Research of Fabrication and Application of functional micro-optical-element using soft X ray and deep ultra-violet lithography

随着光电子系统的迅速发展，微光学器件作为激光光源的输入输出元件将得到广泛的应用。在光路中，要求光束具有聚焦、分束和延时等功能。这些要求可以通过使用微菲涅耳波带片元件来满足。本研究计画探讨设计与制作适用于OEIC的高效率光栅型微光学元件，并取得以下成果。(1)微菲涅耳波带片具有平面结构和灵活性的特点，在聚焦特性设计方面具有独特的优点。延迟单元采用一个复合波带片和两个波带片构成。复合波带片作为空分分束器。使用40 ps FWHM的激光二极管，在300 ps的动态范围内确认了光脉冲间隔与光纤端部的空间位移之间的比例关系。(2)比较 ...更多信息 在非布喇格条件下，基于传输光栅的Floque Bloch展开式，对实验和计算机模拟进行了比较。在不使用体全息图或闪耀全息图的情况下实现高衍射效率有利于基于光刻技术的平面结构微光栅器件的前景。(3)设计并制作了一种适用于OEIC的高效空间分束器。提出了一种新的空间分束器结构，它由一个圆柱形透镜和一个斜入射的平面线性波带片阵列组成，利用准布拉格条件，有望提高衍射效率。利用自制的空间分束器，实现了激光输出的同时聚焦和分束。(4)利用同步辐射深紫外光刻技术成功制作了节距为1.25 μ m、闪耀角为45 °的光栅。本技术适用于制作光电子系统中的亚微米光栅器件。少

With the rapid development of opto-electronic systems, micro-optic devices are expected to find wide applications as input output elements with laser source. In potical circuits the functions of focusing, splitting and time delay of potical beam are required. These requirements can be fulfilled by using micro-fresnel zone plate elements. This research project investigated a trial to design and fabrication an efficient grating type micro-optical element which is applicable to OEIC and we found the following results.(1) Micro fresnel zone plate has the special merit of its planar structure and flexibility in the desing of focusing characterisity. Using a composite zone plate and two zone plates, the delay unit was implemented. The composite zone plate acted as space-division beam splitter. The proportionality relationship between the optical pulse interval and spatial displacement of a fiber end was confirmed for a dynamic range of 300 ps, using a laser diode of 40 ps FWHM.(2) A comparis … More on between the experiment and the computer simulation based on the floque Bloch expansion of transmission grating at non-Bragg condition. Achievement of high diffraction efficiency without utilizing either volume hologram or blazed holigram favors the prospect of micro-optic grating components with planar structure based on lithographic technique.(3) A trial to design and fabricate an efficient spatially divided beam splitter which is applicable to OEIC. A new configuration of a spatially divided beam splitter is proposed, which is composed of a cylindorical lens and a planar linear zone plate array with oblique incidence, utilizing quasi-Bragg conditions, to improve high diffraction efficiency is expected. By using a fabricated spatially divided beam splitter, the simultaneous focusing and splitting of a laser output are demonstrated.(4) A 1.25 um pitch grating with a blazed angle of 45 is successfully fabricated using a deep UV region of synchrotron radition lithography. The present technoligy is suitable for fabricating submicron grating devices in opto-electronic systems. Less