Synthesis and Mechanical Characterization of Nano-Columnar DLC Coating Toward Application of MEMS

采用电子束辐照物理气相沉积法制备了纳米柱状类金刚石（DLC）或非晶碳涂层。利用原子力显微镜（AFM）分析了其纳米结构和奇异的力学性能，研究了纳米柱状结构及其与表面接触角从亲水状态到疏水状态的关系。

Nano-columnar DLC (Diamond-Like Carbon) or amorphous carbon coating was made by PVD (Physical Vapor Deposition) method with electron beam irradiation. Its nano-structure and exotic mechanical properties were analyzed by AFM (Atomic Force Microscope) to investigate the nano-columnar structure and its relationship in the surface contact angle from hydrophilic to hydrophobic states.