Research on Nano-meter order Assembly System

1.集中运动机械手的实现：考虑到微物体的搬运任务，明确了机械手执行微物体搬运所需的功能。提出了一种适用于处理小物体的“集中运动机械手”的设计思想，并设计并实现了一种新的操作系统。该机械手具有7个动态范围内的S，具有纳米级的位置精度。该操作系统的主要特点是将机械手的运动集中在显微镜的视场中心，以确保在视觉监视下执行任务。2.立体扫描电子显微镜的实现：实现了扫描电子显微镜对纳米尺度世界的三维图像的可视化。在实现的扫描电子显微镜中，通过控制电子…，可以获得立体图像(左眼图像和右眼图像)以及多分辨率图像(局部高倍率图像和全局大视场图像)通过机器人的操作理解功能防止致命损害：在微观任务执行中，操作员经常错误地打破对象，因为对象比我们宏观世界中的对象更小、更弱。针对这一问题，我们实现了基于机器人对操作者行为理解的致命伤害预防功能。这一功能是通过以下步骤实现的：a)识别操作员的意图，b)预测任务状态，c)警告操作员，并在危险预测的情况下引导操作员逃离致命损害。4.纳米世界任务执行的真实显示：利用安装在机械手手和工作台尖端的力传感器产生声音，让操作员了解任务执行世界正在发生的事情。这种显示使操作员能够识别出与我们宏观世界截然不同的任务执行状态。5.纳米精度的装配实验：最终集成上述开发的系统组件(集中运动操作、纳米世界任务执行的逼真显示、计算机辅助致命损伤预防)，实现纳米精度任务执行系统。成功地完成了微机械装配的微任务执行以及微图案的修复，以检测所开发元件的正确性。除了直径502微米的微型空气涡轮的微机械装配任务外，还完成了微型鸟取器(100微米高)、微型五层寺庙塔(230微米高)、微型可可石(直径200微米的日本娃娃)的弯曲和微型飞机的折叠(从1 mm正方形铝箔)。较少

1.Realization of concentrated motion manipulator : Taking account of micro object handling tasks, we make clear the necessary functions of a manipulator to execute micro object handling. A new design concept of "concentrated motion manipulator" suitable for small object handling is proposed and a new manipulation system besed on the concept is designed and realized. The manipulator has 7 D.F.F.'s with nano-meter order positional accuracy. The main feature of the manipulation system is that motion of the manipulator is concentrated to the center of the field of view of a microscope to ensure task execution with visual monitoring.2.Realization of stereo-scopic SEM (Scanning Electron Microscope) : A stereo SEM is realized to visualize 3D-image of the nano-meter scale world. In the realized SEM, a stereo image (left eye image and right eye image) as well as multi-resolutonal images (local high magnification image and global wide field of view image) can be obtained by controlling the elect … More ron beam in video rate.3.Prevention of fatal damage by means of operation understanding function by robot : In micro task execution, the operator frequently breaks the object by mistake, becouse the object is much more smaller and weaker than the object in our macro world. To cope with this problem, we realized the fatal damage prevention function based on the robot understanding of operator behavior. This function is realized by the following steps : a)recognition ofan operator's intension, b)prediction of the task status, c)warning to the operator and guidance to escape from the fatal damage in case of dangerous prediction.4.Realistic display of nano-meter world task execution : Force sensor attached to the tip of the manipulator hand and work table is utilized to generated the acoustic sound to let the operator know what is going on in the task execution world. This display enables the operator to recognize the status of the task execution which is quite different from that of our macro world.5.Assembly experiment of nano-meter accuracy : Developed system components stated above (concentrated motion manipulatoe, realistic display of nano-meter world task execution, computer aided fatal damage prevention) are finally integrated to realize nano-mater accuracy task execution system. Such micro task execution of assembly of micro machines as well as the repair of micro patterns are successfully performed to probe the correctness of the developed components. Other than such micro machine assembly task of a micro air-turbine(502 micron diameter), a micro-Torii(100 micron hight), micro five storied temple tower(230 micron hight), curving of micro kokeshi(200 micron diameter Japanese doll) and folding of micro airplane (from 1 mm square aluminum foil) are also completed. Less