Development of Moving Light Wave Guide Structure including an Actuator for Optical MEMS

1.光波导用聚合物的研究考察了市售透明弹性体在有机溶剂中的溶解性能。这一结果表明，弹性体的组合可用于制作柔性光波导。聚合物光波导制作工艺的研究开发了用于光波导的氟化聚酰亚胺的刻蚀工艺。建立了氧离子斜面刻蚀工艺，为在光学器件中制作斜面反射镜提供了可能。一维光学扫描仪的设计与制造完成了一维光学扫描仪的设计。给出了估算波导刚度的理论公式。根据设计结果，提出并实施了该器件的制作工艺。在工艺过程中发现了一些问题，并通过改变掩模和工艺参数进行了修复。成功地制作了扫描器结构中的波导和电线。然而，也出现了严重的问题。为了制作最终的扫描仪结构，聚酰亚胺在长时间的深腐蚀过程中被损坏。这似乎是由于离子轰击加热造成的，尽管对工艺条件进行了研究，但找不到合适的工艺参数。这个问题也可能是设备特性造成的。今后，样品台的冷却方式和冷却方式的改进是必要的。

1. Investigation of the polymer for light wave guideThe solubility of commercial transparent elastmers for organic solvents was investigated. This result suggests the combination of the elastmers for making flexible optical wave-guide.2. Development of the fabrication process of polymer optical wave guideThe etching process of the fluorinated polyimide for the wave-guide was developed. The process of the oblique etching by oxygen ion was established and it makes feasible to fabricate the oblique mirror in an optical device.3. Design and fabrication of one dimensional optical scannerDesign of the one-dimensional optical scanner was done. Theoretical equation for estimating stiffness of wave-guide was also derived. According to the design results, the fabrication process was proposed and carried out. Some problems were found in the process and they were fixed by changing the mask and the process parameters. The wave-guide and the electrical wire in the scanner structure were successfully fabricated. However, serious problem appeared. The polyimide was damaged during the longtime deep etching for making the final scanner structure. It seems to be caused by the heating by the ion bombardment The suitable process parameter could not be found though the process condition was investigated. The problem may be caused by the equipment characteristics, too. In future, the improvement of the cooling of a sample stage and cooling method will be necessary.