Development of photomechanical sensor for measurement of deposition thickness using optical fiber

开发利用光纤测量沉积厚度的光机械传感器

• 批准号: 08555061
• 负责人: KUMAZAKI Hironori
• 金额: $ 1.98万
• 依托单位: Gifu National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08555061/
• 关键词: in-situ deposition thickness measurement; ion sputtering apparatus; optical sensor; quartz core cantilever; サイズ効果

(1)Fundamental experiments on Au or Ag deposition・・・The resonance frequencies were measured as a function of the deposition thickness of Au and Ag using a quartz core microcantilever fabricated from an optical fiber in an ion sputtering apparatus. The resonance frequencies monotonously decreased with increase in deposition thickness in both Au deposition and Ag deposition. The rates of decrease were about 0.015% / nm in Au deposition and about 0.009%/nm in Ag deposition. Overall tendencies of experimental values and calculated values applying the theory related to the flexural vibration of a cylindrical composite beam were similar.(2)Effects of cantilever size・・・Effects of cantilever size were discussed. Deposition thickness dependence of resonance frequency was measured on three cantilevers with different length and almost the same diameter. Relative rates of resonance frequency shifts of them didn't depend on the length of their cantilevers. Since measurement accuracy for deposition … More thickness is determined by a product of resonance frequency and its relative rate, the length of the cantilever should be shorter in order to obtain a better accuracy.(3)Automatic measurement of resonance frequency of the cantilever・・・Automatic measurement of resonance frequency of the cantilever was tried using personal computer which controled the frequency for excitation the cantilever and input vibrating signal. The scattering of resonance frequencies became about 80%. and time required for measurement became shorter compared with former way.(4)Measurement of deposition thickness by thin glass vibrator installed with micro-ball lens in FC connector・・Thin glass vibrator deposited Cr and Au was fixed at the tip of PC connector with micro-ball lensin. The resonance frequency as a function of depositon thickness could measured without optical adjustments. Resonance frequency of the glass vibrator with 5mm in length, 2mm in width and 135 mu m in thickness decreased 37Hz from 3.28kHz during deposition of Au 5OOnm. The average rate of resonance frequency shifts was 0.0741Hz/nm in the region.(5)Deposition thickness measurements for some deposition materialsResonance frequencies of quartz core cantilevers with almost same size (30mu m in diameter and 2.2mm in length, resonance frequency before deposition was about 5kHz) were measured with deposition thickness of Au, Ag, Mo and Cr. Bigger resonance frequency shift was obtained in case of deposition material with higher density. Resonance frequency shifts were almost caused by only increace in additional mass of the cantilever not the elasticity of deposition materials. Less

(1)金或银沉积的基础实验···利用离子溅射装置中光纤制成的石英芯微悬臂梁，测量了金和银沉积厚度对共振频率的影响。在Au沉积和Ag沉积中，共振频率都随着沉积厚度的增加而单调减小。镀金和镀银的降幅分别约为0.015%/nm和0.009%/nm。与圆柱形组合梁弯曲振动有关的理论计算值与实验值的总体趋势基本一致。(2)讨论了悬臂梁尺寸的影响。测量了三种不同长度、直径基本相同的悬臂梁的谐振频率随沉积厚度的变化关系。它们的相对共振频率移动率不依赖于它们的悬臂梁的长度。由于沉积…的测量精度悬臂梁的厚度越大，其厚度越大，悬臂梁的长度越短，精度越高。(3)利用PC机控制悬臂梁的激励频率，输入振动信号，实现了悬臂梁共振频率的自动测量。共振频率的散射率达到80%左右。在FC连接器中安装微球透镜的薄玻璃振子测量沉积厚度。·沉积铬和金的薄玻璃振子用微球透镜固定在PC连接器的尖端。不需要光学调整，就可以测量到与沉积厚度有关的共振频率。长5 mm、宽2 mm、厚135微米的玻璃振子在沉积Au 50 nm时，谐振频率从3.28 kHz下降到37 Hz。(5)几种沉积材料的沉积厚度测量用Au、Ag、Mo和Cr的沉积厚度测量了几乎相同尺寸的石英芯悬臂梁(直径30微米，长2.2 mm，沉积前的共振频率约为5 kHz)的共振频率。沉积材料密度越高，谐振频率漂移越大。共振频率漂移几乎是由悬臂梁附加质量的增加引起的，而不是沉积材料的弹性引起的。较少

项目成果

H.Kumazaki: "Pressure dependence of resonance characteristics of the microcantilever fabricated from optical-fiber" Vacuum. 47・6-8. 475-477 (1996)

H.Kumazaki：“由光纤制成的微悬臂梁的谐振特性的压力依赖性”真空47・6-477（1996）。

H.Kumazaki S.Inaba and K.Hane: "Optical measurement for deposition thickness using a thin glass vibrator installed in fiber coupling" J.Vac.Soc.Jpn.41. 165 (1998)

H.Kumazaki S.Inaba 和 K.Hane：“使用安装在光纤耦合器中的薄玻璃振动器进行沉积厚度的光学测量”J.Vac.Soc.Jpn.41。

H.Kumazaki: "Deposition thickness sensor for ion sputtering apparatus" T.IEE.Japan. 117-E・2. 105-108 (1997)

H.Kumazaki：“离子溅射装置的沉积厚度传感器”T.IEE.Japan 117-E·2(1997)。

熊崎裕教・稲葉成基・羽根一博: "ファイバカップリング装着型薄板ガラス振動子を用いた光学式膜厚測定" 真空. 41・3. 164-166 (1998)

Hironori Kumazaki、Shigeki Inaba 和 Kazuhiro Hane：“使用光纤耦合薄玻璃谐振器进行光学薄膜厚度测量” 41・3 (1998)。

H.Kumazaki S.Inaba and K.Hane: "Effect of cantilever size of laser-driven fiber core for deposition thickness measurement" J.Vac.Soc.Jpn.40. 303 (1997)

H.Kumazaki S.Inaba 和 K.Hane：“激光驱动光纤芯悬臂尺寸对沉积厚度测量的影响”J.Vac.Soc.Jpn.40。