Self-Lubrication Design for Ceramic Coating via Light-Element Ion Implantation

轻元素离子注入陶瓷涂层自润滑设计

• 批准号: 12305047
• 负责人: AIZAWA Tatsuhiko
• 金额: $ 27.48万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12305047/
• 关键词: Self-Lubrincation Mechanism; Light-element Ion Implantation; TiN Hard Films; Low Temperature Oxidation; Intermediate Oxides; Surface Oxidation Control; Dry Foming; イオン注入; 軽元素注入; 塩素注入; TiN; Al注入; イオンビームスパッター; 自己潤滑性; 自己保護性; 軽元素打込ち; 塩素打込み; A

Ion implantation is an effective surface modification technology since various kinds of elements can be implanted into any targeting materials. In particular, various surface nano-structuring can be accommodated by the light element ion implantation. Three kinds of nanostructuring methods are introduced to investigate the nano-structuring behavior via the ion implantation and to understand the nano-hetero structuring process when these nano-structured materials are in use. Ion-plated titanium nitride films are employed as a common substrate to be nano-structured. The chemical bonding state can be gradually modified with increasing the doses of carbon via ion implantation. This first nano-structuring control in chemical bonding leads to selective hardening for designated surface area. Furthermore, hardened surface is often favored for promotion of wear resistance even in the severe wearing condition. The second nano-structuring is characterized by in-situ formation of non-equilibrium co … More mpound and by cluster formation of implanted atoms. The imposed aluminum has loose bonding with the targeting material system. This results in the formation of non-equilibrium cubic solid solution (TI, Al) N. While, a part of imposed aluminum still remains as a metallic aluminum phase. With increasing the bulk temperature, these aluminum atoms make counter diffusion from the depth to the surface, resulting in the reaction with penetrating oxygen atoms from surface and the in-situ formation of dense *-alumina surface layer. This works as a protective layer to prevent titanium nitride from further oxidation even at the elevated temperature, where the original titanium nitride films can be easily oxidized. The third nano-structuring is characterized by high mobility and reactivity of implanted atoms in TiN. The implanted chlorine has no or little distinct bonding with the lattice atoms of TiN. They might well be trapped at the dislocation in TiN without significant change of lattice constants. Since they have sufficient mobility to diffuse in the columnar TiN to the surface, the surface tribo-chemical reaction in the wear track is modified to make in-situ formation of intermediate phase oxides or Magneli phase oxides. Owing to their shearing deformation, the contact surface between TiN and work materials is self-lubricated to preserve low friction and low wearing state. This surface nano-structuring with nano-hetero structural modification becomes a new material design to improve the wear toughness. Less

离子注入是一种有效的表面改性技术，因为各种元素都可以注入到任何靶向材料中。特别是，轻元素离子注入可以适应各种表面纳米结构。介绍了三种纳米结构方法，以研究离子注入纳米结构的行为，以及了解这些纳米结构材料在使用时的纳米异质结构过程。采用离子镀氮化钛薄膜作为常用的衬底实现纳米结构。随着离子注入碳剂量的增加，化学键状态逐渐改变。这种化学结合中的第一个纳米结构控制导致了对指定表面积的选择性硬化。此外，即使在严重的磨损条件下，淬火表面也往往有利于提高耐磨性。第二种纳米结构的特征是原位形成非平衡的co…更多重量和通过注入原子的团簇形成。施加的铝与靶向材料系统具有松散的结合。这导致了非平衡立方固溶体(Ti，Al)N的形成，而施加的铝仍有一部分作为金属铝相存在。随着体相温度的升高，这些铝原子从深层向表面反向扩散，与表面的穿透氧原子发生反应，原位形成致密的α-氧化铝表面层。这是一层保护层，可以防止氮化钛在高温下进一步氧化，因为在高温下，原始的氮化钛薄膜很容易被氧化。第三种纳米结构的特点是注入到TiN中的原子具有高的迁移率和反应活性。注入的氯与TiN的晶格原子没有或几乎没有明显的成键。它们很可能被捕获在TiN中的位错处，而晶格常数没有明显的变化。由于它们具有足够的迁移率，可以在柱状TiN中扩散到表面，因此磨损轨迹中的表面摩擦化学反应被修改为原位形成中间相氧化物或Magneli相氧化物。由于其剪切变形，TiN与工作材料之间的接触面是自润滑的，以保持低摩擦和低磨损状态。这种表面纳米结构和纳米异质结构改性成为一种提高耐磨韧性的新材料设计。较少

项目成果

A.Mitsuo, T.Aizawa: "tribological Properties of Halogen Ion Implanted Titanium Nitride Films"Proceeding of 2000 Ruder Metallurgy World Congers. 1120-1123 (2001)

A.Mitsuo、T.Aizawa：“卤素离子注入氮化钛薄膜的摩擦学特性”2000 年罗德冶金世界会议论文集。

三尾淳,仁手宜弘,相澤龍彦: "炭素または塩素イオン注入TiN膜の摩擦摩耗特性"アイオニクス. 26・7. 25-30 (2000)

Jun Mio、Yoshihiro Nite、Tatsuhiko Aizawa：“注入碳或氯离子的 TiN 薄膜的摩擦和磨损特性”Ionics 26・7 (2000)。

P.Visuttipitukul, T.Aizawa, K.Kondoh, H.Kuwahara: "Plasma nitriding of cold-pressed and BMA-forged Al compacts"J. Jpn./ Soc. Powders and Powder Metallurgy. 49[11]. 1028-1035 (2003)

P.Visuttipitukul、T.Aizawa、K.Kondoh、H.Kuwahara：“冷压和 BMA 锻造铝坯体的等离子氮化”J。

P.Visusttipitukul, t.Aizawa, K.Kondoh, H.Kuwahara: "Plasma nitriding of cold-pressed and BMA-forged Al compacts"J.JPN./SOC.Powders and Powder Metallurgy. 49〔11〕. 1028-1035 (2003)

P.Visusttipitukul、t.Aizawa、K.Kondoh、H.Kuwahara：“冷压和 BMA 锻造铝压块的等离子氮化”J.JPN./SOC.Powders and Powder Metallurgy 49[11]。 (2003)

T.Aizawa, et al.: "Self-lubrincation of chlorine-implanted fitanium nitride coating"J.Am.Ceram.Soc.. 85〔1〕. 21-24 (2002)

T.Aizawa等人：“氯注入氮化钛涂层的自润滑”J.Am.Ceram.Soc. 85〔1〕21-24(2002)。