Atomic Layr Epitaxy and Property of Artificial Superlattice with Perovskite Type Structure

钙钛矿型结构人工超晶格的原子层外延及其性能

• 批准号: 06555183
• 负责人: TSURUMI Takaaki
• 金额: $ 5.95万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555183/
• 关键词: Perovskite structure; Artificial superlattice; Molecular beam epitaxy; Atomic Layr epitaxy; Dielectricity, Ion beam; 原子層エピタキシ-; バンド計算; ペロブスカイト型化合物; 強誘電体; 結晶構造解析; MBE

In the present study, we have developed a fabrication process of BaTiO_3-SrTiO_3 artificial superlattices with Perovskite type structure by molecular beam epitaxy, and analyzed the crystal structure of the superlattices. We have also measured dielectric property of the superlattices. Results of the research are summarized as follows.1) BaTiO_3-SrTiO_3 superlattices could be fabricated by atomic layr epitaxy where constituent elements were deposited atomic layr-by-layr using a molecular beam epitaxy technique.2) Crystal structure analysis method of artificial superlattice was developed. A software which calculates X-ray diffraction pattern of an artificial superlattice with arbitrary structure was developed and used for structure analysis. It was found calculation and experimental results agreed well by taking into account thermal diffusion of Ba and Sr atoms at interface layr between BaTiO_3 and SrTiO_3.3) In order to prevent the thermal diffusion of constituent elements, a low temperature epitaxy of BaTiO_3 on SiTiO_3 substrates was tried. It was found that epitaxial growth was achieved at 400ﾟC by irradiating low energy oxygen ion beam.4) Dielectric property of the artificial superlattice deposited on a conductive SrTiO_3 substrates was measured. Dielectric property was markedly changed with the structure of the superlattices even if the total thickness and chemical composition of the superlattices were identical.

本研究采用分子束外延技术制备了BaTiO_3-SrTiO_3人工超晶格，并对其晶体结构进行了分析。我们还测量了超晶格的介电性质。主要研究结果如下：1）采用分子束外延技术，原子层外延法制备了BaTiO_3-SrTiO_3超晶格。2）建立了人工超晶格的晶体结构分析方法。开发了一个计算任意结构人工超晶格X射线衍射谱的软件，并用于结构分析。计算结果与实验结果吻合较好，并考虑了Ba和Sr原子在BaTiO_3/SrTiO_3界面层的热扩散。3）为了防止组分元素的热扩散，尝试了在SiTiO_3衬底上低温外延BaTiO_3。结果表明，在400 ℃下，低能氧离子束辐照可以实现外延生长。4）测量了在导电SrTiO_3衬底上沉积的人工超晶格的介电性能。即使超晶格的总厚度和化学成分相同，其介电性能也会随着超晶格结构的不同而发生显著的变化。

项目成果

S.M.Nam, S.Mitarai, Y.Ishibashi, N.Ohashi, T.Tsurumi and O.Fukunaga: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattices by Atomic Layr Epitaxy and Their Dielectric Properties" J.Koren Phys.Soc.29. S632-S635 (1996)

S.M.Nam、S.Mitarai、Y.Ishibashi、N.Ohashi、T.Tsurumi 和 O.Fukunaga：“原子层外延法制备 BaTiO_3/SrTiO_3 人工超晶格及其介电性能”J.Koren Phys.Soc.29。

T.Tsurumi,T.Suzuki,M.Yamane,M.Daimon.: "Fabrication of Barium Titanato-Stromtium Tifanate Artrficial Superlattice by Atomio Layer Epitoxy" Jpn.J.Appl.Phy.33. 5192-5195 (1994)

T.Tsurumi、T.Suzuki、M.Yamane、M.Daimon.：“通过原子层外延法制造钛酸钡-钛酸锶人工超晶格”Jpn.J.Appl.Phy.33。

T.Tsurumi: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattice and Its Dielectric Properties" Proc.Int.Symp.Appl.Ferroelectrics X. (印刷中).

T.Tsurumi：“BaTiO_3/SrTiO_3 人造超晶格的制造及其介电性能”Proc.Int.Symp.Appl.Ferroelectrics X.（印刷中）。

Yurika Ishibashi: "Structural Analysis of Artificial Superlattice by X-ray Diffraction Method" Trans.Mater.Res.Soc.Jpn.(印刷中).

Yurika Ishibashi：“通过 X 射线衍射法对人工超晶格进行结构分析”Trans.Mater.Res.Soc.Jpn.（出版中）。

Takaaki Tsurumi: "Fabrication of BaTiO_3/SrTiO_3 Artificial Superlattice and Its Dielectric Properties" Abs.10th.Int.Symp.Appl.Ferroelectrics. 117- (1996)

Takaaki Tsurumi：“BaTiO_3/SrTiO_3 人造超晶格的制造及其介电性能”Abs.10th.Int.Symp.Appl.Ferroelectrics。