Modeling and design of a power modulator for a KrF excimer laser

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The proposed research is supported by LightMachinery, a private Canadian company, located in Nepean Ontario. LightMachinery is a manufacturer of high power, pulsed, gas discharge TEA CO2 and Excimer lasers. The research focus is on the design of a power modulator for a new excimer laser system and the physical properties of the laser gas plasma that forms the gain medium for the laser. The overarching objective of this project is to optimize the power modulator design to achieve an improved shot to shot repeatability, longer electrode lifetime, higher end-to-end efficiency and reduced operating stresses on the main triggering electronic switch, a thyratron. Potentially, the thyratron can be replaced by a semiconductor power switch. A new laser cavity and power modulator topology proposed by LightMachinery offers the possibility, once optimized, of an efficient, scalable design which can be sized to address high energy industrial markets. LightMachinery has succeeded in maintaining an annual growth rate of 20% largely through continued investment and technical advancement of the excimer product line. This project represents the next step in this investment with the goal to continue growing the company at 20% per year. An additional benefit to the Canadian economy, while meeting this growth target, has been the employment of highly qualified people. LightMachinery has historically hired 1 to 2 skilled technical and engineering resources per year.