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Development of Line-Focus-Beam Acoustic Microscopy System for Evaluation of Electronic Device Materials

用于评估电子器件材料的线聚焦声学显微镜系统的开发

基本信息

批准号：
01850058
负责人：
SANNOMIYA Toshio
金额：
$ 6.91万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B).
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01850058/
关键词：
Line-Focus-Beam Acoustic Microscopy V(z) Curve Analysis Leaky Surface Acoustic Wave Velocity and Attenuation Electronic Device Materials Quantitative Measurements Acoustic Inhomogeneity Nondestructive Evaluation

项目摘要

A system of the line-focus-beam (LFB) acoustic microscope applicable to quantitative characterization of electronic device materials has been developed. Some serious problems, such as mechanical precision and temperature, has been experimentally and theoretically discussed from the point of view of measurement accuracy. It has been shown that stabilization of the temperature of coupling liquid of water in the LFB system is most important for accurate measurements, which are carried out by determining propagation characteristics of leaky surface acoustic waves (LSAWs) on the water/sample boundary. The system has been installed in a temperature controlled room around 23<plus-minus>0.1^ﾟC. The relative accuracy of LSAW velocity measurements has been estimated to be better than <plus-minus>0.005% at a point and <plus-minus>0.02% over a scanning area of 3-inch diameter.The system has been applied to investigate the elastic properties of piezoelectric LiNbO_3 and LiTaO_3 crystals. Experiment … More al relations between chemical composition ratios of Li/Nb and leaky surface acoustic wave (LSAW) velocities for 128^ﾟYX LiNbO_3 wafers have been determined. LSAW velocity measurements have been carried out for commercial wafers obtained from a series of crystal growths. Small changes of 0.092% have been detected due to the compositional variation. It has been estimated that the "effective" congruent composition in the production line is 48.440 Li_2O mol% with the density of 4647.4 kg/m^3. A serious problem regarding the elastic properties of X-112.2^ﾟY LiTaO_3 during industrial preparation has been examined with the system. Various types of elastic inhomogeneities have been detected quantitatively as a significant variation of LSAW velocities. In some wafers, large changes, about 2.5%, in LSAW velocities have been observed, which have corresponded to a difference between the velocities for single- and multi-domains. One of the causes has been found to be in the poling process during wafer fabrication.One of the potential applications is thin-film characterization. A new method of determining the elastic constants, density, and thickness of thin-film materials has been developed using propagation characteristics of leaky Sezawa and pseudo-Sezawa waves in the neighborhood of the cut-off region, in addition to those of leaky Rayleigh waves. It has been demonstrated for a sample of gold film on fused quartz that the values of the stiffness constant, C_<44>, and density have been, respectively, about 11% and 5.5% less than those for polycrystalline bulk gold, and the thickness has been determined as 6370A. Less

研制了一种用于电子器件材料定量表征的线聚焦声显微镜系统。从测量精度的角度对一些严重的问题，如机械精度和温度，进行了实验和理论上的讨论。它已被证明，在LFB系统中的水的耦合液体的温度的稳定是最重要的精确测量，这是通过确定泄漏表面声波（LSAW）的传播特性的水/样品的边界进行。该系统已安装在温度控制在<plus-minus>230.1 ^摄氏度左右的房间里。在3英寸直径的扫描区域内，LSAW速度测量的相对精度优于<plus-minus>0.005%和<plus-minus>0.02%。实验 ...更多信息本文测定了128 μ YX的LiNbO_3晶片的Li/Nb化学成分比与漏声表面波（LSAW）速度之间的关系。LSAW速度测量已经进行了商业晶片从一系列的晶体生长。由于成分变化，检测到0.092%的微小变化。估算出生产线的“有效”同成分为48.440 Li_2O mol%，密度为4647.4 kg/m^3。用该系统研究了工业制备X-112.2 μ Y-LiTaO_3时存在的一个严重的弹性问题。各种类型的弹性不均匀性已被定量检测到作为一个显着的变化的LSAW速度。在一些晶片中，已经观察到LSAW速度的大约2.5%的大的变化，这对应于单畴和多畴的速度之间的差异。其原因之一是在晶圆制造过程中的极化过程，其潜在的应用之一是薄膜表征。一种新的方法来确定的弹性常数，密度，和厚度的薄膜材料已开发使用泄漏Sezawa和伪Sezawa波的传播特性附近的截止区，除了那些泄漏的瑞利波。在熔融石英上的金膜样品的硬度常数C_<44>（1/2）和密度分别比多晶块状金的小11%和5.5%左右，厚度为6370。少