Research on static and dynamic characteristics of laser assisted non-contact micro mechanism for near-field optical recording

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This research estimates the static and dynamic characteristics of the laser assisted micro levitation mechanism caused by thermal creep flow, which occurs only in regions where the Knudsen number defined as the ratio of the molecular mean free path and the characteristic length is not negligible, between two parallel plates with submicron spacings and temperature gradients. Influences of the accommodation coefficient of boundary surface and boundary configurations are rigorously obtained by the use of newly developed flow rate coefficients Qp and Qt. Static pressure distributions are compared with those by the direct simulation Monte Carlo (DSMC) technique and are found to agree well with each other. Dynamic pressures, which consist of stiffness and damping characteristics, are also analyzed by the linearization method of the MGL equation. The results of this research are helpful in designing the thermally induced micro levitation mechanism.