DEVELOPMENT OF MULTILA YERED FILMS WITH ULTRA-HIGH MAGNETOSTRICTION AND SOFT MAGNETIC PROPERTIES AND THEIR APPLICATIONS FOR MICRO-MAGNETIC

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TbFe and TbHoFe amorphous films :Single films with Tb-Fe and Tb-Ho-Fe systems were fabricated by rf sputtering, and their magnetic and magnetoelastic properties were studied. Tb_<40>Fe_<60> and Tb_<27>Ho_<13>Fe_<60> amorphous films were found to be very attractive for magnetoacoustic applications owing to their large magnetostriction and considerably soft inplane magnetic properties. The effect of thermal annealing on their magnetoelastic properties were also investigated. The results suggest that the thermal annealing is useful for improving their low-field magnetostrictive response. This is considered to be mainly due to relief of internal stresses by annealing. Another possibility of formation of nanocrystalline TbFe_2 phase by annealing was also pointed out.TbFe/FeB amorphous multilayr films :Multilayr films with TbFe/FeB/TbFe sandwich structures and TbFe/FeB structures were formed by rf sputtering and their properties were investigated. The results revealed that a considerably soft inplane magnetization and a huge magnetostriction could be obtained in the sandwich films at room temperature, provided that the thickness of FeB interlayr was within the range of 10-40% of the total film thickness. As for TbFe/FeB multilayr films, their magnetoelastic properties were deteriorated by stacking many numbers of TbFe and FeB layrs. Thermal diffusion of Tb and B were found to be responsible for it, and further studies are necessary by fabricating multilayr films without such a problem.Actuator elements with amorphous films :Cantilever-type actuator elements were constructed using the Tb-Ho-Fe amorphous films with large magnetostriction and soft inplane magnetization. By using Kapton substrate with 12.5mum thickness, the actuator showed a displacement of 100mum.