Experimental Studies on Improvement of Surface Properties of Material By Pulsed -Ion-Beam Implantation

传统的稳态带电离子束已经成功地应用于材料的研发，如半导体加工、焊接和光刻。另一方面，强脉冲离子束(Lib)与传统的离子束有很大的不同，近年来被认为具有广泛的应用前景，特别是在材料科学方面。如果LiB被照射到材料上，表面将被迅速加热以产生高密度等离子体。本实验研究了强脉冲光离子束(LiB)在材料科学中的应用，其中LiB被用作有效的“热源”，烧结的BN或烧结的磷灰石切片被用作离子源。得到的结论如下：(1)随着LiB发射次数的增加，维氏硬度几乎呈线性增加。与不照射相比，照射100次后，它增加了60%。(2)从高能LiB注入钛后的X射线衍射结果可以清楚地看出TiN、TiB和TiB_2的形成。(3)离子注入层中产生的残余应力(拉应力)在200-400 Mpa之间。经真空退火后，残余拉应力转变为压应力。(4)用离子束蒸发技术(IBE)辐照LiB，在钛表面形成了磷灰石涂层。所制备的薄膜厚度估计为6-10微米。这部电影似乎是同质的。

Conventional, steady-state charged ion beams have been successfully applied in the R and D of materials such as in semiconductor processing, welding, and lithography. On the other hand, intense pulsed light ion beam(LIB), which significantly differs from the conventional ion beams have been recently considered for various applications, particularly in material science. If the LIB is irradiated onto the materials, the surface will be quickly heated to produce high density plasma. In the present experiments, an intense pulsed light ion beam (LIB) applications in materials science have been experimentally studied, where the LIB is utilized as effective "heat" source.Sintered BN, or sintered apatite chips were used as an ion source.The obtained conclusions can be summarized as follows: (1) The Vicker's hardness increases almost linearly with increasing the number of shots of LIB. It increases by a factor of 60 % after the irradiation of 100 shots compared to that of no irradiation. (2) Clear evidences have been obtained on the formation of TiN, TiB and TiB_2 from the X-ray diffraction results after being implanted by the high energy LIB Into titanium. (3) Residual stress (tensile) generated in the ion implanted layer of Ti ranges from 200 -400 MPa. The tensile residual stress changes into the compressive stress by after being annealed in vacuum. (4) Apatite coating has been found on the surface of Ti by the irradiation of LIB by "Ion Beam Evaporation"(IBE). The film thickness prepared is estimated to be 6 - 10 mum. The film seems to be homogeneous.