Development of Hollow Light Guide for Ultra-Violet Laser Power Transmission

紫外激光功率传输中空光导的研制

• 批准号: 07650059
• 负责人: HASHISHIN Yuichi
• 金额: $ 1.15万
• 依托单位: KINKI UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07650059/
• 关键词: Hollow Light Guide; Ultra-Violet Laser; Excimer Laser; ArF Laser; KrF Laser; Aluminum; Phosphor-Bronze; 中空伝送路

The structure of the hollow light guide (hereafter refered to as the HLG) consists of two the reflective metal plates arranged in parallel through a plastic spacer and covered by a heat contraction tube. A metal with high reflectance to the laser light had to be utilized as plate material. We chose aluminum as a reflective plate because of the highest reflectance. Since it was difficult to raise the polishing accuracy of the aluminum reflector, a phosphor-bronze plate with aluminum coating was proposed for use. The manufacturing process of the reflector is divided into three processes ; the polishing, the washing and the aluminum coating. In the polishing process, a special polishing machine was made to polish the phosphor-bronze plate. In the aluminum coationg process, the relation between the temperature of the phosphor-bronze plate and the reflectance, and the adhesion of the aluminum were tested. The optimum coating conditions were obtained for the high reflectance and the tight ad … More hesion. A comparative study of the reflectance, the laser damage threshold, and the bend test was examined for the conventional aluminum reflector with those of the aluminum coating phosphor-bronze reflector. The aluminum coating phosphor-bronze plate was much superior in every test to the aluminum plate. The transmittance of the KrF laser was 77%/m using the above reflector. The delivery energy reached 110mJ/pulse. Since the ArF laser is highly absorbed into air, the transmittance of the ArF laser was lower than that of the KrF laser. Helium gas displayd the weakest absorption of the ArF laser. The transmittance and the delivery energy of the ArF laser reached 72%/m and 50mJ/pulse for helium gas-filled HLG,respectively. These values could not reached the goal of this study, but these results gave the prospect of our success. Based on the above results, an excimer laser scalpel applicable in the medical field using this HLG was designed. The coupling component of the laser and the HLG, the laser emission part were designed and manufactured on a trial basis. Less

中空光导的结构（以下称为HLG）由两个反射金属板通过塑料间隔件平行布置并由热收缩管覆盖组成。必须使用对激光具有高反射率的金属作为板材料。我们选择铝作为反射板，因为它的反射率最高。针对铝反射镜抛光精度难以提高的问题，提出了采用磷青铜板镀铝的方法。反射镜的制造过程分为三个过程：抛光，清洗和铝涂层。在抛光过程中，制作了专用抛光机对磷青铜板进行抛光。在镀铝过程中，测试了磷青铜板的温度与反射率的关系，以及铝的附着力。获得了获得高反射率和致密膜系的最佳工艺条件 ...更多信息 赫辛对普通铝反射镜和铝涂层磷青铜反射镜的反射率、激光损伤阈值和弯曲试验进行了比较研究。铝涂层磷青铜板在各项测试中均上级铝板。使用上述反射器的KrF激光器的透射率为77%/m2。输出能量达到110 mJ/脉冲。由于ArF激光被空气高度吸收，所以ArF激光的透射率低于KrF激光的透射率。氦气对ArF激光的吸收最弱。在充氦HLG中，ArF激光的透过率和输出能量分别达到72%/m和50 mJ/pulse。这些值无法达到本研究的目标，但这些结果给出了我们成功的前景。在此基础上，设计了一种应用于医疗领域的准分子激光手术刀。设计并试制了激光器与HLG的耦合部件、激光发射部件。少

项目成果

橋新裕一: "ArFエキシマレーザーの伝送路" 第16回日本レーザー医学会大会論文集. (予定). (1996)

Yuichi Hashishin：“ArF准分子激光的传输路径”第16届日本激光医学学会会议论文集（计划）（1996年）。

橋新 裕一: "エキシマレーザーメスの開発" 第17回日本レーザー医学会大会論文集. 391-394 (1997)

Yuichi Hashishin：“准分子激光手术刀的开发”第 17 届日本激光医学会论文集 391-394 (1997)。

Uichi Kubo: "Hollow Light Guide and Optical Fiber for UV Laser Transmission" SPIE Biomedical Systems and Technologies II. Vol.3199. 75-80 (1997)

Uichi Kubo：“用于紫外激光传输的空心光导和光纤”SPIE生物医学系统和技术II。

Yuichi, Hashishin: "Power Delivery Guide for ArF Excimer Laser" Proc. the 16th Annual Meeting of Japan Society for Laser Medicine. 365-368 (1996)

Yuichi, Hashishin：“ArF 准分子激光器的功率传输指南”Proc。

Yuichi, Hashishin: "UV Laser-Biotissue Interactions and Delivery Systems" SPIE Specialty Fiber Optics for Biomedical and Industrial Applications. Vol. 2977. 105-114 (1997)

Yuichi, Hashishin：“紫外激光-生物组织相互作用和传输系统”用于生物医学和工业应用的 SPIE 特种光纤。