Development of micro actuation systems using ac electroosmotic flows

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The ac electroosmosis (ACEO) produces convection flows of water by applying relatively low ac voltage to the liquid through simple fixed electrodes. By obtaining a unidirectional flow from the ACEO convection flow, advanced micro actuation systems will be realized. In this study, to realize above-mentioned function, three micropumps using flow deflectors, square pole-slit electrodes, and plate-small pipe electrodes were proposed and developed. Based on the FEM simulation, the performances of micropumps were theoretically evaluated. Then the MEMS processes were developed and the micropumps were fabricated. Through experiments, the characteristics of micropumps were clarified and their validity was confirmed.