Development of a new specimen thinning technique based on the quantum process.

开发基于量子过程的新样品减薄技术。

• 批准号: 12355024
• 负责人: ICHINOSE Hideki
• 金额: $ 28.81万
• 依托单位: HOkkaido University (2003)The University of Tokyo (2000-2002)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12355024/
• 关键词: quantum-process thinning; damage free super thin foil; laser gun; ultra violet laser; damage free surface; thin foil for TEM observation; atomic structure analyzing system; tuned irradiation; 平滑表面; 波長同調照射; SiC超薄片; ダイヤモンド超薄片

The research is aimed to develop a new specimen thinning technique employing not an accelerated ions but a tuned short wave length electro magnetic wave to cut out atomic bonding on or near the materials surface to thin the specimen layer by layer without any damages on and in the specimen. The new technique is expected to increase the quality and the credibility of indispensable atomic structure information to the nano-technology obtained by a TEM. Apparent advancement in the precise control technique of the laser power, in development of fine focus control system and in high efficiency this technique on various materials were shown. Detailed results are as follows ; (1)A quantum-process thinning system equipped by both an ion gun and a laser gun was developed to acquire the optimum optical condition and energy density of the laser, (2)Both binary elemental covalent handing material (SiC) and a pure covalent bonding material (diamond) were thinned at the fixed wavelength to compare with Si to optimize the thinning condition. (3)A guiding rule to evaluate the size of evaporating material from the surface due to the laser irradiation was obtained. (4)A prototype of the new product was designed. The research is planned to be followed by the JST project on the next stage.

本研究的目的是发展一种新的样品减薄技术，采用非加速离子而是调谐的短波长电磁波来切断材料表面或附近的原子键合，从而逐层减薄样品，而不对样品表面和样品内部造成任何损伤。新技术有望提高TEM获得的纳米技术中不可缺少的原子结构信息的质量和可信度。在激光功率的精确控制技术、细聚焦控制系统的发展以及在各种材料上的高效率等方面取得了明显的进展。具体结果如下：（1）研制了一套由离子枪和激光枪组成的量子减薄系统，以获得最佳的激光光学条件和能量密度。（2）在固定波长下对二元共价键材料（SiC）和纯共价键材料（金刚石）进行减薄，并与Si进行比较，以优化减薄条件。(3)A得到了激光辐照下材料表面蒸发尺寸的评价准则。(4)A设计了新产品的原型。该研究计划在下一阶段由JST项目跟进。

项目成果

S.Watanabe, M.Hoshino, S.Ohnuki, H.Takahashi, N.Q.Lam: "Temporal fluctuation and its power law in the crystalline-to-glass transition during electron irradiation"Philosophical Magazine. 83. 2599-2619 (2003)

S.Watanabe、M.Hoshino、S.Ohnuki、H.Takahashi、N.Q.Lam：“电子辐照过程中晶体到玻璃转变的时间涨落及其幂律”哲学杂志。

E.Takuma, H.Ichinose: "Chemical Structure Analysis of a Σ9 Grain Boundary in SiC"MRS Symp. Proc. 727. 53-58 (2002)

E.Takuma，H.Ich​​inose：“SiC 中 Σ9 晶界的化学结构分析”MRS Symp. 727. 53-58 (2002)

Katsuyuki Matsunaga, Yuji Iwamoto, Yuichi Ikuhara: "Atomic Structure and Diffusion in Amorphous Si-B-C-N by Molecular Dynamics Simulation"Mater. Trans.. 43. 1506-1511 (2002)

Katsuyuki Matsunaga、Yuji Iwamoto、Yuichi Ikuhara：“通过分子动力学模拟研究非晶 Si-B-C-N 中的原子结构和扩散”材料。

Tsuyoshi Watanabe, Hidehiro Yoshida, Yuichi Ikuhara, Tateto Sakuma, Hiroyuki Muto, Mototsugu Sasaki: "Grain Boundary Sliding and Atomic Structures in Alumina Bicrystals with[0001] Symmetric Tilt Grain Boundaries"Mater. Trans.. 43. 1561-1565 (2002)

Tsuyoshi Watanabe、Hidehiro Yoshida、Yuichi Ikuhara、Tateto Sakuma、Hiroyuki Muto、Mototsugu Sasaki：“具有[0001]对称倾斜晶界的氧化铝双晶中的晶界滑动和原子结构”Mater。

Hidehiro Yoshida, Yorinobu Takigawa, Yuichi Ikuhara, Taketo Sakuma: "Effect of Chemical Bonding State on High-temperature Plastic Flow Behavior in Fine-grained, Polycrystalline Cation-doped Al_2O_3"Mater. Trans.. 43. 1566-1572 (2002)

Hidehiro Yoshida、Yorinobu Takikawa、Yuichi Ikuhara、Taketo Sakuma：“化学键合状态对细晶多晶阳离子掺杂 Al_2O_3 材料高温塑性流动行为的影响”。