Development of Temperature Measurement Method in Micro-Scale Region by using Atomic Force Microscope.

利用原子力显微镜进行微尺度区域温度测量方法的发展。

• 批准号: 07555069
• 负责人: HIJIKATA Kunio
• 金额: $ 8.51万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555069/
• 关键词: Atomic Force Microscope; Temperature Measurement; Thermal Properties; Point Contact; micro-thermocouple; Heat Transfer

With a remarkable progress in science and technology, to make clear heat transfer characteristics in a microscopic scale is becoming great important issue. The purpose of this study is to develop a new technique for a micro-scale thermal measurement with AFM (Atomic Force Microscope) Which exceeds ordinary small scale temperature measurement techniques.In the project, special thermocouple (T.C.) probes and electric conductive probes were made as a cantilever for AFM.The T.C.probe composed of 25 micrometer sharpen nickel wire and 30 nano-meter gold deposition film has a junction of about 5 micrometer at a tip of the probe. The electric probe has same structure as the T.C.probe and made of gold wire and gold film.By making point contact between the probes and conductive sample or heated nonconductive sample, the contact condition has been clarified, such as contact radius, deformation mode and electron transport mode. Electric and thermal measurement of the point contact condition indicates the contact radius of about 10 nano-meter and a few nano-meter, respectively. These small contact scale has possibility of accomplishing thermal measurement with high spatial resolution.By scanning the T.C.probe on tiny heated sample, temperature distribution with 30 micrometer and a few micrometer resolution were sttained in 760 Torr and 0.02 Torr atmosphere. Since heat transfer through the contacting point is much smaller than that throughair, low pressure condition leads small thermal signal. For measurement with higher resolution it is important to reduce the T.C.junction size.The thermal measurement technique was applied to measure physical properties of a composite material sample of a Carbon Fiber Reinforced Plastic (CFRP) composed of epoxy resin and carbon fiber. By selecting suitable thickness of the sample, clear contrast of both electrical and thermal conductivity of the different materials was measured with sub-micron scale under vacuum condition.

随着科学技术的显着进步，明确微观尺度的传热特性正成为重大课题。本研究的目的是开发一种超越普通小尺度温度测量技术的AFM（原子力显微镜）微尺度热测量新技术。在该项目中，制作了特殊的热电偶（T.C.）探针和导电探针作为AFM的悬臂梁。T.C.探针由25微米锐化镍丝和30纳米金沉积膜组成，其结点为 探头尖端约 5 微米。电探针的结构与TC探针相同，由金丝和金膜制成。通过探针与导电样品或加热的非导电样品的点接触，明确了接触条件，如接触半径、变形模式和电子传输模式。点接触条件的电测量和热测量表明接触半径分别约为10纳米和几纳米。这些小接触尺度有可能完成高空间分辨率的热测量。通过在微小的加热样品上扫描TC探头，在760 Torr和0.02 Torr气氛下可以得到30微米和几微米分辨率的温度分布。由于通过接触点的热传递远小于通过空气的热传递，低压条件导致较小的热信号。为了获得更高分辨率的测量，减小 T.C. 结尺寸非常重要。热测量技术用于测量由环氧树脂和碳纤维组成的碳纤维增强塑料 (CFRP) 复合材料样品的物理性能。通过选择合适的样品厚度，在真空条件下测量了亚微米级不同材料的电导率和导热率的清晰对比。