Active compensation of the movement inaccuracies of feed drives with profiled rail guides based on high dynamic piezo actuators

到目前为止，在高精度应用中，流体动力和磁性线性引导系统优于线性成型导轨，因为这些引导系统具有高运行精度、高阻尼能力、高刚度，并且它们没有粘滑效应和磨损。而成型导轨构造相对简单，不需要昂贵和复杂的附加骨料，因此它们可以非常经济地使用。异型导轨的不足之处在于，非线性刚度由滚动接触中的条件决定，并且这些条件由于动态滚动元件再循环而周期性地变化。成型导轨的不同位移部分的总和导致进给驱动器的不准确性。特别是由自激和分离激振引起的动态刚度可高达静态刚度的171倍，这也是因为阻尼系数d=0.001至d=0.01的低阻尼能力。没有单独激励的循环运动不准确性（冲程脉动）的部分可达1 µm。异型导轨仅在高精度应用中（几何优化的入口区域适合特殊应用）与球链和附加阻尼导轨一起定制使用，以减少振动刺激和冲程脉动。静态和动态位移的问题不能完全解决，特别是对于可变的过程参数。其原因是非线性滚动接触中的速度和载荷相关效应。异型导轨作为机械工程中一种经过充分研究的通用标准件，具有众多的应用优势，但目前还没有主动补偿运动误差的方法。本研究项目旨在为如何主动提高异型导轨进给驱动器的运动精度提供新的基本见解。以便在精度要求在较低微米或甚至纳米范围内的高精度应用中使用它们，并使它们与流体静力学和磁性引导系统竞争。因此，基于数学等效机械振动系统的关于成型轨道导轨的动态稳定性的已知理论见解和基于滚动接触中的赫兹位移以及导轨滑架和导轨的弹性变形的静态载荷-位移模型与关于滚动元件的真实的动态行为的新研究见解相结合，导向滑架和附加组件。在此基础上，将开发基于压电致动器的基于模型的运动不准确性补偿的实时系统。

So far, hydrodynamic and magnetic linear guidance systems are preferred over linear profiled rail guides at high precision applications, because these guidance systems have a high running accuracy, a high damping capacity, a high rigidity and they are free of stick- slip effects and ware. Whereas profiled rail guides are constructed relatively simple, don’t need expensive and complex additional aggregates and therefore they can be used very cost-efficiently. The deficit of profiled rail guides is, that the nonlinear rigidity is dominated by the conditions in the rolling contact and these conditions change cyclically due to the dynamic rolling element recirculation. The sum of different displacement parts of the profiled rail guides lead to inaccuracies in feed drives. Especially the dynamic rigidity, caused by self- and separate excitation, can be up to 171 times higher than the static rigidity, also because of the low damping capacity with damping factors of d=0.001 to d=0.01. The part of cyclical movement inaccuracies without separate excitation (stroke pulsation) can be up to 1 µm. Profiled rail guides are only used as a custom-built in high precision applications (geometric optimized inlet areas that are adapted to special applications) with ball chains and additional damping guides, in order to reduce vibration stimulation and stroke pulsation. The problem of static and dynamic displacements cannot be solved, especially not for variable process parameters, completely with that. The Reason for this are velocity- and load-dependent effects in the nonlinear rolling contact. For profiled rail guides as a well-researched and versatile applicable standard component in mechanical engineering with its numerous application benefits, there is no active procedure to compensate movement inaccuracies.The proposed research project wants to provide new fundamental insights on how the movement accuracy of feed drives with profiled rail guides can be improved actively, in order to use them in high precision applications with accuracy requirements in the lower micrometer or even nanometer range and make them competitive to hydrostatic and magnetic guidance systems. Therefore the known theoretical insights about the dynamic descriptiveness of profiled rail guides, based on a mathematical equivalent mechanical vibration system, and the static load-displacement-model, based on the Hertzian displacements in the rolling contact and the elastic deformation of the guide carriage and the guide rail, are combined with new investigated insights about the real dynamic behavior of the rolling elements, the guide carriage and additional assemblies. Building on this, a real-time capable system for a model-based compensation of movement inaccuracies, based on piezo actuators, will be developed.