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Development of Automated and High Accuvately Analysis Method for Shape and Deformation by Phase-shifting Method using Fourier Transform

利用傅里叶变换相移法开发形状和变形的自动化高精度分析方法

基本信息

批准号：
07455054
负责人：
MORIMOTO Yoshiharu
金额：
$ 4.8万
依托单位：
Wakayama University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

In this study, a novel method, i.e., the phase shifting method using Fourier transform, to measure stress, strain, deformation, shape and movement was proposed and the usefulness of the method was confirmed by experiments and simulation. The method is exprected to be used as a tool for various optical measurements. The conclusions are as follows :1. The theory of the phase shifting method using Fourier transform was derived and it was confirmed that the method is very usefulness for various optical methods.2. The accuracy of the method was checked using simulation. The accuracy is very high. It is, however, important to check the accuracy of the peripheral devices for this method.3. A high-resolution image processing system was introduced. An image processing program was programd for analyzing the image taken by the high resolution image processing system.4. The program for the phase shifting method using Fourier transform was porgramd on a workstation. The program was distributed at a seminar in U.S.A.organized by the Society for Experimental Mechanics. The revised program is distributed to the public on our Homepage.5. An experiment using a Twyman-Green Interferometer was performed to measure flatness and the accuracy was about 10nm. It is exprected that the accuracy will be 1nm after some improvements.6. A diffraction grating using colloidal liquid of magnetic particles was developed. The grating was tried to use in moire interferometer. It is necessary to improve the uneven of the frequency.7. Automated non-contact shape measurement using a projector will a phase-shifter was performed. The error was about 0.1mm. It is expected that the accuracy will be 0.01mm after some improvements.8. A new shape measurement method without influence of lenses was developed.

在这项研究中，一种新的方法，即，提出了利用傅里叶变换的相移法测量应力、应变、变形、形状和运动的方法，并通过实验和仿真验证了该方法的有效性。该方法可望作为各种光学测量的工具。主要结论如下：1.推导了傅里叶变换相移法的理论，证实了该方法对各种光学方法都是非常有用的.利用仿真验证了该方法的准确性。准确度非常高。然而，重要的是要检查这种方法的外围设备的准确性。3.介绍了一种高分辨率图像处理系统。编制了图像处理程序，对高分辨率图像处理系统拍摄的图像进行分析.在工作站上编制了傅里叶变换相移法的程序。该计划是在美国的一个研讨会上分发的，由实验力学学会组织。修改后的计划在我们的主页上向公众发布。利用泰曼-格林干涉仪进行了平面度测量实验，测量精度为10 nm。经过改进后，预计测量精度可达1 nm.研制了一种磁性颗粒胶体液体衍射光栅。尝试将光栅应用于莫尔干涉仪中。有必要改善频率的不均匀性。使用投影仪将移相器进行自动非接触形状测量。误差约为0.1mm。经过改进后，预计精度可达0.01mm.提出了一种不受透镜影响的面形测量方法。