FABRICATION OF LOW ABSORPTIVE AND OUTGASSING OXIDE FILM USING REACTIVE SUBCRITICAL AND SUPERCRITICAL CARBON DIOXIDE WITH OZONE.

在头两年内，超临界流体（SCF） CO2已被应用到去除铝表面的本机污染。使用XPS的表面进行了评估。由于今年上一财政年度，SCFCO 2被应用于消除人工污染、Triglyceride、沉积在铝反射镜表面上，大约达到20微米厚。污染物清除率与FTIR进行了评估。The rate was measured using two peaks originated from CHイD22イD2 and CHイD23イD2 and the standard lines for the two peaks. 1。获得的清除率约为50 - 98%高于那些本地感染率的人，而使用XPS评估的速率上升到40%的地方。The rate obtained from the CH-D23-D2 peak was higher than those from CH-D22-D2 peak by amount of several to 11%.2。The rate is proportional to pressure of SCFCO-D22-D2 in the range from 100 to 300 atm. 3。The treatment using SCFCOイD22イD2 with OイD22イD2 as additives resulted higher rate in average about 77%than that （66%） treated in SCFCOイD22イD2 alone. 4。生命周期是用O-D23-D2气体测量的，密度为0.2%。结果为： 10摄氏度10小时（小时），20- 40摄氏度4.5小时，60- 70摄氏度2小时，90摄氏度10分钟。

For the first two years, supercritical fluid (SCF) CO2 has been applied to remove native contamination on aluminum surfaces. The surface was evaluated using XPS. For this last fiscal year, SCFCO2 was applied to remove artificial contamination, triglyceride, deposited on aluminum mirror surfaces, approximately several to 20 microns thick. Contamination removing rate was evaluated with FTIR. The rate was measured using two peaks originated from CHィイD22ィエD2 and CHィイD23ィエD2 and the standard lines for the two peaks.1. The obtained removing rate about 50 to 98 % was higher than those of the native contamination, where the rate up to 40% for the latter was evaluated using XPS. The rate obtained from the CHィイD23ィエD2 peak was higher than those from CHィイD22ィエD2 peak by amount of several to 11 %.2. The rate is proportional to pressure of SCFCOィイD22ィエD2 in the range from 100 to 300 atm.3. The treatment using SCFCOィイD22ィエD2 with OィイD22ィエD2 as additives resulted higher rate in average about 77% than that (66%) treated in SCFCOィイD22ィエD2 alone.4. The lifetime was measured using OィイD23ィエD2 gas with 0.2% density. The result is : 10 hours (h) at 10 C, 4.5 h at 20-40C, 2 h at 60-70C and several ten minutes at 90C.