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Development of ultimate optical detectors-thinned, back-illuminated, large CCDs.

开发终极光学探测器——薄型背照式大型 CCD。

基本信息

批准号：
07559013
负责人：
IYE Masanori
金额：
$ 11.97万
依托单位：
National Astronomical Observatory
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1997
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07559013/
关键词：
CCD (Charge Device)Large Format Thinned Device Quantum Efficiency Photo Detector Surface Processing CCD

项目摘要

The project was designed to develop key technologies to manufacture ultimate optical imager with high quantum efficiency, low noise, and large fromat, that is indispensable for next generation astronomical observations.The Subaru telescope under construction at Mauna Kea Hawaii, by National Astronomical Observatory, for instance, has set severe specifications for CCDs to be used for their optical instruments, as follows : 4000 x 2000 pixels/chip, 15 x 15 um pixel, 3-side buttable configuration, thinned and back illuminated structure for high quantum efficiency, spplication of anti-reflection coating, low read noise, operable at 150K,high uniformity of sensitivity, minimum defects, etc.The achievements made by the present research project are :(1) Establishing the fundamental processes to manufacture thinned and back-illuminated CCDs through comperative evaluation of the thermal and chemical processes for the surface accumulation treatments of the detector.Developing the expertise to deposite anti-reflection coatings to enhance the quantum effiency in the ultra-violet spectral region, that is the world highest level to the best of the authors knowledge.Gaining ixperience and identifying the key processes to manufacture a larege format, three-side buttable CCDsConstruction of an efficient CCD evaluation laboratory, that enables swift and reliable evaluation of manufactured CCDsSince we were successful in manufacturing small, thinned, baci-illuminated CCDs that show remarkablly high quantum efficiency and large format, front-illuminated CCDs, the project team belives that the fundamental problem for manufacturing the ultimate optical CCDs are cleared for solution.

该项目旨在开发关键技术，以制造具有高量子效率、低噪声和大视场的最终光学成像仪，这是下一代天文观测所不可或缺的。例如，国家天文台正在夏威夷莫纳克亚夏威夷建造的斯巴鲁望远镜就为光学仪器使用的CCD制定了严格的规格，如下所示：4000 × 2000像素/芯片，15 × 15 μ m像素，三面可对接结构，减薄背照式结构，高量子效率，抗反射涂层的应用，低读取噪声，可工作在150 K，高灵敏度的均匀性，最小的缺陷等。（1）建立了制造减薄和背衬的基本工艺，通过对探测器表面积累处理的热过程和化学过程的比较评估，获得经验并确定制造大幅面三面对接CCD的关键工艺建立一个有效的CCD评估实验室，以便对制造的CCD进行快速可靠的评估由于我们成功地制造了小型CCD，通过开发出具有极高量子效率的薄型背照式CCD和大幅面前照式CCD，项目团队相信，制造最终光学CCD的根本问题已经得到解决。