Fabrication of thin film of fast ion conductor by excimer laser CVD method

准分子激光CVD法制备快离子导体薄膜

• 批准号: 03555163
• 负责人: ARASHI Haruo
• 金额: $ 5.31万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03555163/
• 关键词: CVD; Excimer Laser; Fast Ion Conductor; Thin Film; エキシマ-レ-ザ-

Mixed electronic-ionic conductors have many applications such as electrodes and a membrane for gas separation. ZrO_2-TiO_2-Y_2O_3 system exhibits a mixed conduction. Electrical properties in this system of sintered specimens have already been investigated and it was found that this system was the promising material as a membrane for a direct water splitting at high temperatures to produce hydrogen. To improve these properties, especially to diminish the resistance, thin films of ZrO_2-TiO_2-Y_2O_3 were prepared by laser CVD. The deposited films of this system show (100) orientation and it is independent to the kind of substrates. The range of the TiO_2 solubility to YSZ is considerably spread by using this preparation technique. From this result, it is expected that the high concentration TiO_2 doped YSZ exhibits mixed conduction with very high electronic conductivity. The total conductivity of YSZ containing 53 mol% TiO_2 was measured by AC impedance method.

混合电子-离子导体有许多应用，如电极和气体分离膜。ZrO_2-TiO_2-Y_2O_3系为混合导电。对该体系的电学性能进行了研究，发现该体系是一种很有前途的高温直接水裂解制氢膜材料。为了改善这些性能，特别是减小电阻，采用激光CVD法制备了ZrO2-TiO2Y2O_3薄膜。该系统沉积的薄膜呈(100)择优取向，且与衬底种类无关。利用该制备工艺，大大扩大了二氧化钛对YSZ的溶解度范围。从这一结果可知，高浓度的二氧化钛掺杂的YSZ具有很高的电子导电性和混合导电性能。用交流阻抗法测量了含53mol%二氧化钛的YSZ的总电导率。

项目成果

A.YOSHIHARA: "Magnetostatic Spin Waves in Sputtered Ferromagnetic Films with Perpendioular Anisotropy:CoCr" Jpn.J.Appl.Phys.30. 2010-2019 (1991)

A.YOSHIHARA：“具有垂直各向异性的溅射铁磁薄膜中的静磁自旋波：CoCr”Jpn.J.Appl.Phys.30。

H.Arashi: "Pressure-Induced Phase Transformation of HfO_2." J.Am. Ceram. Soc.75. 844-847 (1992)

H.Arashi：“HfO_2 的压力诱导相变。”

H.Arashi and H.Naito: "Oxygen Permeability in ZrO_2-TiO_2-Y_2O_3 System." Solid State Ionics. 53-56. 431-435 (1992)

H.Arashi 和 H.Naito：“ZrO_2-TiO_2-Y_2O_3 系统中的氧渗透率。”

嵐 治夫: "太陽エネルギーを用いた高温水蒸気電気分解による水素製造(II)" エネルギー・資源学会講演論文集. 11. 21-26 (1992)

Haruo Arashi：“利用太阳能进行高温蒸汽电解制氢（II）”日本能源与资源学会会议记录，11. 21-26（1992）。

A.Yoshihara, T.Fujimura and Y.Morioka: "Brillouin Scattering Study of the Structural Phase Transition in Two-layer Orthorhombic Form of K_3Co(CN)_6 Single Crystal." J.Phys. Condensed Matter. 3. 5171-5182 (1991)

A.Yoshihara、T.Fujimura 和 Y.Morioka：“K_3Co(CN)_6 单晶两层斜方晶型结构相变的布里渊散射研究”。