新型複合干渉計と波長走査を用いたレンズ曲率半径の絶対値測定手法の開発

开发使用新型复合干涉仪和波长扫描测量透镜曲率半径绝对值的方法

• 批准号: 16K17993
• 负责人: 金 亮鎭
• 金额: $ 2.66万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2016
• 资助国家: 日本
• 起止时间: 2016-04-01 至 2017-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-16K17993/
• 关键词: 干渉計; 波長走査; 曲率半径; レンズ

本研究では曲面レンズの絶対曲率半径の測定を目的として複合型干渉計の開発及び新しい位相検出アルゴリズムの開発を行う予定であった．途中中断により複合型干渉計の開発は行えなかったが，既存の位相検出アルゴリズムの性能を大幅に超える6N-5位相検出アルゴリズムの開発に成功し，透明試料の光学的厚さ分布の変動成分と表面形状の同時測定を研究期間中に行った．6N-5位相検出アルゴリズムは同研究者の開発した4N-3位相検出アルゴリズムと同様にSurrelの特性多項式を基盤として開発された．特性単位円上に六重根を配置し，特性多項式を展開することによって6N-5位相検出アルゴリズムのサンプリング振幅が得られた．また，カップリング誤差にも注目して他位相検出アルゴリズムと性能評価を行った結果，6N-5位相検出アルゴリズムが一番優れた性能を示すことが分かった．6N-5位相検出アルゴリズムの開発を行う前に5N-4アルゴリズムの開発を行い，シリコンウエハーの表面形状の測定を行った．6N-5位相検出アルゴリズムとFizeau型波長走査干渉計を用いて透明試料の光学的厚さ分布の変動成分と表面形状の同時測定を行い，いずれの結果も従来の位相検出アルゴリズムを用いた結果より高い精度で測定できることがわかった．

The purpose of this study is to determine the radius of curvature of the curved surface. In this study, the purpose of this study is to determine the radius of curvature of the curved surface. The purpose of this study is to measure the radius of curvature of the curved surface. In this study, the purpose of this study is to measure the radius of curvature of the curved surface. The purpose of this study is to measure the radius of curvature of the curved surface. In this study, the purpose of this study is to determine the radius of curvature of the curved surface. The purpose of this study is to measure the radius of curvature of the surface in order to determine the performance of the complex design and the new phase. The thickness distribution of transparent material optics is measured at the same time, and the surface shape is measured at the same time. 6N-5 phase measurement during the study period. 6N-5 phase out of each phase. The researchers started the 4N-3 phase analysis and the same Surrel characteristics. The characteristics of the multi-component base equipment start-up. The six-fold root configuration on the property level The characteristic multinomial shows that the 6N-5 phase shows that the amplitude of the signal is different, and that the amplitude of the amplitude is different. The other phase shows the results of the performance test. The phase of 6N-5 shows the performance of the system. 6N-5 phase shows the performance of the system. 6N-5 phase shows that before the start of the operation, the 5N-4 will start the operation The thickness distribution of optical fiber optics in transparent materials is measured at the same time, and the surface shape is measured at the same time. 6N-5 phase is used to measure the thick distribution of Fizeau wavelengths in transparent material optics.

项目成果

Compensation for correlated error in multilayer interferometer

多层干涉仪中相关误差的补偿

• DOI: 10.1364/ao.55.000171
• 发表时间: 2016
• 期刊: Applied Optics
• 影响因子: 1.9
• 作者: Yangjin Kim;Kenichi Hibino;Naohiko Sugita and Mamoru Mitsuishi
• 通讯作者: Naohiko Sugita and Mamoru Mitsuishi

Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer

• DOI: 10.1016/j.optlaseng.2016.06.021
• 发表时间: 2016-11
• 期刊: Optics and Lasers in Engineering
• 影响因子: 4.6
• 作者: Yangjin Kim;K. Hibino;N. Sugita;M. Mitsuishi

Measurement of highly reflective surface shape using wavelength tuning Fizeau interferometer and polynomial window function

• DOI: 10.1016/j.precisioneng.2016.02.011
• 发表时间: 2016-07
• 期刊: Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology
• 影响因子: 3.6
• 作者: Yangjin Kim;N. Sugita;M. Mitsuishi