Development of High Precision Finishing Process for Micro-machine Elements by the Application of Magnetic Abrasive Machining

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The results obtained in this research during two years are summarized as follows : (1) A new type of Magnetic Abrasive Finishing Process for micro-machined elements was developed and its processing principle is discussed and clarified using a large-scaled modeling experimental setup built up in our laboratory. (2) The most suitable shape and size of N・S magnetic poles was examined by the computer-aided magnetic field analysis using Finite Element Method (FEM). (3) A precision bench and copact type of magnetic abrasive finishing apparatus was newly design and made using rare earth permanent magnets instead of an electromagnetic coil, in which the monitoring system with CCD camera for observing machined surfaces and precision positioning system of N・S magnetic poles using air cylinder are taken in the apparatus. (4) From the experiments under the various conditions, the finishing characteristics for micro-machined elements are clarified. Moreover, the finishing mechanism is discussed. (5) In this study, pre-machined surface roughness of 4.5mumRy was improved to 0.5mumRy after finishing in case of SS400 ferromagnetic work-piece (minimum size in diameter is 1.5mm). (6) These results were presented at the meeting of JSME and JSPE,and published on the journal of JSGE.