Development of High-Speed Spectroscopy for Measurement of Thermal Radiation Phenomena of Surfaces

本研究是一项关于表面热辐射现象测量的高速光谱学的开发工作。这与对真实表面的热辐射特性的基本研究有关，并要利用辐射开发一种新的表面诊断技术。首先，我们开发了一个高速分光光度计系统，一个系统覆盖一个宽光谱区域，从可见到红外。该系统由两种光源组成，四套光谱仪和探测器元素阵列（总共99个元素）组成。四个光谱仪零件与计算机控制的马达相连，99个元件的输出被电子扫描以实现快速的光谱测量。我们使用此符号在高温度的空气氧化过程中测量金属表面的transition of reflection and emission spectra of metal surface。辐射干扰和干扰测量的现象，建议 ... More 在电影表面第二次上氧化物薄膜生长和粗糙度清除的机制中，我们提出了一个基于高速光谱测量的过程中表面诊断技术的算法。这个算法覆盖了下面的情况：在初始状态下，一个非常薄的表面电影中，一个专门完成的金属表面，并对氧化化的表面进行了研究。在这样一个表面上， （-rheta）-定向发射能量u_i和特异性定向反射能量v_i对rheta方向发射能量的测量可重复在lambda_i的波浪长度（i=1，2，... n）。测量的数据是按时间分析的，以评估表面温度T，特别是（-rheta）-方向发射epsilon，特别是用于rheta-方向事件的特别定向反射R，光学常数n^^的光谱，平均电影厚度d和电影表面的rms粗糙度sigma。开发的分光光度计系统在lambda光谱区域的16个波长点上可用，以测量在高于氧化过程中的表面的相同发射和反射特性。结果是根据当前算法的一个基础进行分析的。它是一个演示，因为现有的技术可以用良好的准确性来评估表面温度，并且用良好的精确度来评估表面数量。Less（低）

This research is a developmental work of high-speed spectroscopy for the measurement of thermal radiation phenomena of surfaces. It contributes to fundamental researches on thermal radiation characteristics of real surfaces and to development of a new surface diagnosis technique using radiation.First, we developed a high-speed spectrophotometer system, which covers by one system a wide spectral region from visible to infrared. This system consists of two kinds of light sources, and four sets of spectrometers and detector element arrays (99 elements in total). The four spectrometer parts are linked by computer-controlled motors, and outputs of the 99 elements are electronically scanned to realize the fast spectrum measurement. We used this sytem in a wavelength region of lambda=0.35-5.5mum to measure the transition of reflection and emission spectra of metal surfaces in an air-oxidation process at high temperatures. Measured phenomena of radiation interference and diffraction suggested … More the mechanism of oxide flim growth and roughness cleation on the film surfaceSecond, we presented an algorithm of an in-process surface diagnosis technique based on a high-speed spectrum measurement. This algorithm covers the following case : A specular-finished metal surface with a very thin surface film in the initial state, changes gradually to an oxidized rough surface. On such a surface, (-rheta)-direction emission energy u_i and specular-direction reflection energy v_i for rheta-direction incidence are measured repeatedly at wavelengths of lambda_i (i=1,2, ・・・n). The measured data are analyzed time by time to evaluate the surface temperature T,spectra of (-rheta)-direction emittance epsilon, specular-direction reflectance R for rheta-direction incidence, a spectrum of optical constant n^^-of the surface film, average film thickness d and rms roughness sigma of the film surface. The developed spectrophotometer system is utilized at 16 wavelength points in a spectral region of lambda=1.1-1.8mum to measure simultaneously emission and reflection spectra of a surface in the above-mentioned oxidation process. The results are analyzed on a basis of the present algorithm. It is demonstrated that the present technique can evaluate the surface temeperature with a fair accuracy and that the surface quantities with a good precision. Less