Self-Lubrication Design for Ceramic Coating via Light-Element Ion Implantation

离子注入是一种有效的表面改性技术，可以将各种元素注入到任何靶材料中。特别是，通过轻元素离子注入可以适应各种表面纳米结构。介绍了三种纳米结构方法，通过离子注入研究了纳米结构材料的纳米结构行为，了解了这些纳米结构材料在使用过程中的纳米异质结构过程。采用离子镀氮化钛薄膜作为纳米结构的普通衬底。随着碳离子注入剂量的增加，化学键态可以逐渐改变。这是化学键中的第一个纳米结构控制，导致指定表面区域的选择性硬化。此外，硬化表面往往有利于提高耐磨性，即使在严重的磨损条件下。第二种纳米结构的特点是原位形成非平衡co . More化合物和注入原子形成簇。所施加的铝与目标材料系统有松散的结合。这导致非平衡立方固溶体（TI, Al） n的形成，而部分施加的铝仍然以金属铝相的形式存在。随着本体温度的升高，这些铝原子从深度向表面反向扩散，与表面穿透的氧原子发生反应，原位形成致密的*-氧化铝表面层。这是一层保护层，可以防止氮化钛进一步氧化，即使在高温下，原始的氮化钛膜也很容易被氧化。第三种纳米结构具有高迁移率和高反应性。注入的氯与TiN的晶格原子没有或只有很少的明显的键合。它们很可能被困在TiN中的位错处，而晶格常数没有明显变化。由于它们具有足够的迁移率，可以在柱状TiN中扩散到表面，因此改变了磨损轨迹中的表面摩擦化学反应，使中间相氧化物或Magneli相氧化物在原位形成。由于其剪切变形，TiN与工作材料的接触面自润滑，保持了低摩擦和低磨损状态。这种表面纳米结构和纳米异质结构改性成为一种提高耐磨韧性的新型材料设计。少

Ion implantation is an effective surface modification technology since various kinds of elements can be implanted into any targeting materials. In particular, various surface nano-structuring can be accommodated by the light element ion implantation. Three kinds of nanostructuring methods are introduced to investigate the nano-structuring behavior via the ion implantation and to understand the nano-hetero structuring process when these nano-structured materials are in use. Ion-plated titanium nitride films are employed as a common substrate to be nano-structured. The chemical bonding state can be gradually modified with increasing the doses of carbon via ion implantation. This first nano-structuring control in chemical bonding leads to selective hardening for designated surface area. Furthermore, hardened surface is often favored for promotion of wear resistance even in the severe wearing condition. The second nano-structuring is characterized by in-situ formation of non-equilibrium co … More mpound and by cluster formation of implanted atoms. The imposed aluminum has loose bonding with the targeting material system. This results in the formation of non-equilibrium cubic solid solution (TI, Al) N. While, a part of imposed aluminum still remains as a metallic aluminum phase. With increasing the bulk temperature, these aluminum atoms make counter diffusion from the depth to the surface, resulting in the reaction with penetrating oxygen atoms from surface and the in-situ formation of dense *-alumina surface layer. This works as a protective layer to prevent titanium nitride from further oxidation even at the elevated temperature, where the original titanium nitride films can be easily oxidized. The third nano-structuring is characterized by high mobility and reactivity of implanted atoms in TiN. The implanted chlorine has no or little distinct bonding with the lattice atoms of TiN. They might well be trapped at the dislocation in TiN without significant change of lattice constants. Since they have sufficient mobility to diffuse in the columnar TiN to the surface, the surface tribo-chemical reaction in the wear track is modified to make in-situ formation of intermediate phase oxides or Magneli phase oxides. Owing to their shearing deformation, the contact surface between TiN and work materials is self-lubricated to preserve low friction and low wearing state. This surface nano-structuring with nano-hetero structural modification becomes a new material design to improve the wear toughness. Less