Development of a new specimen thinning technique based on the quantum process.

该研究旨在开发一种新的试样减薄技术，该技术不是使用加速离子，而是使用调谐短波电磁波来切断材料表面或表面附近的原子键，从而使样品一层一层地变薄，而不会对样品表面和内部造成任何损害。新技术有望提高TEM纳米技术所获得的必不可少的原子结构信息的质量和可信度。在激光功率的精确控制技术、精细聚焦控制系统的开发以及在各种材料上的高效率方面取得了明显的进步。具体结果如下：(1)研制了离子枪和激光枪共同配备的量子过程减薄系统，以获得最佳的光学条件和激光能量密度；(2)在固定波长处对二元元素共价处理材料（SiC）和纯共价键材料（金刚石）进行减薄，与Si进行比较，优化减薄条件。(3)得到了评价激光辐照下表面蒸发物质大小的指导规律。设计了新产品的样机。该研究计划在下一阶段进行JST项目。

The research is aimed to develop a new specimen thinning technique employing not an accelerated ions but a tuned short wave length electro magnetic wave to cut out atomic bonding on or near the materials surface to thin the specimen layer by layer without any damages on and in the specimen. The new technique is expected to increase the quality and the credibility of indispensable atomic structure information to the nano-technology obtained by a TEM. Apparent advancement in the precise control technique of the laser power, in development of fine focus control system and in high efficiency this technique on various materials were shown. Detailed results are as follows ; (1)A quantum-process thinning system equipped by both an ion gun and a laser gun was developed to acquire the optimum optical condition and energy density of the laser, (2)Both binary elemental covalent handing material (SiC) and a pure covalent bonding material (diamond) were thinned at the fixed wavelength to compare with Si to optimize the thinning condition. (3)A guiding rule to evaluate the size of evaporating material from the surface due to the laser irradiation was obtained. (4)A prototype of the new product was designed. The research is planned to be followed by the JST project on the next stage.