必要的条件，并在此基础上开发新的微调系统，使超精密设备的性能得到显著提高。在对研究工作中产生的新型微调系统的性能进行研究的基础上，对方法进行了验证，并推导出了全面的设计准则。因此，精密工程设计指南将得到扩展，以便能够自上而下地开发用于超精密设备的低副作用微调系统。

The further development of key technologies such as nanotechnology and metrology places constantly increasing demands on the precision of devices, equipment and machines. This increasingly requires both maximum sensitivity for functionally relevant quantities and maximum insensitivity to disturbances. In order to mitigate the influence of external disturbances and to achieve a further increase in performance, ultra-precision devices are often located in hermetically sealed chambers under highly controlled conditions up to vacuum. Examples include nanopositioning and nanomeasuring machines, as well as precision balances and mass comparators. The subsystems of a precision device located in the closed chamber exert disturbance effects on each other, which require correction of geometric quantities. Fine adjustment systems are used for this purpose. Fine adjustments are made in-situ at particularly sensitive points or units in order to further increase the achievable precision when all other possibilities have been exhausted. The existing side effects of the fine adjustment systems have a limiting or hindering effect on the quality of the fine adjustment and thus on the achievable precision of the instrument. These can no longer be regarded as negligible side effects, but must be seen as parasitic effects directly influencing the function. An adequate scientific comprehensive consideration of fine adjustment systems and their intended and unintended effects has not yet been undertaken. Fine adjustment systems according to the state of the art are predominantly developed in an application-specific and bottom-up manner. The focus is primarily on ensuring the precision of the movement. The main objective of the project is therefore to investigate the complex interactions of fine adjustment systems and to specifically avoid or at least greatly reduce the side effects in the early stages of the development process. This will create the necessary conditions for the development of new multidisciplinary synthesis approaches and, based on these, novel fine adjustment systems that will enable a significant increase in the performance of ultra-precision devices. Based on the investigation of the properties of the novel fine adjustment systems emerging from the research work, the validation of the approaches and the derivation of comprehensive design guidelines are carried out. As a result, precision engineering design guidelines will be extended to enable top-down development of low side-effect fine adjustment systems for the use in ultra-precision devices.