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DEVELOPMENT OF MULTILA YERED FILMS WITH ULTRA-HIGH MAGNETOSTRICTION AND SOFT MAGNETIC PROPERTIES AND THEIR APPLICATIONS FOR MICRO-MAGNETIC

超高磁致伸缩软磁多层薄膜的研制及其微磁应用

基本信息

批准号：
07650371
负责人：
INOUE Mitsuteru
金额：
$ 0.7万
依托单位：
TOYOHASHI UNIVERSITY OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

TbFe and TbHoFe amorphous films :Single films with Tb-Fe and Tb-Ho-Fe systems were fabricated by rf sputtering, and their magnetic and magnetoelastic properties were studied. Tb_<40>Fe_<60> and Tb_<27>Ho_<13>Fe_<60> amorphous films were found to be very attractive for magnetoacoustic applications owing to their large magnetostriction and considerably soft inplane magnetic properties. The effect of thermal annealing on their magnetoelastic properties were also investigated. The results suggest that the thermal annealing is useful for improving their low-field magnetostrictive response. This is considered to be mainly due to relief of internal stresses by annealing. Another possibility of formation of nanocrystalline TbFe_2 phase by annealing was also pointed out.TbFe/FeB amorphous multilayr films :Multilayr films with TbFe/FeB/TbFe sandwich structures and TbFe/FeB structures were formed by rf sputtering and their properties were investigated. The results revealed that a considerably soft inplane magnetization and a huge magnetostriction could be obtained in the sandwich films at room temperature, provided that the thickness of FeB interlayr was within the range of 10-40% of the total film thickness. As for TbFe/FeB multilayr films, their magnetoelastic properties were deteriorated by stacking many numbers of TbFe and FeB layrs. Thermal diffusion of Tb and B were found to be responsible for it, and further studies are necessary by fabricating multilayr films without such a problem.Actuator elements with amorphous films :Cantilever-type actuator elements were constructed using the Tb-Ho-Fe amorphous films with large magnetostriction and soft inplane magnetization. By using Kapton substrate with 12.5mum thickness, the actuator showed a displacement of 100mum.

TbFe和TbHoFe非晶薄膜：采用射频溅射法制备了Tb-Fe和Tb-Ho-Fe系的单层薄膜，并研究了它们的磁性和磁弹性。<40>Tb_Fe_3<60>和<27>Tb_Ho_Fe_3<13>非晶<60>薄膜由于其大的磁致伸缩和相当软的面内磁性而在磁声应用方面具有很大的吸引力。研究了热退火对磁弹性性能的影响。结果表明，热退火有利于改善其低场磁致伸缩响应。这被认为主要是由于退火消除了内应力。TbFe/FeB非晶多层膜：用射频溅射法制备了TbFe/FeB/TbFe三明治结构和TbFe/FeB结构的多层膜，并对其性能进行了研究。结果表明，当FeB夹层厚度在膜厚的10-40%范围内时，三明治膜在室温下可获得较软的面内磁化强度和较大的磁致伸缩。对于TbFe/FeB多层膜，多层TbFe和FeB的叠层会使其磁弹性性能变差。非晶薄膜驱动器元件：利用具有大磁致伸缩和软面内磁化的Tb-Ho-Fe非晶薄膜，构建了悬臂梁型驱动器元件。通过使用具有12.5 μ m厚度的Kapton衬底，致动器显示出100 μ m的位移。