Development of Fatigue Testing Method for Thin Films and Fine Wires and SEM In-Situ-Observation of Their Failure Process

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The primary purpose of this research work is to prepare a fatigue testing equipment for thin filma and fine wires. The electric chucking equipment enables ua to grip firmly the specimen and to prevent the failure at the chucking part of specimen. The electric-pneumatic servocontrolled system is applied to attain precise load control at the very light load. It can perform the fatigue tests of films with the thickness of 10-100mum and of wires with the diameter of 10-100mum. The secondary purpose is to combine the fatigue testing machine with a scanning electron microscope (SEM) in order to provide an in-situ observation of the failure process during the test. The third is to investigate the strength of thin films and thin wires using the system developed.Tensile test and fatigue test for pure copper wire with the diameter of 70 mu m are successfully conducted and the fracture surface is examined for discussing the failure process. The tests are also carried out for pure aluminum film with the thickness of 15 mu m and the failure process is observed in-situ by means of the SEM.These experiments prove the validity of the system dsveloped.