Production and Characterization of a Wined Beam of Neutral Free Radicals for Control of Surface Fundamental Processes

为了进一步发展量子功能器件和纳米机电系统，巧妙地利用中性自由基的选择性表面反应来加工器件是近年来必不可少的。在中性自由基与表征良好的材料表面之间的化学反应的实验研究中，遇到的问题是如何充分地只向表面提供所需的具有所需动能的中性自由基种类。为了克服这一困难，研究者提出了几种实验方法来产生稳定通量的中性自由基（RBNR）精束。其中两种方法是负离子束的光去离子化方法（PDINIB）和高能复合束的光解离方法（PDECB）。我们一直在开发一种利用PDINIB方法生产的RBNR的试验表面加工装置。当我们将RBNR应用于薄膜生长时，使用连续波激光器获得的稳定-f…更大的流通量光束比脉冲光束更有用。然而，可用的连续波激光器的功率通常比脉冲激光器的峰值功率弱得多。因此，如何提高光中和效率已成为实现稳定通量PDINIB装置的关键。我们成功地提高了我们的实验装置的光中和效率高达49%，这是我们使用灵敏的测量技术来确定的。采用基于后scf从头算分子轨道理论的分子设计技术，进一步扩展了PDECB方法的适用性。我们发现，使用PDECB法制备的二烷基iii族亚硝基双根碱束有利于化学计量iii族氮化物的低温薄膜生长。理论结果表明，（CH_3）_2GaN_3分子具有单分子亚稳染料的性质，是一种很有前途的PDECB源材料。少

In order to further develop quantum functional devices and nano-electromechanical systems it has become indispensable in recent years to ingeniously utilize selective surface reactions of neutral free radicals for the device processing. The problem encountered in the experimental study of a chemical reaction between a neutral free radical and a well-characterized material surface is how to sufficiently supply only the desired neutral free radical species with the desired kinetic energy onto the surface. In order to overcome this difficulty the investigator has proposed several experimental approaches to produce steady-flux refined beams of neutral free radicals (RBNR). Two of these approaches are the method of photo-deionization of negative ion beams (PDINIB) and the method of photo-dissociation of energetic compound beams (PDECB).We have been developing a trial surface-processing apparatus utilizing RBNR produced by the PDINIB method. When we apply RBNR to thin film growth, a steady-f … More lux beam obtained using a CW laser is more useful than a pulsed beam. However, the power of an available CW laser is generally much weaker than the peak power of a pulsed laser. Thus, how to enhance the photo-neutralization efficiency has been the key point to realize a practical steady-flux PDINIB apparatus. We succeeded in improvement of the photo-neutralization efficiency in our trial apparatus up to 49 %, which we determined using sensitive measurement techniques method developed in this study.Molecular design techniques based on post-SCF ab initio molecular orbital theory were employed to further extend applicability of the PDECB method. We found that use of a beam of dialkyl group-III nitrene biradicaloid produced by the PDECB method is advantageous to the low-temperature thin-film growth of stoichiometric group-III nitride. The theoretical results indicated that (CH_3)_2GaN_3 is a promising PDECB source material in that this molecule possesses the nature of unimolecular metastable dye. Less