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Development of Line-Focus-Beam Acoustic Microscopy System for Evaluation of Electronic Device Materials

用于评估电子器件材料的线聚焦声学显微镜系统的开发

基本信息

批准号：
01850058
负责人：
SANNOMIYA Toshio
金额：
$ 6.91万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B).
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01850058/
关键词：
Line-Focus-Beam Acoustic Microscopy V(z) Curve Analysis Leaky Surface Acoustic Wave Velocity and Attenuation Electronic Device Materials Quantitative Measurements Acoustic Inhomogeneity Nondestructive Evaluation

项目摘要

A system of the line-focus-beam (LFB) acoustic microscope applicable to quantitative characterization of electronic device materials has been developed. Some serious problems, such as mechanical precision and temperature, has been experimentally and theoretically discussed from the point of view of measurement accuracy. It has been shown that stabilization of the temperature of coupling liquid of water in the LFB system is most important for accurate measurements, which are carried out by determining propagation characteristics of leaky surface acoustic waves (LSAWs) on the water/sample boundary. The system has been installed in a temperature controlled room around 23<plus-minus>0.1^ﾟC. The relative accuracy of LSAW velocity measurements has been estimated to be better than <plus-minus>0.005% at a point and <plus-minus>0.02% over a scanning area of 3-inch diameter.The system has been applied to investigate the elastic properties of piezoelectric LiNbO_3 and LiTaO_3 crystals. Experiment … More al relations between chemical composition ratios of Li/Nb and leaky surface acoustic wave (LSAW) velocities for 128^ﾟYX LiNbO_3 wafers have been determined. LSAW velocity measurements have been carried out for commercial wafers obtained from a series of crystal growths. Small changes of 0.092% have been detected due to the compositional variation. It has been estimated that the "effective" congruent composition in the production line is 48.440 Li_2O mol% with the density of 4647.4 kg/m^3. A serious problem regarding the elastic properties of X-112.2^ﾟY LiTaO_3 during industrial preparation has been examined with the system. Various types of elastic inhomogeneities have been detected quantitatively as a significant variation of LSAW velocities. In some wafers, large changes, about 2.5%, in LSAW velocities have been observed, which have corresponded to a difference between the velocities for single- and multi-domains. One of the causes has been found to be in the poling process during wafer fabrication.One of the potential applications is thin-film characterization. A new method of determining the elastic constants, density, and thickness of thin-film materials has been developed using propagation characteristics of leaky Sezawa and pseudo-Sezawa waves in the neighborhood of the cut-off region, in addition to those of leaky Rayleigh waves. It has been demonstrated for a sample of gold film on fused quartz that the values of the stiffness constant, C_<44>, and density have been, respectively, about 11% and 5.5% less than those for polycrystalline bulk gold, and the thickness has been determined as 6370A. Less

开发了适用于电子器件材料定量表征的线聚焦光束（LFB）声学显微镜系统。一些严重的问题，如机械精度和温度，已经从测量精度的角度进行了实验和理论讨论。研究表明，LFB 系统中水耦合液体温度的稳定对于精确测量至关重要，精确测量是通过确定水/样品边界上泄漏表面声波 (LSAW) 的传播特性来实现的。该系统安装在温度控制在 23±0.1^ﾟC 左右的房间内。 LSAW速度测量的相对精度在一个点上优于<正负>0.005%，在3英寸直径的扫描区域上优于<正负>0.02%。该系统已应用于研究压电LiNbO_3和LiTaO_3晶体的弹性性能。实验…更多 128^ﾟYX LiNbO_3 晶片的 Li/Nb 化学成分比与泄漏表面声波 (LSAW) 速度之间的关系已确定。已经对从一系列晶体生长获得的商用晶圆进行了 LSAW 速度测量。由于成分变化，已检测到 0.092% 的微小变化。据估计，生产线中的“有效”同成分为48.440 Li_2O mol%，密度为4647.4 kg/m^3。该系统研究了X-112.2^ﾟY LiTaO_3在工业制备过程中弹性性能的严重问题。各种类型的弹性不均匀性已被定量检测为 LSAW 速度的显着变化。在一些晶圆中，观察到 LSAW 速度发生了约 2.5% 的较大变化，这对应于单域和多域速度之间的差异。已发现原因之一是晶圆制造过程中的极化过程。潜在的应用之一是薄膜表征。除了漏瑞利波之外，还利用截止区域附近的漏塞泽波和伪塞泽波的传播特性，开发了一种确定薄膜材料的弹性常数、密度和厚度的新方法。已经证明熔融石英上的金膜样品的刚度常数、C_44和密度值分别比多晶块金的值小约11％和5.5％，并且厚度已确定为6370A。较少的