Analyses of spatiotemporal dynamic behavior of microplasmas near a dielectric surface in microplasma using an optical near field

使用光学近场分析微等离子体介电表面附近微等离子体的时空动态行为

• 批准号: 15075204
• 负责人: SAKURAI Takeki
• 金额: $ 26.62万
• 依托单位: University of Yamanashi
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research on Priority Areas
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15075204/
• 关键词: Optical near field laser spectroscopy; Micro barrier discharge; Laser polarization spectroscopy; Plasma excited species near the wall; Dynamics of wall charges; Micro-array type VUV source; Plasm a processing technology for medicine; Homogeneity of

It is necessary to gain knowledge of the dynamics of excited species and accumulated charges near or on the dielectric surface in order to discuss the plasma characteristics in a barrier discharge and to consider efficient plasma applications. We developed techniques such as laser-induced evanescent-mode fluorescence (LIEF), cross-beam type LIEF and waveguide type laser absorption to quantitatively study a surface dynamics such as surface reflection of the excited metastable atoms in a microplasma for a plane parallel or a coplanar electrode type barrier discharge.We also developed an optical technique using an electro-optic crystal as a dielectric barrier in order to observe dynamics of accumulated surface charges. We found that the dynamics of surface charges is strongly dependent on gas pressures and a breakdown voltage is mainly determined by a surface charge density. From these measurements, the relation between true breakdown voltage and plasma homogeneity in a micro-gap atmospheric barrier discharge is discussed using a Streamer theory. It is clarified that the surface charges are modulated by an external irradiation of light. This makes possible to control a barrier discharge using an external light irradiation. Using these results obtained, the discharge mechanism of a plasma display panel, characteristics of a two-dimensional micro-array type VUV light source working at pressures higher than one atmosphere and the property of microplasma jet are investigated.We made experiments for disinfection of Bacillus spore forming bacteria and pathogenic species using atmospheric pressure plasma in a coplanar type barrier discharge, a pulse-modulated high frequency atmospheric discharge and a micro-gap discharge. The reduction of the heating, thermal effect and significantly strong antibacterial effect are realized.

为了讨论阻挡放电中的等离子体特性并考虑有效的等离子体应用，有必要了解介质表面附近或表面上的激发态和累积电荷的动态特性。我们开发了激光诱导消逝模式荧光（LIEF）等技术，采用交叉束LIEF和波导型激光吸收技术定量研究了平面平行或共面电极型阻挡放电微等离子体中激发亚稳原子的表面反射等表面动力学特性，并发展了一种利用电光效应的光学技术。光学晶体作为电介质屏障，以观察累积表面电荷的动态。我们发现，表面电荷的动力学是强烈依赖于气体压力和击穿电压主要是由表面电荷密度。根据这些测量结果，利用流光理论讨论了微间隙大气压阻挡放电中真实击穿电压与等离子体均匀性之间的关系。它是澄清的表面电荷调制的外部照射的光。这使得可以使用外部光照射来控制阻挡放电。在此基础上，研究了等离子体显示屏的放电机理、二维微阵列真空紫外光源的工作特性和微等离子体射流特性，并进行了共面阻挡放电大气压等离子体对芽孢杆菌孢子形成菌和病原菌的消毒实验，脉冲调制高频大气放电和微间隙放电。实现了加热、热效应的减少和显著强的抗菌效果。

项目成果

Property of accumulated surface charges in a barrier discharge and its external control

势垒放电表面累积电荷的特性及其外部控制

• 发表时间: 2007
• 期刊: Proc. 13th Int. Symp. Laser-Aided Plasma Diagnostics 13
• 作者: 矢澤美穂;千葉亮;鷹野芳樹;開康一;山本浩史;高橋利宏;中村敏和;N. Shirai;C. Y. Li;S. Kawata;O. Sakai;T. Shirafuji;T. Sakurai
• 通讯作者: T. Sakurai

Microbial-disinfection characteristics of wide-gap atmospheric pressure glow discharge using soft x-ray ionization

软X射线电离宽禁带大气压​​辉光放电的微生物消毒特性

• 发表时间: 2005
• 期刊: Plasma Processes and Polymers 2,2
• 作者: H.Ohkawa;T.Akitsu;M.Tsuji
• 通讯作者: M.Tsuji

External irradiated optical control of wall charges in a barrier discharges

势垒放电中壁电荷的外部照射光学控制

• 发表时间: 2007
• 作者: 古谷祐詞;神取秀樹;S. Kubota
• 通讯作者: S. Kubota

クロス型レーザーエヴァネッセント波分光法によるバリアー放電壁近傍励起種の計測

使用十字型激光倏逝波光谱法测量势垒放电壁附近的激发态物质

• 发表时间: 2004
• 作者: H.Okumura;S.G.Itoh;Y.Okamoto;村田 泰宏
• 通讯作者: 村田 泰宏

バリアー放電の誘電体近傍のミクロ観察

介电材料附近阻挡放电的显微观察

• 发表时间: 2003
• 作者: 櫻井 彪