Fabrication of Advanced In-Pipe Working Micromachine Using Electro-Rheological Fluids

使用电流变流体制造先进的管内工作微型机器

• 批准号: 10555058
• 负责人: YOSHIDA Kazuhiro
• 金额: $ 8.32万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555058/
• 关键词: Micromachine; Electro-rheological fluid; In-pipe mobile micromachine; Microvalve; Micropump; Functional fluid; Fluid power system; Actuator

To realize advanced in-pipe working micromachines with 10mm in diameter, a simple micro fluid control system is fabricated by using ER (Electro-Rheological) fluids whose apparent viscosity can be controlled by the applied electric field strength.1. Advanced actuator using particle-type ER fluids: A simple advanced actuator METERA (Movable Electrode-Type ER Actuator) is proposed. With applying voltage to movable electrodes between which particle-type ER fluids flow, the movable electrodes are moved by the differential pressure. R-METERA (rotary type) and L-METERA (Linear type) are fabricated and the characteristics are experimentally investigated.2. Micro ER valve using homogeneous ER fluids: A simple microvalve using homogeneous ER fluids is proposed. The microvalve has a pair of parallel plate electrodes and homogeneous ER fluids flow between them. By the applied electric field strength, the differential pressure and flowrate are controlled. Micro ER valves are fabricated by conventional machining and micromachining and the characteristics are experimentally investigated.3. Piezoelectric micropump using resonance drive: As a fluid power source, a high output piezoelectric micropump is proposed. The micropump utilizes large volume change of a bellows caused by resonance with a piezoelectric element and an additional mass. Through experimental investigations, the validity is confirmed.4. Structure of advanced in-pipe working micromachines: A micro position control system composed of a micro ER valve, a piezoelectric micropump using resonance drive and a bellows microactuator is fabricated and the validity is experimentally confirmed. Also, a 3-DOF bending and propelling mechanism is fabricated and tested.

为了实现直径为10 mm的先进管内工作微机械，利用电流变液（Electro-Rheological，ER）的表观粘度可以通过外加电场强度来控制，设计了一种简单的微流体控制系统.使用粒子型电流变液的先进致动器：提出了一种简单的先进致动器METERA（可移动电极型电流变致动器）。通过向其间流动颗粒型ER流体的可移动电极施加电压，可移动电极通过压差移动。制作了R-METERA（旋转型）和L-METERA（直线型），并对其特性进行了实验研究.使用均匀ER流体的微型ER阀：提出了一种使用均匀ER流体的简单微型阀。该微阀具有一对平行板电极和均匀的电流变流体在它们之间流动。通过施加的电场强度，控制压差和流量。采用常规加工和微机械加工方法制备了电流变微阀，并对其特性进行了实验研究.谐振驱动的压电微泵：作为一种流体动力源，提出了一种高输出压电微泵。该微型泵利用由与压电元件和附加质量的共振引起的波纹管的大体积变化。通过实验研究，验证了其有效性.先进管内工作微机械的结构：制作了由电流变微阀、谐振驱动压电微泵和波纹管微驱动器组成的微位置控制系统，并通过实验验证了其有效性。制作了三自由度弯曲推进机构并进行了试验。

项目成果

Y. Kondoh, T. Tomita, S. Yokota, Y. Nagamine and H. Nagashima: "Rotary Movable Electrode Type ER Actuator : R-METERA (Fabrication and the Static Characteristics)"Proc. 1999 JSME Annual Meeting. V. 225-226 (1999)

Y. Kondoh、T. Tomita、S. Yokota、Y. Nagamine 和 H. Nagashima：“旋转可移动电极型 ER 执行器：R-METERA（制造和静态特性）”Proc。

近藤 豊: "回転可動電極形ERアクチュエータ:R-METERA (試作および静特性実験)"機械学会年次大会講演集. V. 225-226 (1999)

Yutaka Kondo：“旋转可动电极型ER致动器：R-METERA（原型和静态特性实验）”日本机械工程师学会年会记录V.225-226（1999）。

K. Yoshida, H. Takatori, J. H. Park and S. Yokota: "A Microvalve Using Homogeneous ER Fluids"Proc. JSME-JSPE Yamanashi District Conf.. 81-82 (1998)

K. Yoshida、H. Takatori、J. H. Park 和 S. Yokota：“使用均质 ER 流体的微型阀”Proc。

J. H. Park, K. Yoshida and S. Yokota: "Micro Fluid Control System Using Homogeneous ER Fluid (Fabrication of an Open-Loop Micro Position Control System)"Proc. 1999 JSME Annual Meeting. V. 221-222 (1999)

J. H. Park、K. Yoshida 和 S. Yokota：“使用均质 ER 流体的微流体控制系统（开环微位置控制系统的制造）”Proc。

J.H.Park: "Micro Fluid Control System Using Homogeneous ER Fluids (Proposition of Micro ER Valve and Basic Experiments)"Proc.IEEE/RSJIROS. 2. 1063-1068 (1999)

J.H.Park：“使用均质 ER 流体的微流体控制系统（微型 ER 阀的提议和基本实验）”Proc.IEEE/RSJIROS。