Research of plasma Excited Species on Surface Measured by Evarescent-wave Spectroscopy

1.激发态原子与介质表面的相互作用在等离子体中起着重要的作用。了解表面等离子体的边界条件是十分必要的。在这项研究中，我们开发了一种新的方法，利用逝去波激光光谱来测量等离子体介质表面上被激发的亚稳态原子的动态行为。经验证，该方法适用于实际放电。一种激光诱导消逝模式荧光(LEF)方法被应用于玻璃池中填充的Ar的阻挡放电。从实验中得到了玻璃势垒表面亚稳态原子的暂态行为和通量。这一知识有助于阻挡放电的有效运行，因为作为阴极的表面与放电机理直接相关。将Lef方法应用于等离子体显示板(PDF)放电。表面可食原子的时间平均密度为1012cnr3。这是第一个关于表面密度的实验结果。为了弄清密度对使用Lef的介电材料的影响，我们*计划从真空室中分离PDF。为了直接测量亚稳原子在势垒表面上的反射等动力学行为，我们提出了一种新的交叉束式激光测量技术。

1. An interaction between excited atoms and a dielectric surface plays an important role in the plasma. It is necessary to understand the boundary conditions of plasma on the surface. In this research we have developed a new method using an evanescent-wave laser spectroscopy in order to measure dynamic behaviors of excited metastable atoms on a dielectric surface in a plasma. It is confirmed that this method is applicable to an actual discharge.2. One method of laser induced evanescent-mode fluorescence (LIEF) is applied to barrier discharged of Ar filled in a glass cell. From the experiments, a transient behavior and a flux of the metastable atoms on the glass barrier surface are obtained. This knowledge is helpful for efficient operations of barrier discharges, because the surface acting as a cathod is directly concerned with the discharge mechanism.3. LIEF method is applied to a plasma display panel (PDF) discharge. A considerably high time-averaged density of meatastable atoms on the surface are obtained to be 1012cnr3. This is the first'experimental result of the density on the surface. In oreder to clarify an effect of density on dielectric material using LIEF, we* are planning on detachable PDF from a vacuum chamber.4. We propose a new technique of LIEF in cross- beam type in order to measure directly dynamic behaviors of metastable atoms on a barrier surface such as reflection.