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Development of Moving Light Wave Guide Structure including an Actuator for Optical MEMS

开发包括光学 MEMS 致动器的移动光波导结构

基本信息

批准号：
12838003
负责人：
MINAMI Kazuyuki
金额：
$ 2.43万
依托单位：
Yamaguchi University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12838003/
关键词：
Micromachine Optical Device Light Wave Guide MEMS Actuator アクチュエータ

项目摘要

1. Investigation of the polymer for light wave guideThe solubility of commercial transparent elastmers for organic solvents was investigated. This result suggests the combination of the elastmers for making flexible optical wave-guide.2. Development of the fabrication process of polymer optical wave guideThe etching process of the fluorinated polyimide for the wave-guide was developed. The process of the oblique etching by oxygen ion was established and it makes feasible to fabricate the oblique mirror in an optical device.3. Design and fabrication of one dimensional optical scannerDesign of the one-dimensional optical scanner was done. Theoretical equation for estimating stiffness of wave-guide was also derived. According to the design results, the fabrication process was proposed and carried out. Some problems were found in the process and they were fixed by changing the mask and the process parameters. The wave-guide and the electrical wire in the scanner structure were successfully fabricated. However, serious problem appeared. The polyimide was damaged during the longtime deep etching for making the final scanner structure. It seems to be caused by the heating by the ion bombardment The suitable process parameter could not be found though the process condition was investigated. The problem may be caused by the equipment characteristics, too. In future, the improvement of the cooling of a sample stage and cooling method will be necessary.

1.光波导用聚合物的研究研究了商品透明弹性体在有机溶剂中的溶解性。这一结果为弹性体的组合制备柔性光波导提供了理论依据。聚合物光波导制备工艺的研究开发了氟化聚酰亚胺光波导的刻蚀工艺。建立了氧离子倾斜刻蚀工艺，为光学器件中倾斜反射镜的制作提供了可行性.一维光学扫描仪的设计与制作完成了一维光学扫描仪的设计。导出了估算波导刚度的理论公式。根据设计结果，提出并实施了制作工艺。在工艺中发现了一些问题，并通过改变掩模和工艺参数进行了修复。成功制作了扫描器结构中的波导和电线。然而，严重的问题出现了。在制作最终扫描器结构的长时间深蚀刻过程中，聚酰亚胺被损坏。这似乎是由于离子轰击加热引起的。通过对工艺条件的研究，没有找到合适的工艺参数。问题也可能是由设备特性引起的。今后，样品台的冷却和冷却方法的改进将是必要的。