Research on thermally induced levitation mechanism using thermal creep flow

利用热蠕变流的热诱导悬浮机理研究

• 批准号: 08650065
• 负责人: FUKUI Shigehisa
• 金额: $ 1.6万
• 依托单位: Tottori University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08650065/
• 关键词: Molecular Gas Dynamics; Boltzmann Equation; Direct Simulation Monte Carlo; Thermal Creep Flow; Microtribology; Molecular Gas-film Lubrication; Nanotechnology; Micro Mechanism

This research estimates the micro levitation forces caused by thermal creep flow, which occurs only in regions where the Knudsen number defined as the ratio of the molecular mean free path and the characteristic length is not negligible, between two parallel plates with submicron spacings and temperature gradients. A molecular gas film lubrication equation (MGL equation) in cluding thermal creep flow effects, which is a Reynolds-type gas bearing equation for arbitrarily small spacings, and the Direct Simulation Monte Carlo (DSMC) technique are both utilized to calculate the air pressures generated between two parallel plates in the thermally induced levitation mechanism. An infinitely wide plate with a length of 2 mm, whose boundary temperature has an inverse-V-shaped distribution and the center temperature tau_<wc>(=T_<wcenter>lT_0-1) is 0.1, has a load-carrying capacity of about 3 mN for unit width when the spacing between the two plates is 0.1 mum.

本研究估计的微悬浮力所造成的热蠕变流，这只发生在区域的克努森数定义为分子的平均自由程和特征长度的比率是不可忽略的，在两个平行板之间的亚微米间距和温度梯度。采用考虑热蠕变效应的分子气膜润滑方程（MGL方程）和直接模拟蒙特卡罗（DSMC）技术，计算了热悬浮机构中两平行平板间产生的空气压力。对于边界温度呈倒V形分布、中心温度τ_<wc>（= T_1T_0 <wcenter>-1）为0.1的长度为2 mm的无限宽平板，当两平板之间的间距为0.1 μ m时，其单位宽度的承载能力约为3 mN。

项目成果

Fukui, S.and Kaneko, R.: "Estimation of Micro Levitation Forces Caused by Thermal Creep Flow (Mlecular Gas Film Lubrication Analysis and DSMC Analysis)" Proceedings of Intl.Conf.on Fluid Engineering. 1241-1245 (1997)

Fukui, S. 和 Kaneko, R.：“热蠕变流引起的微悬浮力的估计（分子气膜润滑分析和 DSMC 分析）”国际流体工程会议录。

Fukui,S.and Kaneko,R.: "Estimation of Micro Levitation Forces Caused by Thermal Creep Flow (Molecular Gas Film Lubrication Analysis and DSMC Analysis)" Proc.of Intl.Conf.on Fluid Engineering. 1241-1245 (1997)

Fukui,S. 和 Kaneko,R.：“热蠕变流引起的微悬浮力的估计（分子气膜润滑分析和 DSMC 分析）”Proc.of Intl.Conf.on Fluid Engineering。

Fukui, S.and Kaneko, R.: "Estimation of Micro Levitation Foeces Caused by Thermal Creep Flow (Molecular Gas Film Lubncation Analysis and DSMC Analysis)" Proc.of Intl.Conf.on Fluid Engineering. 1241-1245 (1997)

Fukui, S. 和 Kaneko, R.：“热蠕变流引起的微悬浮效应的估计（分子气膜润滑分析和 DSMC 分析）”Proc.of Intl.Conf.on Fluid Engineering。