Develop a Lamp type Wide Band Vacuum Ultra Violet Light Source

开发灯式宽带真空紫外光源

• 批准号: 10650277
• 负责人: KUBO Makoto
• 金额: $ 1.86万
• 依托单位: KYOTO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650277/
• 关键词: vacuum ultra violet light; VUV; vacuum ultra violet light source; Deaterium gas (D_2); Mercury (Mg); the window for VUV; Magnesium fluoride (MgF_2); 水銀(Hg); 重水素ガス; 重水素-水銀ランプ

The purpose of this study is to develop a lamp type light source radiated high intensity vacuum ultra violet (VUV) band light. The wave band of this (D_2-Hg lamp) is 115nm〜400nm as for the mixed radiation from D_2-gas, Hg-vapor and HgD-excimer. At the preliminary test time, it was discharged by the single pulse voltage (Current=1kA〜3kA). The cathode of this lamp has the special structure made by liquid mercury. It can emit high density electron and radiate high power light, discharged by the large steepness pulse. The main tame for developing this lamp is following. 1. Does this cathode have the same motion of single pulse discharge, at the time of using on large current repeatedly pulse (10 Hz)? 2. What is the best lamp structure for getting VUV band light through the MgF_2 window? 3. Dose this window get over to fix directly on the lamp glass?1. The discharge of grow to arc transition stopped and the Hg vapor were spreading away to lamp wall within a few seconds without using a cooling system. For this problem, we made the lowest temperature point of the lamp to control on the cathode area by using a jacket type cooling covered whole cathode. But We need complete control over the temperature of lamp, not only cooling but also heating up near the window for VUV light against the Hg vapor spread over the surface of it. 2. We could not fix MgF_2 window plate on the glass of the lamp by using a flint glass directly. And so we made to fix it with Ni metal between each material. But we have to done the life test for this type lamp because the wide metal surface into the discharge space.The optimum structure for VUV light through the window is getting the wide radiate angle to see from dicharge core and have not little Hg vapor spread away..This lamp with special structure cathode worked on large current repeatedly pulse as same as single pulse, but we have to solve the optimum structure of the window for VUV light and to control the lamp temperature.

本研究的目的是研制一种灯型光源辐射的高强度真空紫外线(VUV)波段光源。对于D_2气体、汞蒸气和汞准分子的混合辐射，该(D_2-汞灯)的波段为115 nm~400 nm。在初步试验时，采用单脉冲电压(电流=1kA~3kA)放电。这种灯的阴极具有由液态汞制成的特殊结构。它可以发射高密度电子和辐射高功率光，由大陡度脉冲放电。研制这种灯具的主要驯化方法如下。1.在使用大电流重复脉冲(10 Hz)时，该阴极是否具有相同的单脉冲放电运动？2.使VUV波段光通过MgF_2窗口的最佳灯具结构是什么？3.该窗口是否能直接固定在灯玻璃上？1.在不使用冷却系统的情况下，生长到弧光过渡的放电停止，汞蒸气在几秒钟内扩散到灯墙上。针对这一问题，采用套管式冷却全阴极的方法，将灯泡的最低温度控制在阴极区上。但我们需要完全控制灯的温度，不仅要冷却，还要在窗户附近加热，以防止VUV光散布在窗户表面的汞蒸气。2.不能直接用打火石玻璃将MGF_2窗板固定在灯具的玻璃上。所以我们在每种材料之间用镍金属固定它。但这类灯由于金属表面较宽，进入放电空间，必须进行寿命试验。真空紫外光透过窗口的最佳结构是从放电芯处获得较大的辐射角，并且没有少量汞蒸气散开。这种特殊结构的阴极与单脉冲一样重复工作在大电流脉冲下，但我们必须解决VUV光窗口的最佳结构和控制灯的温度。