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Development of Moving Light Wave Guide Structure including an Actuator for Optical MEMS

开发包括光学 MEMS 致动器的移动光波导结构

基本信息

批准号：
12838003
负责人：
MINAMI Kazuyuki
金额：
$ 2.43万
依托单位：
Yamaguchi University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12838003/
关键词：
Micromachine Optical Device Light Wave Guide MEMS Actuator アクチュエータ

项目摘要

1. Investigation of the polymer for light wave guideThe solubility of commercial transparent elastmers for organic solvents was investigated. This result suggests the combination of the elastmers for making flexible optical wave-guide.2. Development of the fabrication process of polymer optical wave guideThe etching process of the fluorinated polyimide for the wave-guide was developed. The process of the oblique etching by oxygen ion was established and it makes feasible to fabricate the oblique mirror in an optical device.3. Design and fabrication of one dimensional optical scannerDesign of the one-dimensional optical scanner was done. Theoretical equation for estimating stiffness of wave-guide was also derived. According to the design results, the fabrication process was proposed and carried out. Some problems were found in the process and they were fixed by changing the mask and the process parameters. The wave-guide and the electrical wire in the scanner structure were successfully fabricated. However, serious problem appeared. The polyimide was damaged during the longtime deep etching for making the final scanner structure. It seems to be caused by the heating by the ion bombardment The suitable process parameter could not be found though the process condition was investigated. The problem may be caused by the equipment characteristics, too. In future, the improvement of the cooling of a sample stage and cooling method will be necessary.

1. 研究了商用透明弹性体对有机溶剂的溶解度。这一结果建议将弹性体组合在一起制作柔性光波导。聚合物光波导制备工艺的发展研究了氟化聚酰亚胺光波导的蚀刻工艺。建立了氧离子斜刻蚀工艺，使在光学器件中制作斜反射镜成为可能。一维光学扫描仪的设计与制作完成了一维光学扫描仪的设计。推导了波导刚度估计的理论公式。根据设计结果，提出并实施了制造工艺。在工艺过程中发现了一些问题，通过改变掩模和工艺参数进行了解决。成功地制作了扫描仪结构中的波导和电线。然而，严重的问题出现了。在制作最终扫描仪结构的长时间深度刻蚀过程中，聚酰亚胺被破坏。这可能是由离子轰击加热引起的，通过对工艺条件的研究，没有找到合适的工艺参数。这个问题也可能是由设备特性引起的。在今后的研究中，有必要对样品阶段的冷却和冷却方法进行改进。