Fabrication of Advanced In-Pipe Working Micromachine Using Electro-Rheological Fluids

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To realize advanced in-pipe working micromachines with 10mm in diameter, a simple micro fluid control system is fabricated by using ER (Electro-Rheological) fluids whose apparent viscosity can be controlled by the applied electric field strength.1. Advanced actuator using particle-type ER fluids: A simple advanced actuator METERA (Movable Electrode-Type ER Actuator) is proposed. With applying voltage to movable electrodes between which particle-type ER fluids flow, the movable electrodes are moved by the differential pressure. R-METERA (rotary type) and L-METERA (Linear type) are fabricated and the characteristics are experimentally investigated.2. Micro ER valve using homogeneous ER fluids: A simple microvalve using homogeneous ER fluids is proposed. The microvalve has a pair of parallel plate electrodes and homogeneous ER fluids flow between them. By the applied electric field strength, the differential pressure and flowrate are controlled. Micro ER valves are fabricated by conventional machining and micromachining and the characteristics are experimentally investigated.3. Piezoelectric micropump using resonance drive: As a fluid power source, a high output piezoelectric micropump is proposed. The micropump utilizes large volume change of a bellows caused by resonance with a piezoelectric element and an additional mass. Through experimental investigations, the validity is confirmed.4. Structure of advanced in-pipe working micromachines: A micro position control system composed of a micro ER valve, a piezoelectric micropump using resonance drive and a bellows microactuator is fabricated and the validity is experimentally confirmed. Also, a 3-DOF bending and propelling mechanism is fabricated and tested.