Research on static and dynamic characteristics of laser assisted non-contact micro mechanism for near-field optical recording

激光辅助近场光记录非接触微机构静动态特性研究

• 批准号: 12650053
• 负责人: FUKUI Shigehisa
• 金额: $ 2.18万
• 依托单位: Tottori University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650053/
• 关键词: Molecular Gas Dynamics; Boltzmann Equation; Direct Simulation Monte Carlo; Thermal Creep Flow; Microtribology; Molecular Gas-film Lubrication; Nanotechnology; Micro Mechanism; ボルソマン方程式

This research estimates the static and dynamic characteristics of the laser assisted micro levitation mechanism caused by thermal creep flow, which occurs only in regions where the Knudsen number defined as the ratio of the molecular mean free path and the characteristic length is not negligible, between two parallel plates with submicron spacings and temperature gradients. Influences of the accommodation coefficient of boundary surface and boundary configurations are rigorously obtained by the use of newly developed flow rate coefficients Qp and Qt. Static pressure distributions are compared with those by the direct simulation Monte Carlo (DSMC) technique and are found to agree well with each other. Dynamic pressures, which consist of stiffness and damping characteristics, are also analyzed by the linearization method of the MGL equation. The results of this research are helpful in designing the thermally induced micro levitation mechanism.

这项研究估计了由热蠕变流引起的激光辅助微悬浮机制的静态和动态特性，这种热蠕变仅发生在两个具有亚微米间距和温度梯度的平行板之间，克努森数定义为分子平均自由程与特征长度之比不可忽略的区域。通过使用新开发的流量系数Qp和Qt，严格获得了边界表面和边界配置的调节系数的影响。将静压分布与直接模拟蒙特卡罗 (DSMC) 技术的静压分布进行比较，发现彼此非常吻合。动态压力由刚度和阻尼特性组成，也通过 MGL 方程的线性化方法进行分析。该研究结果有助于热致微悬浮机构的设计。

项目成果

福井茂寿,山根清美,山住剛,若杉康博: "熱ほふく流を利用したナノメータ浮上メカニズム(TIL)の基本特性解析(分子気体潤滑(MGL)解析とDSMC法による特性比較)"日本トライボロジー学会トライボロジー会議東京予稿集. 9-10 (2000)

Shigehisa Fukui、Kiyomi Yamane、Tsuyoshi Yamazumi、Yasuhiro Wakasugi：“使用热流的纳米悬浮机构 (TIL) 的基本特性分析（分子气体润滑 (MGL) 分析和 DSMC 方法的特性比较）” 日本摩擦学会摩擦学会议东京会议录 9-10 (2000)

S.Fukui, K.Yamane, H.Matsuoka: "Novel Laser-Assisted Micro Levitation Mechanism for Magneto-optical Recording"IEEE Transactions on Magnetics. Vol.37, No.4. 1845-1848 (2001)

S.Fukui、K.Yamane、H.Matsuoka：“用于磁光记录的新型激光辅助微悬浮机构”IEEE 磁学学报。

福井茂寿, 勝原大輔, 山根清美, 松岡広成: "熱ほふく流を利用した非接触マイクロマシン要素の特性解析(電界面特性の影響)"日本トライボロジー学会トライボロジー会議宇都宮予稿集. 57-58 (2001)

Shigehisa Fukui、Daisuke Katsuhara、Kiyomi Yamane、Hironari Matsuoka：“利用热流（电表面特性的影响）对非接触式微机械元件进行特性分析”日本摩擦学会摩擦学会议宇都宫会议记录 57-58（2001 年）。

Fukui, S. and Yamane, K. and Matsuoka, H.: "Novel Laser-Assisted Micro Levitation Mechanism for Magneto-optical Recording"IEEE Trans on Magnetics. Vol. 37, No. 4. 1845-1848 (2001)

Fukui, S. 和 Yamane, K. 以及 Matsuoka, H.：“用于磁光记录的新型激光辅助微悬浮机构”IEEE Trans on Magnetics。

S.Fukui, K.Yamane, H.Matsuoka: "Novel Laser-Assisted Micro Leviattion Mechanism for Micro-optical Recording"IEEE Transactions on Magnetics. Vol.37,No.4. 1845-1848 (2001)

S.Fukui、K.Yamane、H.Matsuoka：“用于微光记录的新型激光辅助微悬浮机制”IEEE 磁学汇刊。