Ion Microscope for Nanostructuring and Mass Spectroscopy

用于纳米结构和质谱分析的离子显微镜

• 批准号: 511191482
• 金额: --
• 依托单位: Universität Konstanz
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2023
• 资助国家: 德国
• 起止时间: 2022-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/511191482?language=en
• 关键词: Ion; Microscope; Nanostructuring; Mass; Spectroscopy

An ion microscope optimized for high-resolution imaging with ions, high-resolution and large-area structuring of samples, and mass spectroscopy is being applied for. This microscope will ideally complement the equipment already available in the Core Facilities of the University of Konstanz and create new potential in the field of nanostructuring and analytics. Various new research projects make it necessary to further increase the resolution of nanostructuring. To this end, a temporally very stable ion source with an image resolution of less than 2 nm is necessary. At the same time, we need high mechanical stability and precise positioning of the sample in order to be able to pattern larger areas with high resolution. The analytical capabilities should provide elementary information of the samples by a secondary ion mass spectrometer (SIMS), which is not accessible to us so far. The combination of a focused ion beam (FIB) with a SIMS allows elemental analysis with highest lateral and depth resolution. In addition, there are all the advantages of a SIMS such as a low detection limit in the ppm range, the ability to detect light elements and a very surface sensitive measurement. Imaging with a SIMS of highest resolution offers numerous new possibilities such as labeling by isotopes. An ion source with different elements brings advantages for both nano-structuring and mass spectroscopy. It provides ions of a light element for high-resolution patterning with low material removal, but can also emit heavy ions when larger areas need to be processed. In the case of mass spectroscopy, it is advantageous to have ions available that increase the ionization efficiency of positive or negative secondary ions. In addition, a cluster source provides reduced fragmentation during ablation of the material and molecular information.

正在应用一种离子显微镜，用于离子高分辨率成像、样品高分辨率和大面积结构化以及质谱分析。该显微镜将完美地补充康斯坦茨大学核心设施中已有的设备，并在纳米结构和分析领域创造新的潜力。各种新的研究项目使得有必要进一步提高纳米结构的分辨率。为此，需要具有小于2nm的图像分辨率的时间上非常稳定的离子源。同时，我们需要样品的高机械稳定性和精确定位，以便能够以高分辨率对更大的区域进行图案化。分析能力应该通过二次离子质谱仪（西姆斯）提供样品的基本信息，这是我们目前无法获得的。聚焦离子束（FIB）与西姆斯的结合可实现具有最高横向和深度分辨率的元素分析。此外，西姆斯还具有所有优点，例如ppm范围内的低检测限，检测轻元素的能力以及非常敏感的表面测量。具有最高分辨率的西姆斯成像提供了许多新的可能性，例如同位素标记。具有不同元素的离子源为纳米结构化和质谱分析带来了优势。它提供轻元素的离子，用于高分辨率图案化，材料去除率低，但当需要处理更大的区域时，也可以发射重离子。在质谱法的情况下，有利的是具有增加正或负二次离子的电离效率的可用离子。此外，团簇源在材料和分子信息的烧蚀期间提供减少的碎裂。