Development of photothermal vibrating sensor using optical fiber with a built-in Bragg grating

内置布拉格光栅的光纤光热振动传感器的开发

• 批准号: 11650258
• 负责人: KUMAZAKI Hironori
• 金额: $ 2.3万
• 依托单位: GIFU NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650258/
• 关键词: optical sensor; quartz core vibrator; resonapt characteristics; quartz core cantilever; return Jight; grating fiber; micromachining; 石英コア限動子

A quartz-core cantilever fabricated from an optical fiber tip was discussed as a practical sensor for measurement of various physical quantities. Its operation is based on the principle that the resonance characteristics of the photothermally vibrated cantilever vary with the surrounding physical quantities. In the measurement of resonance frequency, the vibration was detected from light returned from the quartz-core cantilever through an optical fiber. However, the limit existed in the measurement region of resonance frequency on this method. In this study, a quartz-core cantilever was fabricated from an Bragg grating fiber for the purpose of enhancing the detection sensitivity of vibration.First, a quartz-core cantilever (diameter D-32 μm, length L=2.4 mm) was fabricated from multi-mode (GI type) grating fiber. Alhough the resonance point was detected, the characteristics were different from usual one. The amplitude of vibration were varied even at frequency with the exception of a resonance point. Also, the amplitude decreased at the resonance point. Next, a quartz-core cantilever (diameter D=9μm, length L=1.1 mm) was fabricated from single-mode grating fiber. Alhough measuerment of the half power width of the resonance was impossible, the resonance point was detected, As the results, if a quartz-core cantilever with unsymmetrical cross section would be realized using a grating fiber, it must be effective to enhance the detection sensitivity of vibration.

讨论了一种由光纤尖端制成的石英芯悬臂梁作为测量各种物理量的实用传感器。它的工作原理是光热振动悬臂梁的谐振特性随周围物理量的变化而变化。在共振频率的测量中，从通过光纤从石英芯悬臂返回的光检测振动。但该方法在谐振频率的测量范围内存在一定的局限性。为了提高振动检测的灵敏度，本研究利用布拉格光栅光纤制作了石英芯悬臂梁，首先利用多模（GI型）光栅光纤制作了石英芯悬臂梁（直径D-32 μm，长度L= 2.4mm）。虽然检测到了谐振点，但其特性与通常的谐振点不同。振动的振幅甚至在除了共振点之外的频率上变化。此外，振幅在共振点处减小。然后，用单模光栅光纤制作了石英芯悬臂梁（直径D=9μm，长度L= 1.1mm）。虽然无法测量谐振的半功率宽度，但可以检测出谐振点。因此，如果用光栅光纤实现非对称截面的石英芯悬臂梁，一定能有效地提高振动检测灵敏度。

项目成果

H.Kumazaki: "Micromachining of Optical Fiber by Reactive Ion Etching"J.Vac.Soc.Jpn.. 43・10. 992-995 (2000)

H.Kumazaki：“通过反应离子蚀刻进行光纤微加工”J.Vac.Soc.Jpn.. 43・10 (2000)。

H.Kumazaki: "Tunable Wavelength Filter Using a Bragg Grating Fiber Thinned by Plasma Etching"IEEE Photonics Technology Letters. 13・11. 1206-1208 (2001)

H.Kumazaki：“使用等离子蚀刻减薄布拉格光栅光纤的可调谐波长滤波器”IEEE 光子技术快报 13・11 (2001)。

H.Kumazaki, Y.Yamada, S.Inaba and K.Hane.: "Micromachining of Optical Fiber by Reactive Ion Etching"J. Vac. Soc. Jpn.. 43. (2000)

H.Kumazaki、Y.Yamada、S.Inaba 和 K.Hane.：“通过反应离子蚀刻进行光纤微加工”J。