FABRICATION OF LOW ABSORPTIVE AND OUTGASSING OXIDE FILM USING REACTIVE SUBCRITICAL AND SUPERCRITICAL CARBON DIOXIDE WITH OZONE.

使用反应性亚临界和超临界二氧化碳与臭氧制备低吸收和释气氧化膜。

• 批准号: 09555220
• 负责人: MOMOSE Takashi
• 金额: $ 6.59万
• 依托单位: Miyagi National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555220/
• 关键词: Supercritical fluid CO2; Surface Cleaning; FTIR; Ozone treatment; Ultra High Vacuum materials; 超臨界炭素ガス; 超高真空装置用材料; FTIR; 低ガス放出性酸化膜; 低吸着性酸化膜

For the first two years, supercritical fluid (SCF) CO2 has been applied to remove native contamination on aluminum surfaces. The surface was evaluated using XPS. For this last fiscal year, SCFCO2 was applied to remove artificial contamination, triglyceride, deposited on aluminum mirror surfaces, approximately several to 20 microns thick. Contamination removing rate was evaluated with FTIR. The rate was measured using two peaks originated from CHィイD22ィエD2 and CHィイD23ィエD2 and the standard lines for the two peaks.1. The obtained removing rate about 50 to 98 % was higher than those of the native contamination, where the rate up to 40% for the latter was evaluated using XPS. The rate obtained from the CHィイD23ィエD2 peak was higher than those from CHィイD22ィエD2 peak by amount of several to 11 %.2. The rate is proportional to pressure of SCFCOィイD22ィエD2 in the range from 100 to 300 atm.3. The treatment using SCFCOィイD22ィエD2 with OィイD22ィエD2 as additives resulted higher rate in average about 77% than that (66%) treated in SCFCOィイD22ィエD2 alone.4. The lifetime was measured using OィイD23ィエD2 gas with 0.2% density. The result is : 10 hours (h) at 10 C, 4.5 h at 20-40C, 2 h at 60-70C and several ten minutes at 90C.

在前两年，超临界流体（SCF）CO2已被应用于去除铝表面上的原生污染物。使用XPS评估表面。在上一个财政年度，SCFCO 2用于去除沉积在铝镜面上的人工污染物甘油三酯，厚度约为几微米至20微米。用FTIR评价污染物去除率。使用源自CH 22 D22和CH 23 D23的两个峰以及这两个峰的标准线来测量速率。所获得的去除率约为50%至98%，高于天然污染物的去除率，其中使用XPS评估后者的去除率高达40%。从CH_（23）CH_（22）CH_（23）CH_（22）CH_（22）CH_（23）D_（22）峰获得的速率比从CH_（22）CH_（22）CH_（23）D_（22）峰获得的速率高几个至11%。在100至300大气压的范围内，该速率与SCFCO超临界流体D22的压力D2成比例。以超临界CO2-D22-D22为添加剂的处理比单用超临界CO2-D22-D22处理的平均提高率（66%）约77%。使用密度为0.2%的O2-D23-D2气体测量寿命。结果是：10 ℃ 10小时，20- 40 ℃ 4.5小时，60- 70 ℃ 2小时，90 ℃几十分钟。

项目成果

百瀬丘 他4名: "Surface Cleaning on Aluminum foil with Ozone 'gas"Journal of Vacuum Science A Technology A. 16. 961-963 (1998)

Momoseoka 等 4 人：“用臭氧气体对铝箔进行表面清洁”Journal of Vacuum Science A Technology A. 16. 961-963 (1998)

百瀬丘 他4名: "オゾン処理によるアルミ合金箔の脱脂" 真空. 41・3. 395-396 (1998)

Momoseoka 等 4 人：“通过臭氧处理对铝合金箔进行脱脂”真空 41・396。