X-ray Portrait High Resolution the Trial Production of Expansion Detection Equipment

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The space which expands the photoelectron image formed by X-rays hitting a photoelectron in electron optics, and is detected and recorded with MCP or an activity type semiconductor element (laminating APS) resolution aims at the trial production of the 2-dimensional detection equipment which is about 50nm.First, the photoelectron image by X ray excitation was observable using the X ray target, although the decomposition performance of the expansion image by the penetration electronic wire improved to 60nm on the fluorescence board to 50 times simultaneously.The present condition and a problem1. The decomposition performance of the electronic line image which used 15kV accelerating voltage improved to 40nm.2. A decomposition performance will become bad if a photograph is excited and taken by the X-rays from a target also in the state of 1. But, the small hole around 1μ has been decomposed in photography of diatomite.3. In the experiment which used SOR light, the bio sample (HeLa cell) has been hooted in photo counting mode by the irradiation of X-rays which carried out the spectrum. Prolonged photography of 10 hours was also stabilized and the difference in the internal structure of the image by wavelength has been Checked. The quality of an image was of the same grade as the best thing of a zooming pipe, or was a grade better than it. A decomposition performance is presumed to be 0.3 -0.4 μm from the image of diatomite.4. Improve the electronic field intensity of the front of a sample ; it has checked that a decomposition performance was improvable.In order to obtain the high decomposition performance of a policy objective, improve the electronic field intensity of the front of a sample sharply, astigmatic perfect compensation, and effective use of Laminating APS are performed. Since it is thought with it being prospective that filtering of an image is required, the Vienna filter is examined.