Hybrid Plasma sulf-nitriding of ion-nitriding and sputtering

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Target is usually sputtered in highly reduced atmosphere under 0.02 Torr, but sputtering phenomena can arise in about 10 Torr and steel sputters in the atmosphere of 1-10 Torr with ion bombarding in ion-nitriding. So, firstly, steel was plasma sulf-nitrided at 823K for 3.6-18 k s in nitrogen and hydrogen atmospheres of 1-10 Torr. Molybdenum sulfide was used as a negative electrode and target. The steel was sulf-nitrided. Compound layer of 4 mum with nitrogen diffusion layer of 400 mum were formed by sputtering of molybdenum sulfide. Secondly, steel plate was sulf-nitrided by putting pararelly with molybdenum sulfide plate and arising hollow cathode discharge between the two plates. Compound layer of 8-15 mum and 400 mum nitrogen diffusion layer were formed. In both case, compound layers were made with iron sulfide and iron nitride layers.