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High Performance of Ozone Treated Aluminum Alloy Surfaces

臭氧处理铝合金表面的高性能

基本信息

批准号：
06555216
负责人：
MOMOSE Takashi
金额：
$ 2.11万
依托单位：
Miyagi National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555216/
关键词：
Ozone treatment Ultra-high vacuum materials Aluminum alloys Stainless steel Titanium Surface contoamination remove Thermal outgassing rate Dynamic outgassion rate 表面汚染の除去熱的ガス放出率動的ガス放出率

项目摘要

Thermal outgassing rate test of aluminum chamber (2m long and 17 cm in daiameter) treated for 37 hours in oxygen gas including ozone 600 ppm with flowing rate of 0.51/min showed that the rate before baking is 1/2, absorbed gas evolved during basking 1/6, and the rate after baking the same as that of the nontreated chamber.A used sputter ion pump was tr eated for 40 hours in oxygen gas described above. The pump treated in ozone took 600 min to reach 2x10^<-8> Torr, instead the nontreated pump took 10^4 min.At the ultimate pressure, outgassing rate of the ozone treated was 2/3 of the nontreated.Degreasing of rolled aluminum foil using ozone was tested two series, one with varying temperature keeping 6 hour exposure and the other with varying treatment time keeping treatment temperature at 150ﾟC.The former showed that remaining oil compoment expressed by carbon content analyzed by ESCA decreased to one third of the original at 150ﾟC.The latter showed remaining oil compoment expressed by carbon content by ESCA decreased to one third of the original after 6 hour exosure. The level satisfied the requirement of industry.The data showed that the effect of the ozone treament varying the conditions is made clear, the treatment is effective for titanium and stainless steel, and slso for degreasing of the rolled aluminum foil.

对长2m、直径17 cm的铝腔在含臭氧的氧气600 ppm中以流速0.51/min处理37 h的热放气速率进行了测试，结果表明，烘培前的放气速率为1/2，烘培过程中放出的气体为1/6，烘培后的放气速率与未处理的放气速率相同。将使用过的溅射离子泵在上述氧气中处理40小时。经过臭氧处理的泵需要600分钟才能达到2 × 10^<-8> Torr，而未经处理的泵需要10^4 min。在极限压力下，经过处理的臭氧出气率为未处理的2/3。采用臭氧除油两种方法对铝箔进行了除油试验，一种是保温6小时，另一种是保温时间，保温温度为150℃。前者表明，在150℃时，用ESCA分析的含碳量表达的剩余油组分减少到原来的三分之一。暴露6 h后，以ESCA碳含量表示的剩余油组分减少到原来的1 / 3。该水平达到了行业要求。实验结果表明，不同条件下的臭氧处理效果明显，对钛和不锈钢的除油效果明显，对轧制铝箔的除油效果也较好。