Research of Fabrication and Application of functional micro-optical-element using soft X ray and deep ultra-violet lithography

软X射线与深紫外光刻功能微光学元件的制备及应用研究

• 批准号: 62550033
• 负责人: KODATE Kashiko
• 金额: $ 1.28万
• 依托单位: Japan Women's University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1987
• 资助国家: 日本
• 起止时间: 1987 至 1988
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-62550033/
• 关键词: Deep ultra-violet lithography; Soft Xray lithography; Functional micro-optical-element; Fresnel zone plate; 軟X線リソグラフィー; 微小光学素子; フレネルゾーンプレート; 深紫外リソグラフィ; 軟X線リソグラフィ; S(O)R光; 光パルス遅延回路; 光電子集積回路への応用

With the rapid development of opto-electronic systems, micro-optic devices are expected to find wide applications as input output elements with laser source. In potical circuits the functions of focusing, splitting and time delay of potical beam are required. These requirements can be fulfilled by using micro-fresnel zone plate elements. This research project investigated a trial to design and fabrication an efficient grating type micro-optical element which is applicable to OEIC and we found the following results.(1) Micro fresnel zone plate has the special merit of its planar structure and flexibility in the desing of focusing characterisity. Using a composite zone plate and two zone plates, the delay unit was implemented. The composite zone plate acted as space-division beam splitter. The proportionality relationship between the optical pulse interval and spatial displacement of a fiber end was confirmed for a dynamic range of 300 ps, using a laser diode of 40 ps FWHM.(2) A comparis … More on between the experiment and the computer simulation based on the floque Bloch expansion of transmission grating at non-Bragg condition. Achievement of high diffraction efficiency without utilizing either volume hologram or blazed holigram favors the prospect of micro-optic grating components with planar structure based on lithographic technique.(3) A trial to design and fabricate an efficient spatially divided beam splitter which is applicable to OEIC. A new configuration of a spatially divided beam splitter is proposed, which is composed of a cylindorical lens and a planar linear zone plate array with oblique incidence, utilizing quasi-Bragg conditions, to improve high diffraction efficiency is expected. By using a fabricated spatially divided beam splitter, the simultaneous focusing and splitting of a laser output are demonstrated.(4) A 1.25 um pitch grating with a blazed angle of 45 is successfully fabricated using a deep UV region of synchrotron radition lithography. The present technoligy is suitable for fabricating submicron grating devices in opto-electronic systems. Less

随着光电子系统的迅速发展，微光学器件作为激光光源的输入输出元件将得到广泛的应用。在光路中，要求光束具有聚焦、分束和延时等功能。这些要求可以通过使用微菲涅耳波带片元件来满足。本研究计画探讨设计与制作适用于OEIC的高效率光栅型微光学元件，并取得以下成果。(1)微菲涅耳波带片具有平面结构和灵活性的特点，在聚焦特性设计方面具有独特的优点。延迟单元采用一个复合波带片和两个波带片构成。复合波带片作为空分分束器。使用40 ps FWHM的激光二极管，在300 ps的动态范围内确认了光脉冲间隔与光纤端部的空间位移之间的比例关系。(2)比较 ...更多信息 在非布喇格条件下，基于传输光栅的Floque Bloch展开式，对实验和计算机模拟进行了比较。在不使用体全息图或闪耀全息图的情况下实现高衍射效率有利于基于光刻技术的平面结构微光栅器件的前景。(3)设计并制作了一种适用于OEIC的高效空间分束器。提出了一种新的空间分束器结构，该结构由圆柱形透镜和倾斜入射的平面线性波带片阵列组成，利用准布拉格条件，以提高高衍射效率。利用自制的空间分束器，实现了激光输出的同时聚焦和分束。(4)利用同步辐射深紫外光刻技术成功制作了节距为1.25 μ m、闪耀角为45 °的光栅。本技术适用于制作光电子系统中的亚微米光栅器件。少

项目成果

小舘香椎子: 日本女子大学紀要 (家政学部). 35. 163-169 (1988)

小馆可子子：日本女子大学学报（家政学部）35. 163-169 (1988)。

Y.Okada.: Jopanese J.Appl.Phys.27. 1440-1444 (1988)

Y.Okada.：日本 J.Appl.Phys.27。

岡田 佳子: 光学. 16. 364 (1987)

冈田芳子：光学。16. 364 (1987)

Xian Ping FENG: "Fabrication of High-Efficiecy Zone Plate Array with Oblique Incidence Configuration" The Review of Laser Engineering. 16. 836-846 (1988)

冯贤平：“倾斜入射结构的高效波带板阵列的制造”激光工程评论。

小舘 香椎子: 日本女子大学 家政学部紀要. 36. (1987)

小馆可子子：日本女子大学家政学部通报36。（1987）