Research on Nondestructive Material Characterization with Multi-function Acoustic Microscope System

多功能声学显微镜系统无损材料表征研究

• 批准号: 11650413
• 负责人: SANNOMIYA Toshio
• 金额: $ 2.3万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650413/
• 关键词: Multi-function acoustic microscope; Imaging; Quantitative measurement; LFB acoustic device; Directional PFB acoustic device; V(z) curve analysis; Polycrystalline material; Elastic anisotropy; V(z)曲線法; Mn-Znフェライト単結晶; 方向性PFB; 分極反転層; へき開亀裂

A multi-function acoustic microscope system combined three system functions of imaging by point-focus-beam (PFB), quantitative measurement by line-focus-beam (LFB) and directional PFB microscope system with two functions of imaging and quantitative measurements has been developed as a new research tool for material characterization.To confirm the imaging perfomance with complex signals, imaging for fused quartz plates formed topographic lattice patterns were made with both amplitude and phase modes. Contrasts of topographic shapes on the specimen surface have been analyzed quantitatively by measuring amplitude and phase images simultaneously.In imaging of LiTaO_3 wafer with partially domain-inverted regions, contrast was observed at domain boundary in spite of same elastic properties. It has been showed that such contrast was caused by reflecting leaky surface acoustic wave (LSAW) due to difference of electrical properties at the domain boundary.The directional PFB acoustic device was applied for imaging of an MgO crystal with vertical cracks on the surface. The spaces of fringes produced in parallel to cracks were different in propagation directions of LSAWs.It has been proved that LSAW velocity of each direction could be characterized quantitatively.The system has been demonstrated for investigation of polycrystalline samples of pure Ti and Mn-Zn ferrite with average grain size of 100μm. Directional acoustic images were obtained at 225 MHz for several different propagation derections of LSAWs. Anisotropy measurements of LSAW velocity in some grains of the samples have been perfomed through V(z) curve analysis.Anisotropic elastic properties of each grain have been characterized both in imaging and quantitative measurements.

研制了一种集点聚焦声束（PFB）成像、线聚焦声束（LFB）定量测量和定向PFB显微系统（PFB显微系统）成像与定量测量于一体的多功能声显微系统，为材料表征提供了一种新的研究工具。用振幅模式和相位模式对形成形貌晶格图案的熔融石英板进行成像。通过同时测量振幅和相位图像，定量分析了样品表面形貌的对比度，在部分畴反转区域的LiTaO_3晶片成像中，尽管弹性性质相同，但在畴界处观察到了对比度。结果表明，这种反差是由于畴界电特性的差异引起的漏声表面波（LSAW）反射引起的，并利用定向PFB声器件对MgO晶体表面垂直裂纹进行了成像。平行于裂纹产生的条纹间距在激光声表面波传播方向上是不同的，证明了可以定量地表征各个方向上的LSAW速度，并对平均晶粒尺寸为100μm的纯Ti和Mn-Zn铁氧体多晶样品进行了研究。在225 MHz下获得了几种不同传播方向LSAW的方向声图像。通过V（z）曲线分析，对样品中部分晶粒的LSAW速度进行了各向异性测量，从成像和定量测量两方面表征了各晶粒的各向异性弹性特性。

项目成果

J.Kushibiki et al.: "Accurate measurements of the acoustical physical constants of LiNbO_3 and LiTaO_3 single crystals"IEEE Trans. UFFC. 46(5). 1315-1323 (1999)

J.Kushibiki等人：“LiNbO_3和LiTaO_3单晶声学物理常数的精确测量”IEEE Trans。