Experimental Studies on Improvement of Surface Properties of Material By Pulsed-Ion-Beam Implantation

脉冲离子束注入改善材料表面性能的实验研究

基本信息

  • 批准号:
    02650055
  • 负责人:
  • 金额:
    $ 1.28万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)
  • 财政年份:
    1990
  • 资助国家:
    日本
  • 起止时间:
    1990 至 1991
  • 项目状态:
    已结题

项目摘要

Conventional, steady state charged ion beams have been widely and successfully applied in the R and D of materials such as in welding, semiconductor processing and lithography. On the other hand, intense pulsed light ion beam(LIB), which significantly differs from the conventional ion beams have been recently considered for various applications, particularly in material science. If the LIB is irradiated onto the materials, the surface will be quickly heated to produce high density plasma. In the present experiment, an intense pulsed LIB applications in material science have been experimentally studied, where the LIB is utilized as effective "heat" source as well as ion implantation source. Sintered BN, or sintered apatite chips were used as ion sorces of the present. study.The effect of irradiations were examined by various physical analysis procredures. The hardness and irradiated surface contours were also investigated. Besides the LIB irradiation. chemical reaction by nitrogen gas flow was also examined in order to investigate the surface modification effect of the materials.The obtained conclusions can be summarized as follows ;(1) The substantial effects of irradiation were obtained under the restricted irradiation conditions. According to analysis by ESCA, the amount of implantations were so small as the material test result showed no marked change of mechanical properties.(2) Chemical reactions of nitogren gas with the surface layer of titanium plate were so active under the temperatures above. 1173 K and nitogen partial pressure over 10^<-2> Torr. According to the tensile test, 0.2% proof stress and tensile strength increased by about 10% as compared to those specimens without treatment. No regression of the toughness was observed and an existence of high degree of nitrides were detected by X-rny annlysis.
传统的稳态带电离子束已广泛且成功地应用于焊接、半导体加工和光刻等材料的研发中。另一方面,强脉冲光离子束(LIB),这显着不同于传统的离子束最近已被认为是各种应用,特别是在材料科学。如果LIB照射到材料上,表面将迅速加热以产生高密度等离子体。本实验研究了强流脉冲LIB在材料科学中的应用,LIB既可作为有效的“热源”,又可作为离子注入源。烧结BN或烧结磷灰石碎片被用作本发明的离子源。通过各种物理分析程序检查辐照的影响。硬度和辐照表面轮廓也进行了研究。除了LIB辐射。研究结果表明:(1)在限定的辐照条件下,辐照能获得明显的表面改性效果;经ESCA分析,由于材料试验结果表明其力学性能无明显变化,因此其变形量很小。(2)在上述温度下,氮气与钛板表面层的化学反应非常活跃。1173 K和氮分压超过10 μ <-2>Torr。根据拉伸试验,0.2%的屈服应力和拉伸强度增加了约10%,与未经处理的那些试样相比。X射线衍射分析表明,韧性没有下降,且存在大量的氮化物。

项目成果

期刊论文数量(12)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
K.YATUI: "Quick Deposition of Various Thin Films by Intense Pulsed Ion Beam" Proc.8th International Conf.of High Power Particle Beams/Novorsibirsk,USSR,July 1〜July 4.
K.YATUI:“强脉冲离子束快速沉积各种薄膜”Proc.8th International Conf.of High Power Particle Beams/苏联新西伯利亚,7月1日~7月4日。
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  • 通讯作者:
K. Yatsui, K. Masukata and T. Takaai et al.: "Quick Deposition of Various thin Films by intense Pulsed Ion Beam." Proc. 8th International Conf. on High Power Particle Beam.(1990)
K. Yatsui、K. Masukata 和 T. Takaai 等人:“通过强脉冲离子束快速沉积各种薄膜”。
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T.TAKAAI: "Surface Modification Experiment by Intense Pulsed Ion Beam" Proc.8th International Conf.on Surface Engineering,/Toronto,Canada,June 27〜July. 188-197
T.TAKAAI:“强脉冲离子束表面改性实验”Proc.8th International Conf.on Surface Engineering,/加拿大多伦多,6月27日〜7月197日。
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    0
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K.TATSUI,K.MASUKATA,T.TAKAAI: "Quick Deposition of Various Thin Films by Intense Pulsed Ion Beam" Proc.8th International Couf.of High Power Particle Beams Novorsibirsk,USSR,July 1〜July 4. 8th. (1990)
K.TATSUI,K.MASUKATA,T.TAKAAI:“强脉冲离子束快速沉积各种薄膜”Proc.8th International Couf.of High Power Particle Beams Novorsibirsk,苏联,7月1日〜7月4日8日(1990年) )
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佐藤 哲也,曽根川 富博,鷹合 徹也,八井 浄外: "大強度パルスイオンビ-ムによるTi基板へのNイオン注入" 第54回応用物理学会 学術講演会概要. 第54回. (1991)
Tetsuya Sato、Tomihiro Sonekawa、Tetsuya Takaai、Jogai Yai:“利用高强度脉冲离子束将 N 离子注入 Ti 衬底”第 54 届日本应用物理学会学术会议摘要(1991 年)。
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TAKAAI Tetsuya其他文献

TAKAAI Tetsuya的其他文献

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{{ truncateString('TAKAAI Tetsuya', 18)}}的其他基金

Electron Beam Melting and Improvement of Mechanical Properties of Pure Tantalum
纯钽的电子束熔炼及其机械性能的改善
  • 批准号:
    04650063
  • 财政年份:
    1992
  • 资助金额:
    $ 1.28万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)
Experimental Studies on Improvement of Surface Properties of Material By Pulsed -Ion-Beam Implantation
脉冲离子束注入改善材料表面性能的实验研究
  • 批准号:
    63550065
  • 财政年份:
    1988
  • 资助金额:
    $ 1.28万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)
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