X-ray Portrait High Resolution the Trial Production of Expansion Detection Equipment

X射线肖像高分辨率扩容检测设备的试制

• 批准号: 12650036
• 负责人: YADA Keiji
• 金额: $ 2.37万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650036/
• 关键词: X-Ray Two-Dimensional Portrait; High Resolution X-Ray; Solid of Semiconductor Photography Element; 半導体固体撮像素子

The space which expands the photoelectron image formed by X-rays hitting a photoelectron in electron optics, and is detected and recorded with MCP or an activity type semiconductor element (laminating APS) resolution aims at the trial production of the 2-dimensional detection equipment which is about 50nm.First, the photoelectron image by X ray excitation was observable using the X ray target, although the decomposition performance of the expansion image by the penetration electronic wire improved to 60nm on the fluorescence board to 50 times simultaneously.The present condition and a problem1. The decomposition performance of the electronic line image which used 15kV accelerating voltage improved to 40nm.2. A decomposition performance will become bad if a photograph is excited and taken by the X-rays from a target also in the state of 1. But, the small hole around 1μ has been decomposed in photography of diatomite.3. In the experiment which used SOR light, the bio sample (HeLa cell) has been hooted in photo counting mode by the irradiation of X-rays which carried out the spectrum. Prolonged photography of 10 hours was also stabilized and the difference in the internal structure of the image by wavelength has been Checked. The quality of an image was of the same grade as the best thing of a zooming pipe, or was a grade better than it. A decomposition performance is presumed to be 0.3 -0.4 μm from the image of diatomite.4. Improve the electronic field intensity of the front of a sample ; it has checked that a decomposition performance was improvable.In order to obtain the high decomposition performance of a policy objective, improve the electronic field intensity of the front of a sample sharply, astigmatic perfect compensation, and effective use of Laminating APS are performed. Since it is thought with it being prospective that filtering of an image is required, the Vienna filter is examined.

该空间扩展了电子光学中x射线撞击光电子形成的光电子图像，并以MCP或活性型半导体元件（层压APS）分辨率进行检测和记录，旨在试制约50nm的二维检测设备。首先，使用X射线靶观察到X射线激发的光电子图像，尽管穿透电子线在荧光板上对60nm扩展图像的分解性能提高到50次同时进行。现状与问题将15kV加速电压下的电子线像分解性能提高到40nm.2。如果从状态为1的目标上用x射线激发和拍摄照片，分解性能就会变差。但在硅藻土摄影中，1μ左右的小孔已被分解。在使用SOR光的实验中，生物样品（HeLa细胞）在x射线照射下进入光计数模式，进行光谱分析。长时间摄影10小时也稳定，并检查了波长的图像内部结构的差异。图像的质量和一根管子里最好的东西的质量是一样的，或者比它好一个等级。根据硅藻土的图像，推测其分解性能为0.3 -0.4 μm。提高样品正面的电场强度；它已经检查了分解性能是可以改进的。为了获得高分解性能的政策目标，大幅提高样品前的电子场强度，进行了像散完美补偿和层压APS的有效利用。由于人们认为需要对图像进行滤波，因此对维也纳滤波器进行了研究。