Ultra Precision Machining of Hard to Cut Materials and Composite Materials

为了阐明难切削材料和复合材料的超精密加工工艺，对微切削过程进行了实验和理论分析。研制了一种内置在SEM（扫描电子显微镜）上的正交微加工设备，实现了对切削深度低至0.1 μ m的微加工过程的直接观察。进行了纤维增强金属（FRM）的微加工实验，明确了切削深度和纤维方向对表面光洁度、切屑形成和切削力的影响。3 .单晶铜微加工过程的实验分析。对单晶铜的正交微加工过程进行了观察和分析，旨在阐明晶体取向和切削深度对切屑形成、切削力和表面光洁度的影响。提出了一种基于刚塑性有限元法（Finite element method）的理论方法，对单晶铜的正交微加工过程进行了分析。在切屑形状和切削力方面，计算结果与实验结果吻合较好。微加工工艺的讨论本文总结如下：(1)当切削深度减小小于1 μ m时，可获得较好的表面光洁度。(2)当切割深度小于1 μ m时，纤维方向和晶体取向对切屑形成过程没有影响。(3)成功地将刚塑性有限元法应用于单晶铜的微加工过程分析。

Experimental and theoretical analyses of micro cutting process have been carried out aiming at clarifying the ultra-precision machining process of the hard-to-cut materials and the composite materials.1. Development of an orthogonal micro machining equipment built in SEMAn orthogonal micro machining equipment was developed and built in the SEM (Scanning Electron Microscope) in order to realize direct observation of the micro machining process at the depths of cut down to 0.1 mum.2. Experimental analysis of micro machining process of FRMMicro machining experiments of FRM (Fiber Reinforced Metal) were carried out to clarify the effects of the depth of cut and the fiber directions on the surface finish, the chip formation and the cutting forces.3. Experimental analysis of micro machining process of single crystal copperOrthogonal micro machining process of single crystal copper was observed and analyzed aiming at clarifying the effects of the crystallographic orientation and the depth of cut on the chip formation, the cutting forces and the surface finish.4. Finite element analysis of machining process of single crystal copperA theoretical method based on a rigid-plastic FEM (Finite Element Method) was proposed, and the orthogonal micro machining process of single crystal copper was analyzed. The calculated results were in good agreement with the experimental results in the shapes of chips and the cutting forces.5. Discussion of micro machining processFollowing remarks are concluded in the research ;(1) Good surface finish is obtained in the machining experiments of FRM and copper when the depth of cut is decreased less than 1 mum.(2) Fiber directions and crystallographic orientations do not affect the chip formation process when the depth of cut is less than 1 mum.(3) Rigid-plastic FEM was successfully applied to the analysis of micro machining process of single crystal copper.