Development of Moving Light Wave Guide Structure including an Actuator for Optical MEMS

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1. Investigation of the polymer for light wave guideThe solubility of commercial transparent elastmers for organic solvents was investigated. This result suggests the combination of the elastmers for making flexible optical wave-guide.2. Development of the fabrication process of polymer optical wave guideThe etching process of the fluorinated polyimide for the wave-guide was developed. The process of the oblique etching by oxygen ion was established and it makes feasible to fabricate the oblique mirror in an optical device.3. Design and fabrication of one dimensional optical scannerDesign of the one-dimensional optical scanner was done. Theoretical equation for estimating stiffness of wave-guide was also derived. According to the design results, the fabrication process was proposed and carried out. Some problems were found in the process and they were fixed by changing the mask and the process parameters. The wave-guide and the electrical wire in the scanner structure were successfully fabricated. However, serious problem appeared. The polyimide was damaged during the longtime deep etching for making the final scanner structure. It seems to be caused by the heating by the ion bombardment The suitable process parameter could not be found though the process condition was investigated. The problem may be caused by the equipment characteristics, too. In future, the improvement of the cooling of a sample stage and cooling method will be necessary.