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Subnanometer Analysis of Solid Surface by Laser Ablation Atomic Fluorescence Spectroscopy

通过激光烧蚀原子荧光光谱法对固体表面进行亚纳米分析

基本信息

批准号：
09555013
负责人：
MAEDA Mitsuo
金额：
$ 5.57万
依托单位：
KYUSHU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555013/
关键词：
Excimer laser Laser ablation Laser induced fluorescence Surface analysis Atomic fluorescence spectroscopy

项目摘要

We tried to apply the laser ablation technique to the atomizer of the laser atomic fluorescence spectroscopy, and named it LAAF (Laser Ablation Atomic Flu-orescence) spectroscopy. LAAF is one of the most sensitive detection method in the analytical techniques of elements. The purpose of this project is to apply the LAAF spectroscopy to the element analysis of the surface of solid materials and to determine the depth distribution of a specific element with a spatial resolution of less than I nm.The sample is ablated by an ultraviolet laser, and the laser-induced-fluorescence (LIF) from the ablation plume is observed using a tunable laser. The depth distribution of a specific element is determined by repeatedly ablating. Therefore, uniform ablation of a very thin layer is important. Followings are the summary of research results for these two years.1. We tried the ablation of a very thin layer with an order of nanometer or sub-nanometer for various materials such as glasses, polymers, metals, and semiconductors. As a result, we find that subnanometer ablation is possible for glasses and polymers, by using an ArF laser whose fluence is accurately controlled.2. We successfully detected steady LAAF signals from Na atom for glasses and polymers, even in such very thin-layer ablation.3. TUsing a PMMA sample whose Na concentration is known, the spatial resolution and the detection limit is evaluated.4. TThough the ablation of Si is not uniform in the case of the 1Ons ArF laser, uniform ablation is attained using a femtosecond laser.

我们尝试将激光烧蚀技术应用于激光原子荧光光谱仪的原子化器中，并将其命名为LAAF（Laser Ablation Atomic Fluorescence）光谱仪。LAAF是元素分析技术中最灵敏的检测方法之一。本项目的目的是将LAAF光谱技术应用于固体材料表面的元素分析，并以小于1nm的空间分辨率确定特定元素的深度分布。样品被紫外激光烧蚀，并使用可调谐激光器观察烧蚀羽流的激光诱导荧光（LIF）。通过反复烧蚀确定特定元件的深度分布。因此，非常薄的层的均匀烧蚀是重要的。以下是这两年的研究成果摘要。我们尝试烧蚀各种材料（如玻璃、聚合物、金属和半导体）的纳米级或亚纳米级的非常薄的层。结果表明，通过精确控制ArF激光的能量密度，可以实现玻璃和聚合物的亚纳米烧蚀.我们成功地检测到稳定的LAAF信号从Na原子的玻璃和聚合物，即使在这样的非常薄的层烧蚀。利用已知钠浓度的PMMA样品，评价了该方法的空间分辨率和检出限.尽管在10ns ArF激光的情况下Si的烧蚀不均匀，但是使用飞秒激光获得均匀烧蚀。