Fabrication of optical branch circuit using high efficient optical elements with oblique incident condition and its applications

本研究探讨斜入射高效波带片阵列制作光学分支回路及其应用。（1）斜入射条件下多波带片阵列的设计与制作：提出了一种由两个正交的线性波带片阵列组成的二维光斑阵列结构。采用深紫外光刻工艺制作了二维波带片阵列。利用半导体激光器发散光束，在接近布喇格角的斜入射条件下，有利地改善了两个正交线性波带片阵列的特性。（2）均匀光斑波带片阵列的设计与制作：介绍了二维波带片阵列（Z. P.A.），提出了一种考虑高斯光束光强分布的均匀光斑产生方法。聚焦特性进行了实验研究和分析使用 ...更多信息 光线追踪作为Z. P.A.，讨论了一种用于并行信号处理的多重成像系统。（3）软X射线光刻制作光学分支电路用高精细光学元件的尝试：尝试用脉冲串激光泵浦的激光等离子体源制作高精细光学元件。提出了目前的技术在制作光电子器件中的高精细间距的纳米光栅元件的适用性。（4）光脉冲延迟器多光束存取器的设计与制作：提出了一种基于多光束存取器的N通道光脉冲延迟器及其实现系统。（5）制作波带片阵列的光学并行处理研究：提出了一种由波带片阵列和液晶显示板组成的真实的实时并行信号处理系统。将该组合应用于匹配滤波的实验尝试是成功的。少

In this research, fabrication of optical branch circuit using high efficient zone plate array with oblique incidence and its applications are investigated. I found the following results :(1)Design and fabrication of a multiple zone plate array of oblique incident condition : A configuration of a two dimensional spot array, which is composed of two orthogonal linear zone plate array, is proposed. A two dimensional zone plate array is fabricated by deep UV lithography process. Using at divergent laser diode beam, at oblique incident conditions close to the Bragg angle, favorable, characteristics of two orthogonal linear zone plate array are improved.(2)Design and fabrication of a zone plate array generating uniform spots : A design and fabrication procedures of a two dimensional zone plate array (Z. P. A.), generating uniform spots, considering intensity distribution of a Gaussian beam is proposed. The focusing characteristics are investigated both experimentally and analytically using a … More ray tracing. As possible application of the Z. P. A., multiple imaging system for parallel signal processing is discussed.(3)Trial to fabricate high fine optical element for optical branch circuit by soft x-ray lithography : A fabrication of a high fine optical elements using laser produced plasma source pumped by a pulse train laser is tried. The present technology's suitability for fabricating high fine pitch with nm grating elements in optoelectronic devices is proposed.(4)Design and fabrication of a multiple beam accessor for a optical pulse delay unit : Optical pulse delay unit with N-channel delay paths using a multiple beam accessor and its successful implementation system are proposed.(5)Investigation of a optical parallel processing with fabricated zone plate arrays : A real time parallel signal processing system by combination of a zone plate array and a liquid crystal display panel is proposed. An experimental trial to apply this combination to matched filtering was successful. Less