Microvibration Control in Precision Equipments and Structures

本研究项目旨在解决精密设备中的微振动问题，如半导体光学系统、原子力显微镜、高速彩色打印机等，以及大型空间结构。三个主要的战略被认为是为了消除振动的有害影响，是什么样的：·来源对振动的抑制。通过使用被动隔离材料或主动隔离系统来抑制振动传输，或通过改变传输路径的结构。将干扰拒绝控制应用于精确设备或整个系统，包括振动源。为了在源的支持振动，目前的研究已经提出了一项应用来取消前馈控制输入，通过一个主动隔离系统上的步骤导致直接干扰，其中是计算出前方并使用实验数据。它还提出了一种用于最佳参考输入的计算方法，在没有产生振动的情况下实现高速运动。为了抑制振动传输，这项研究需要对主动振动隔离系统进行建模和控制。在翻译的六个级别的自由和旋转的文本中，表格已被识别。H* 控制已被应用于强耦合子系统的态度控制。这也是为了利用H* 规范作为传输增益来抑制振动传输的最佳结构设计，以控制整个系统的振动，本文提出了在传感器/执行器排列的假设下对较大空间结构的最佳调节。两者都是关于速度和置换的静态反馈，以及关于置换的简单动态反馈，都是关于被认为的，并调整控制器也被提出的方法。

This reserach project aimed at resolving the microvibration problems in precision equipments such as semiconductor lithography systems, atomic force microscopes, high-speed color printers, etc. and large space structures. Three major strategies have been considered to remove the harmful effects of vibrations, which are the following :・Suppression of vibrations at the sources.・Suppression of vibration tranmissions by using passive isolation materials or active isolation systems, or by changing structures of transmission routes.・Application of disturbance rejection control to precision equipments or whole systems including vibration sources.To suppress vibrations at the sources, the present research has proposed application of feedforward control input to cancel the direct disturbance caused by a stepper on an active isolation system, which is computed beforehand using experimental data. It has proposed also computaion methods for the optimal reference input which achieves high-speed movement in good accuracy without generating vibrations.To suppress vibration transmissions, this research has considered modeling and control of an active vibration isolation system. Couplings in the six degrees of freedom of translations and rotations of its table have been identified. H* control is applied to strongly coupled subsystems decentrally for the attitude control. It is also considered optimal structural design for suppression of vibration transmissions using the H* norm as the transmission gain.To suppress vibrations by control of the whole system, this paper has been proposed optimal regulation of large space structures under the assumption of sensors/actuators collocation. Both static feedback of velocity and displacement and simple dynamic feedback of displacement have been considered, and tuning methods for controller gains have been presented.