Development of ultimate optical detectors-thinned, back-illuminated, large CCDs.

点击翻译按钮获取中文摘要

The project was designed to develop key technologies to manufacture ultimate optical imager with high quantum efficiency, low noise, and large fromat, that is indispensable for next generation astronomical observations.The Subaru telescope under construction at Mauna Kea Hawaii, by National Astronomical Observatory, for instance, has set severe specifications for CCDs to be used for their optical instruments, as follows : 4000 x 2000 pixels/chip, 15 x 15 um pixel, 3-side buttable configuration, thinned and back illuminated structure for high quantum efficiency, spplication of anti-reflection coating, low read noise, operable at 150K,high uniformity of sensitivity, minimum defects, etc.The achievements made by the present research project are :(1) Establishing the fundamental processes to manufacture thinned and back-illuminated CCDs through comperative evaluation of the thermal and chemical processes for the surface accumulation treatments of the detector.Developing the expertise to deposite anti-reflection coatings to enhance the quantum effiency in the ultra-violet spectral region, that is the world highest level to the best of the authors knowledge.Gaining ixperience and identifying the key processes to manufacture a larege format, three-side buttable CCDsConstruction of an efficient CCD evaluation laboratory, that enables swift and reliable evaluation of manufactured CCDsSince we were successful in manufacturing small, thinned, baci-illuminated CCDs that show remarkablly high quantum efficiency and large format, front-illuminated CCDs, the project team belives that the fundamental problem for manufacturing the ultimate optical CCDs are cleared for solution.