Development of High-Speed Spectroscopy for Measurement of Thermal Radiation Phenomena of Surfaces

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This research is a developmental work of high-speed spectroscopy for the measurement of thermal radiation phenomena of surfaces. It contributes to fundamental researches on thermal radiation characteristics of real surfaces and to development of a new surface diagnosis technique using radiation.First, we developed a high-speed spectrophotometer system, which covers by one system a wide spectral region from visible to infrared. This system consists of two kinds of light sources, and four sets of spectrometers and detector element arrays (99 elements in total). The four spectrometer parts are linked by computer-controlled motors, and outputs of the 99 elements are electronically scanned to realize the fast spectrum measurement. We used this sytem in a wavelength region of lambda=0.35-5.5mum to measure the transition of reflection and emission spectra of metal surfaces in an air-oxidation process at high temperatures. Measured phenomena of radiation interference and diffraction suggested … More the mechanism of oxide flim growth and roughness cleation on the film surfaceSecond, we presented an algorithm of an in-process surface diagnosis technique based on a high-speed spectrum measurement. This algorithm covers the following case : A specular-finished metal surface with a very thin surface film in the initial state, changes gradually to an oxidized rough surface. On such a surface, (-rheta)-direction emission energy u_i and specular-direction reflection energy v_i for rheta-direction incidence are measured repeatedly at wavelengths of lambda_i (i=1,2, ・・・n). The measured data are analyzed time by time to evaluate the surface temperature T,spectra of (-rheta)-direction emittance epsilon, specular-direction reflectance R for rheta-direction incidence, a spectrum of optical constant n^^-of the surface film, average film thickness d and rms roughness sigma of the film surface. The developed spectrophotometer system is utilized at 16 wavelength points in a spectral region of lambda=1.1-1.8mum to measure simultaneously emission and reflection spectra of a surface in the above-mentioned oxidation process. The results are analyzed on a basis of the present algorithm. It is demonstrated that the present technique can evaluate the surface temeperature with a fair accuracy and that the surface quantities with a good precision. Less