Measurement of dynamics of plasma excited species on dielectric surface using waveguide type optical near field

使用波导型光学近场测量电介质表面等离子体激发物种的动力学

• 批准号: 15540469
• 负责人: SAKURAI Takeki
• 金额: $ 1.98万
• 依托单位: University of Yamanashi
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15540469/
• 关键词: Barrier discharge; LiNbO_3; Optical waveguide; Metastable excited atoms; Dielectric surface; Laser optical near field; Absorption; 吸収分光; LiNbO_3; 誘電体表面; プラズマ励起種-表面相互作用; 光近接場吸収分光

In recent discharge applications, an interaction between excited species produced in plasma and dielectric surface is fundamentally important. A new technique using an waveguide type optical near field laser spectroscopy is developed to quantitatively observe the excited species on the dielectric surface in plasma.1.An optical waveguide on LiNbO_3 crystal was produced by ion-exchanging method. Ion-exchange was performed with H_3PO_4 liquid in high temperature and an annealing in oxygen gas made it possible to reduce a transmission loss. From the comparison with theoretical analysis of waveguide, the optimum waveguide depth was determined to be 1.8 μm and the laser transmission in TM0 mode was suit for this experiment2.Using LiNbO_3 with waveguide, a parallel plate barrier discharge device was constructed in a vacuum chamber. The discharge was produced with a pure Ar gas. Laser was incident to the waveguide from a coupling prizm and the optical near field appeared on the waveguide interacted with Ar metastable atoms in the vicinity of surface. After transmitting in the waveguide, the absorbed laser was detected. As a result of improvement of the optical system, the absorption signal due to metastables was obtained with a high S/N.3.Ar metastable density on the dielectric surface was measured from the absorption signal as a function of Ar gas pressure up to 50 Torr and it was clear that the dependence on pressure was much different from the dependence of metastables in bulk plasma. The flux of metastables on the surface was estimated.4.A new phenomenon such that the transmitted laser intensity considerably decreased in exponentially just after the discharge started was found experimentally. This phenomenon should be analyzed. This experimental technique must be mixed with a cross-beam type spectroscopic method in order to observe a dynamic behavior of excited species on the surface.

在最近的放电应用中，在等离子体和电介质表面产生的激发物种之间的相互作用是非常重要的。本文提出了一种利用波导型近场激光光谱定量观察等离子体介质表面激发态的新技术。1.采用离子交换法在LiNbO_3晶体上制作光波导。在高温下用H_3PO_4液体进行离子交换，并在氧气中退火，以降低传输损耗。通过与波导理论分析的比较，确定了波导的最佳深度为1.8 μm，并使激光在TM_0模式下传输。2.利用带波导的铌酸锂，在真空室中制作了平行板阻挡放电器件。放电是用纯Ar气体产生的。激光从耦合棱镜入射到波导中，与表面附近的Ar亚稳原子相互作用，在波导上产生光学近场。在波导中传输后，被吸收的激光被检测到。由于光学系统的改进，吸收信号，由于可吸收的获得与高的S/N。3. Ar亚稳密度的介质表面上的测量作为Ar气体压力的函数，从吸收信号高达50托，很明显，对压力的依赖性是很大的不同，从体等离子体中的可吸收的依赖性。4.实验发现了放电开始后透射激光强度呈指数衰减的新现象。这种现象应该加以分析。这种实验技术必须与交叉光束型光谱方法相结合，以便观察表面上受激物种的动态行为。

项目成果

導波路型光近接場レーザー分光法によるバリアー放電壁面近傍励起種の計測

使用波导光学近场激光光谱测量势垒放电壁附近的激发态物质

• 发表时间: 2004
• 期刊: 電気学会プラズマ研究会資料 PST-04-27
• 作者: T.Sakurai;T.Sakurai;T.Sakurai;櫻井 彪;T.Ito;岩下智史
• 通讯作者: 岩下智史

Optical micromeasurement of microplasma (in Japanese)

微等离子体的光学显微测量（日语）

• 发表时间: 2004
• 期刊: O plus E 26, 11
• 作者: T.Sakurai;T.Sakurai;T.Sakurai;櫻井 彪;T.Ito;岩下智史;櫻井 彪;K.Tachibana;T.Sakurai;T.Sakurai;T.Sakurai;T.Sakurai;T.Iwashita;T.Sakurai
• 通讯作者: T.Sakurai

Diagnostics and simulation of microplasma

微等离子体的诊断和模拟

• 发表时间: 2004
• 期刊: J.Plasma Fusion Res. 80, 10
• 作者: T.Sakurai;T.Sakurai;T.Sakurai;櫻井 彪;T.Ito;岩下智史;櫻井 彪;K.Tachibana;T.Sakurai;T.Sakurai;T.Sakurai;T.Sakurai;T.Iwashita;T.Sakurai;K.Tachibana
• 通讯作者: K.Tachibana

Spatial and temporal measurement of wall voltage in barrier discharges

势垒放电中壁电压的空间和时间测量

• 发表时间: 2004
• 期刊: 2^<nd> Intern.Workshop on Microplasmas, New Jersey, U.S.A.
• 作者: T.Sakurai;T.Sakurai;T.Sakurai;櫻井 彪;T.Ito;岩下智史;櫻井 彪;K.Tachibana;T.Sakurai;T.Sakurai;T.Sakurai
• 通讯作者: T.Sakurai

K.Sugimoto, H.Takahashi, O.Shimomura, T.Sakurai: "Measurement of wall voltage in barrier discharges using an electro-optic crystal"J.Phys.D : Appl.Phys.. 36. 2887-2890 (2003)

K.Sugimoto、H.Takahashi、O.Shimomura、T.Sakurai：“使用电光晶体测量势垒放电中的壁电压”J.Phys.D : Appl.Phys.. 36. 2887-2890 (2003)