Production and Characterization of a Wined Beam of Neutral Free Radicals for Control of Surface Fundamental Processes

用于控制表面基本过程的中性自由基缠绕束的产生和表征

• 批准号: 12640396
• 负责人: HAYASHI Kenji
• 金额: $ 2.3万
• 依托单位: Kanazawa Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12640396/
• 关键词: Neutral Free Radical; Control of Surface Fundamental Processes; Negative Ion Beam; Laser Photo-Excitation; Ab Initio Molecular Orbital Theory; Chemical Physics; Molecular Design; Semiconductor Device Processing

In order to further develop quantum functional devices and nano-electromechanical systems it has become indispensable in recent years to ingeniously utilize selective surface reactions of neutral free radicals for the device processing. The problem encountered in the experimental study of a chemical reaction between a neutral free radical and a well-characterized material surface is how to sufficiently supply only the desired neutral free radical species with the desired kinetic energy onto the surface. In order to overcome this difficulty the investigator has proposed several experimental approaches to produce steady-flux refined beams of neutral free radicals (RBNR). Two of these approaches are the method of photo-deionization of negative ion beams (PDINIB) and the method of photo-dissociation of energetic compound beams (PDECB).We have been developing a trial surface-processing apparatus utilizing RBNR produced by the PDINIB method. When we apply RBNR to thin film growth, a steady-f … More lux beam obtained using a CW laser is more useful than a pulsed beam. However, the power of an available CW laser is generally much weaker than the peak power of a pulsed laser. Thus, how to enhance the photo-neutralization efficiency has been the key point to realize a practical steady-flux PDINIB apparatus. We succeeded in improvement of the photo-neutralization efficiency in our trial apparatus up to 49 %, which we determined using sensitive measurement techniques method developed in this study.Molecular design techniques based on post-SCF ab initio molecular orbital theory were employed to further extend applicability of the PDECB method. We found that use of a beam of dialkyl group-III nitrene biradicaloid produced by the PDECB method is advantageous to the low-temperature thin-film growth of stoichiometric group-III nitride. The theoretical results indicated that (CH_3)_2GaN_3 is a promising PDECB source material in that this molecule possesses the nature of unimolecular metastable dye. Less

为了进一步发展量子功能器件和纳米机电系统，近年来巧妙地利用中性自由基的选择性表面反应进行器件加工已成为不可或缺的。在中性自由基和良好表征的材料表面之间的化学反应的实验研究中遇到的问题是如何仅将具有所需动能的所需中性自由基物质充分供应到表面上。为了克服这一困难，研究者提出了几种实验方法来产生稳定通量的中性自由基（RBNR）细化束。其中两种方法是负离子束光去电离法（PDINIB）和高能复合束光解离法（PDECB）。我们已经开发了一种利用PDINIB方法产生的RBNR的表面处理装置。当我们将RBNR应用于薄膜生长时， ...更多信息 使用CW激光获得的勒克斯光束比脉冲光束更有用。然而，可用的CW激光器的功率通常比脉冲激光器的峰值功率弱得多。因此，如何提高光中和效率是实现实用化的稳通量PDINIB装置的关键。我们成功地提高了我们的实验装置的光中和效率高达49%，这是我们确定使用灵敏的测量技术方法在本研究中发展的。分子设计技术的基础上后SCF从头计算分子轨道理论，进一步扩展PDECB方法的适用性。我们发现，使用一束由PDECB方法产生的二烷基-III族氮宾双自由基有利于化学计量的III族氮化物的低温薄膜生长。理论计算结果表明，（CH_3）_2GaN_3具有单分子亚稳染料的性质，是一种很有前途的PDECB源材料。少

项目成果

Keiji Hayashi: "Phonon-Band Engineering as a Novel Approach to Modify Frictional Characteristics of Mesoscopic Solid Materials"Computer Physics Communications. 142・1-3. 238-242 (2001)

Keiji Hayashi：“声子带工程作为改变介观固体材料摩擦特性的新方法”计算机物理通讯142・1-3（2001）。

Keiji Hayashi: "A Sensitive In Situ Method to Measure the Rate of Neuiral Free Radical Production by Photo-Deionization of Negative Ion Beams"Journal of Vacuum Science and Technology A. 20・3(in press). (2002)

Keiji Hayashi：“通过负离子束光去离子测量神经自由基产生率的灵敏原位方法”真空科学与技术杂志 A. 20・3（出版中）。

Hayashi,Kenji: "A Sensitive In Situ Method to Measure the Rate of Neutral Free Radical Production by Photo-Deionization of Negative Ion Beams"Journal of Vacuum Science and Technology A. 20 (3) (in press). (2002)

Hayashi，Kenji：“一种通过负离子束光去离子作用测量中性自由基产生率的灵敏原位方法”真空科学与技术杂志 A. 20 (3)（出版中）。

Keiji Hayashi: "Phonon-Band Engineering as a Novel Approach to Modify Frictional Characteristics of Mesoscopic Solid Materials"Computer Physics Communications. (to be published).

Keiji Hayashi：“声子带工程作为修改介观固体材料摩擦特性的新方法”计算机物理通讯。

Keiji Hayashi: "Possible Designing Artificial Materials of Desired Wearless-Frictional Characteristics for Nano-Electromechanical Systems"Proceedings of the International Tribology Conference. I. 785-788 (2001)

Keiji Hayashi：“为纳米机电系统设计具有所需无磨损摩擦特性的人造材料的可能性”国际摩擦学会议论文集。