Fabrication of thin film of fast ion conductor by excimer laser CVD method

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Mixed electronic-ionic conductors have many applications such as electrodes and a membrane for gas separation. ZrO_2-TiO_2-Y_2O_3 system exhibits a mixed conduction. Electrical properties in this system of sintered specimens have already been investigated and it was found that this system was the promising material as a membrane for a direct water splitting at high temperatures to produce hydrogen. To improve these properties, especially to diminish the resistance, thin films of ZrO_2-TiO_2-Y_2O_3 were prepared by laser CVD. The deposited films of this system show (100) orientation and it is independent to the kind of substrates. The range of the TiO_2 solubility to YSZ is considerably spread by using this preparation technique. From this result, it is expected that the high concentration TiO_2 doped YSZ exhibits mixed conduction with very high electronic conductivity. The total conductivity of YSZ containing 53 mol% TiO_2 was measured by AC impedance method.