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Design and Processing of Environmental Gas Sensors Fabricated by Utilizing Decorative Technique on Pottery and Porcelain

利用陶瓷装饰技术制作环境气体传感器的设计与加工

基本信息

批准号：
12792014
负责人：
EGASHIRA Makoto
金额：
$ 18.94万
依托单位：
Nagasaki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for University and Society Collaboration
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

项目摘要

Fabrication of high-sensitive semiconductor gas sensors and application to other electronic devices by utilizing a slide-off transfer printing were attempted as below.1. Inflammable gas sensors Hetero-stacking of a pure SnO_2 layer over a Pt-loaded SnO_2 layer (SnO_2/Pt-SnO_2 sensor) led to the highest increase in H_2 sensitivity, whereas H_2 sensitivity of a Pt-SnO_2/SnO_2 sensor was much lower than that of the pure SnO_2 sensor. Stacking of a SnO_2-based layer over a TiO_2 layer also led to an increase in the H_2 sensitivity with a decrease in sensor resistance. On the other hand, NiO-loaded In_2O_3-based sensors showed high sensitivity to benzene and monochlorobenzene. Moreover, an SnO_2 sensor with a porous substrate layer (the porosity : ca. 56.2%) between the SnO_2 layer and a dense alumina substrate showed higher n-C_4H_<10> sensitivity compared with that fabricated directly on a dense alumina substrate.2. NO_x sensor Heterolayer Pt-Al_2O_3/WO_3 and Cr_2O_3-SnO_2 single layer se … More nsor were confirmed to operate as a total NO_x sensor ZnO-WO_3/ZnO sensor showed high NO_2 sensitivity and short response/recovery properties. In addition, introduction of a porous alumina sub-layer between a sensing layer and a dense substrate was effective to improve the NO_2 sensitivity and the response/recovery properties.3. Chemical surface modification of SnO_2 powder with ethoxysilane An SiO_2 thin film induced by the surface modification with diethoxydimethylsilane was found to exist as a grain-boundary phase from TEM observation. The limitation of neck growth between SnO_2 particles by the SiO_2 thin film coating is anticipated to be responsible for increasing the potential barrier height and improving the sensing properties to inflammable gases such as H_2, CH_4 and C_3H_8.4. Microstructure control of BaTiO_3 thick films Composition of a slurry containing BaTiO_3 fine powder prepared hydrothermally, some sintering aids, printing oil and 2-propanol was optimized for being utilized to a spin-coating technique. In consequence, dense and thick BaTiO_3 films (10-20μm) could be fabricated on a silicon substrate after calcination at 1050-1120℃. Less

本论文尝试利用滑离转印技术制作高灵敏度半导体气敏元件，并应用于其他电子元件。纯SnO_2/Pt-SnO_2气敏元件的H_2灵敏度比纯SnO_2气敏元件的H_2灵敏度低得多。在TiO_2层上叠层SnO_2基层也导致了H_2灵敏度的增加，同时传感器电阻降低。而NiO负载的In_2O_3基传感器对苯和一氯苯有很高的灵敏度。此外，还研制了一种具有多孔基底层（孔隙率约为100%）的SnO_2传感器。56.2%），与直接在致密氧化铝衬底上制备的样品相比，具有更高的n-C_4 H_<10>2敏感性.氮氧化物传感器Pt-Al_2 O_3/WO_3和Cr_2O_3-SnO_2单层膜 ...更多信息 ZnO-WO_3/ZnO传感器具有高的NO_2灵敏度和短的响应/恢复特性。此外，在敏感层和致密基底之间引入多孔氧化铝亚层，可以有效地提高传感器对NO_2的敏感性和响应/恢复性能.用二甲基二乙氧基硅烷对SnO_2粉体进行化学表面改性用TEM观察发现，改性后的SiO_2薄膜以晶界相存在。SiO_2薄膜的包覆限制了SnO_2颗粒间的颈部生长，这可能是提高势垒高度，改善对H_2、CH_4和C_3H_8.4等可燃气体敏感性能的原因。BaTiO_3厚膜的微结构控制研究了水热法制备的BaTiO_3微粉、助烧剂、印刷油和异丙醇组成的旋涂浆料。在1050-1120℃下煅烧后，在硅衬底上可以制备出致密、厚约10-20μm的BaTiO_3薄膜。少