High-resolution X-Ray diffractometer

高分辨率X射线衍射仪

• 批准号: 534828722
• 金额: --
• 依托单位: Technische Universität München (TUM)
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2023
• 资助国家: 德国
• 起止时间: 2022-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/534828722?language=en
• 关键词: resolution; Ray; diffractometer

The Chair for Semiconductor Technology in the Walter Schottky Institute (WSI) of the Technical University of Munich (TUM) performs research on novel mid-infrared and terahertz quantum cascade lasers, mid-infrared surface-emitting lasers, nonlinear optical metasurfaces based on semiconductor heterostructures processed into sub-wavelength optical nanoresonators, and photonic integrated circuits that combine semiconductor laser sources, detectors, as well as passive and active photonic elements on the same semiconductor platform. To produce the III/V semiconductor heterostructures for all of these research topics, the Chair uses three Molecular Beam Epitaxy (MBE) systems and one Metal-Organic Vapor Phase Epitaxy (MOVPE) system. An X-Ray diffractometer (XRD) system is critical to provide calibration of the compound semiconductor layer composition and thicknesses for the structures grown by MBE and MOVPE. It is thus one of the basic requirements for the feasibility of each of our research projects. In addition, the system should be able to perform homogeneity measurements over an area of at least 4 × 4 inches, as well as crystal quality studies using Reciprocal Space Maps. The latter is particularly interesting since most of the device structures used are highly strained layer packages. The only suitable XRD system in the Walter Schottky Institute is more than 30 years old and is at the end of its lifetime. Specifically, its hardware and computer software are no longer supported by the manufacturer. In the past several years, the system experienced several breakdowns that were fixed by a local electronic shop as the manufacturer does not support the system any longer. This proposal requests support from the Federal Government in acquiring a new XRD system to replace the old system and enable the continuation of the chair research.

慕尼黑工业大学（TUM）沃尔特·肖特基研究所（WSI）的半导体技术主席对新型中红外和太赫兹量子级联激光器、中红外表面发射激光器、基于半导体异质结构的非线性光学超颖表面进行研究，该超颖表面被加工成亚波长光学纳米谐振器，以及光子集成电路，该光子集成电路将联合收割机半导体激光源、检测器、以及相同半导体平台上的无源和有源光子元件。为了生产所有这些研究课题的III/V半导体异质结，主席使用三个分子束外延（MBE）系统和一个金属有机气相外延（MOVPE）系统。X射线衍射仪（XRD）系统对于为通过MBE和MOVPE生长的结构提供化合物半导体层成分和厚度的校准是至关重要的。这是我们每个研究项目可行性的基本要求之一。此外，该系统应能够在至少4 × 4英寸的区域内进行均匀性测量，以及使用互易空间图进行晶体质量研究。后者是特别令人感兴趣的，因为大多数使用的器件结构是高度应变层封装。Walter Schottky研究所唯一合适的XRD系统已经使用了30多年，并处于使用寿命的末期。具体而言，其硬件和计算机软件不再由制造商支持。在过去的几年里，该系统经历了几次故障，由当地的电子商店修复，因为制造商不再支持该系统。该提案要求联邦政府支持购买新的XRD系统，以取代旧系统，并使椅子研究得以继续。