Research on Nano-meter order Assembly System

纳米级组装系统研究

• 批准号: 04555054
• 负责人: HATAMURA Yotaro
• 金额: $ 13.57万
• 依托单位: the University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04555054/
• 关键词: micro manipulation; micro task executon robot; micro-machine assembly; micro task; manipulaor; human interface; micro teleoperation; handling system; ナノマニピュレータ; 立体電子顕微鏡; 超微細組立作業; 超微細作業システム; ナノマニピュレーション; 組立作業ロボット; 知能ロボット; ナノテクノロジ

1.Realization of concentrated motion manipulator : Taking account of micro object handling tasks, we make clear the necessary functions of a manipulator to execute micro object handling. A new design concept of "concentrated motion manipulator" suitable for small object handling is proposed and a new manipulation system besed on the concept is designed and realized. The manipulator has 7 D.F.F.'s with nano-meter order positional accuracy. The main feature of the manipulation system is that motion of the manipulator is concentrated to the center of the field of view of a microscope to ensure task execution with visual monitoring.2.Realization of stereo-scopic SEM (Scanning Electron Microscope) : A stereo SEM is realized to visualize 3D-image of the nano-meter scale world. In the realized SEM, a stereo image (left eye image and right eye image) as well as multi-resolutonal images (local high magnification image and global wide field of view image) can be obtained by controlling the elect … More ron beam in video rate.3.Prevention of fatal damage by means of operation understanding function by robot : In micro task execution, the operator frequently breaks the object by mistake, becouse the object is much more smaller and weaker than the object in our macro world. To cope with this problem, we realized the fatal damage prevention function based on the robot understanding of operator behavior. This function is realized by the following steps : a)recognition ofan operator's intension, b)prediction of the task status, c)warning to the operator and guidance to escape from the fatal damage in case of dangerous prediction.4.Realistic display of nano-meter world task execution : Force sensor attached to the tip of the manipulator hand and work table is utilized to generated the acoustic sound to let the operator know what is going on in the task execution world. This display enables the operator to recognize the status of the task execution which is quite different from that of our macro world.5.Assembly experiment of nano-meter accuracy : Developed system components stated above (concentrated motion manipulatoe, realistic display of nano-meter world task execution, computer aided fatal damage prevention) are finally integrated to realize nano-mater accuracy task execution system. Such micro task execution of assembly of micro machines as well as the repair of micro patterns are successfully performed to probe the correctness of the developed components. Other than such micro machine assembly task of a micro air-turbine(502 micron diameter), a micro-Torii(100 micron hight), micro five storied temple tower(230 micron hight), curving of micro kokeshi(200 micron diameter Japanese doll) and folding of micro airplane (from 1 mm square aluminum foil) are also completed. Less

1.集中运动机械手的实现：考虑到微物体搬运任务，明确了机械手执行微物体搬运的必要功能。提出了一种适合小物体搬运的“集中运动机械手”的新设计理念，并在此基础上设计和实现了一种新的操作系统。机械手有7个D.F.F.具有纳米级顺序定位精度。该操作系统的主要特点是将机械手的运动集中到显微镜视场的中心，以保证任务的执行，并具有视觉监控。立体扫描电子显微镜（SEM）的实现：实现了一个立体扫描电子显微镜来可视化纳米尺度世界的三维图像。在所实现的扫描电镜中，通过控制视频率，可以获得立体图像（左眼图像和右眼图像）以及多分辨率图像（局部高倍图像和全局宽视场图像）。机器人通过操作理解功能预防致命伤害：在执行微观任务时，由于物体比我们宏观世界中的物体要小得多、弱得多，操作者经常会错误地打碎物体。为了解决这一问题，我们实现了基于机器人对操作者行为理解的致命损伤预防功能。该功能通过以下步骤实现：a)对操作员意图的识别；b)对任务状态的预测；c)对操作员进行危险预测时的警告和指导，以避免致命的伤害。纳米世界任务执行的逼真显示：利用附着在机械手手和工作台尖端的力传感器产生声音，让操作者知道任务执行世界中发生了什么。这个显示使操作员能够识别任务执行的状态，这与我们的宏观世界有很大的不同。纳米精度装配实验：将上述开发的系统组件（集中运动机械手、纳米世界任务执行逼真显示、计算机辅助致命伤害预防）最终集成在一起，实现纳米精度任务执行系统。成功地完成了微机械装配的微任务执行和微图案的修复，以检验所开发部件的正确性。除此之外，还完成了微型空气涡轮（直径502微米）、微型鸟居（直径100微米）、微型五层寺庙塔（高度230微米）、微型kokeshi（直径200微米的日本娃娃）的弯曲、微型飞机（1毫米方形铝箔）的折叠等微型机器组装任务。少

项目成果

畑村 洋太郎: "マイクロマニピュレーションと現実感" 日本機械学会誌. 95-883. 493-497 (1992)

Yotaro Hatamura：“微操作与现实”日本机械工程师学会杂志 95-883（1992）。

M.Mitsuishi: "Development of Tele-Operated Micro-Handling/Machining System Based on Information Transformation" Proc.of IEEE Int.Conf.on Intelligent Robots and Systems. Vol.3. 1473-1478 (1993)

M.Mitsuishi：“基于信息转换的远程操作微处理/加工系统的开发”Proc.of IEEE Int.Conf.on 智能机器人和系统。

坂根 茂幸、車 利治、小俣 透、佐藤 知正、: "見え方の時系列変化を考慮した注視行動計画" 計測自動制御学会論文集. 28-9. 1111-1117 (1992)

Shigeyuki Sakane、Toshiharu Kuruma、Toru Omata、Tomomasa Sato：“考虑可见性时间序列变化的注视动作规划”，仪器与控制工程师学会汇刊 28-9 (1992)。

M.Mitsuishi: "Development of Tele-Operated Micro-Handling/Machining System Based on Information Transformation" Proc.of IEEE Int.Conf.on Intelligent Robots and Sysytems. Vol.3. 1473-1478 (1993)

M.Mitsuishi：“基于信息转换的远程操作微处理/加工系统的开发”Proc.of IEEE Int.Conf.on 智能机器人和系统。

Y.Hatamura: "Construction of 3-D Micro Structure by Multi-face FAB,Co-focus Rotational Robot and Various Mechanical Tools" Proc.IEEE Micro Electro Mechanical Sysytems. 94CH3404-1. 297-302 (1994)

Y.Hatamura：“通过多面 FAB、共焦旋转机器人和各种机械工具构建 3D 微结构”Proc.IEEE 微机电系统。