Development of micro machine elements and micro mechanical systemsutilized extra fine wires

本研究利用直径小于几十微米的超细丝材，研制了一些微机械元件和微机械系统。所开发的微螺钉和微螺母通过将两条钼丝紧密地缠绕在销周围并通过将所述丝焊接到销或窄管上以及通过剥离焊接的丝中的一条丝而制成。丝材直径为20 μ m，丝杆与丝母的螺距为40 μ m，丝杆与丝母之间的螺纹连接顺畅。此外，还开发和评估了几种微型机械零件，例如微型螺旋锥齿轮、微型定位机构、微型涡轮、微型针阵列滤波器。

In this research, some micro mechanical elements and some micro mechanical systems were developed by using the extra fine wires which diameter is less than several tens of micrometers. The developed micro-screws and the micro-nuts were made by coiling two molybdenum wires closely around a pin and by soldering the wires onto the pin or a narrow tube, and by peeling one wire of the soldered wires. Diameter of the wires is 20 micrometersand pitch of the micro-screw and micro-nut is 40 micrometers, and the micro-screw is screwed in the micro-nut smoothly. Additionally, several mechanical micro-parts, for example, micro spiral bevel gears, micro positioning mechanisms, micro turbines, micro-pin array filters, were developed and estimated.